4 * this program tries helping to understand the amorphous depuration
5 * and recrystallization of SiCx while ion implanation. hopefully the program
6 * will simulate the stabilization of the selforganizing structure in the
10 * - J. K. N. Lindner. Habilationsschrift, Universitaet Augsburg.
11 * - Maik Haeberlen. Diplomarbeit, Universitaet Augsburg.
18 /* global variables */
25 puts("-a <value> \t slope of C concentration with depth (default 1)");
26 puts("-c <value> \t concentration at depths 0 (default 0)");
27 puts("-x <value> \t # x segments (default 50)");
28 puts("-y <value> \t # y segments (default 50)");
29 puts("-z <value> \t # z segments (default 100)");
33 int main(int argc,char **argv) {
34 int x_seg,y_seg,z_seg; /* amount of segments */
35 int x,y,z; /* segments */
36 int i; /* for counting */
37 int slope_cc,start_cc; /* C concentration: slope, c(0) */
40 x_seg=DEFAULT_X_SEG-1;
41 y_seg=DEFAULT_Y_SEG-1;
42 z_seg=DEFAULT_Z_SEG-1;
43 slope_cc=DEFAULT_SLOPE_CC;
44 start_cc=DEFAULT_START_CC;
46 /* parse command args */
58 slope_cc=atoi(argv[++i]);
61 start_cc=atoi(argv[++i]);
64 x_seg=atoi(argv[++i]);
67 y_seg=atoi(argv[++i]);
70 z_seg=atoi(argv[++i]);
76 /* calculate sum_z_segments one time! */
78 for(i=0;i<z_seg;i++) sum_z_segments+=(start_cc+i*slope_cc);
79 printfd("debug: sum z segments -> %d\n",sum_z_segments);
88 z=rand_get_lgp(slope_cc,start_cc);
89 printf ("x=%d y=%d z=%d\n",x,y,z);