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\usepackage[german]{babel}

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% the document begins ...
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\begin{document}

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% header
\vfill
\hfill
\psshadowbox{\makebox[0.95\textwidth]{%
	\hfill
	\parbox[c]{0.1\linewidth}{\includegraphics[height=4.5cm]{uni-logo.eps}}
	\parbox[c]{0.7\linewidth}{%
		\begin{center}
			\textbf{\Huge{Monte Carlo simulation study of a
			              selforganization process\\
			              leading to ordered precipitate structures}
			}\\[0.7em]
        		\textsc{\LARGE \underline{F. Zirkelbach}, M. H"aberlen,
			               J. K. N. Lindner, B. Stritzker
			}\\[0.7em]
        		{\large Institut f"ur Physik, Universit"at Augsburg,
			 D-86135 Augsburg, Germany
			}
		\end{center}
	}
	\parbox[c]{0.1\linewidth}{%
		\includegraphics[height=4.1cm]{Lehrstuhl-Logo.eps}
	}
	\hfill
}}
\hfill\mbox{}\\[0.5cm]

%\vspace*{1.3cm}

% content, let's rock the columns
\begin{lrbox}{\spalten}
	\parbox[t][\textheight]{1.3\textwidth}{%
		%\vspace*{0.2cm}
		\hfill
% first column
\begin{spalte}
	\begin{kasten}

        \section*{1 \hspace{0.1cm} {\color{blue}Experimental observations}}

		\subsection*{1.1 {\color{blue} Amorphous inclusions}}
			\begin{center}              
				\includegraphics[width=11cm]{k393abild1_e.eps} 
			\end{center}
			Cross section TEM image:\\
			$180 \, keV$ $C^+ \rightarrow Si$,
			$T=150 \, ^{\circ} \mathrm{C}$,
			Dose: $4.3 \times 10^{17} \, cm^{-2}$\\
			black/white: crystalline/amorphous material\\
			L: amorphous lamellae, S: spherical amorphous inclusions

		\subsection*{1.2 {\color{blue} Carbon distribution}}
			\begin{center}
				\includegraphics[width=11cm]{eftem.eps}
			\end{center}
			Brightfield TEM and respective EFTEM image:\\
			$180 \, keV$ $C^+ \rightarrow Si$,
			$T=200 \, ^{\circ} \mathrm{C}$,
			Dose: $4.3 \times 10^{17} \, cm^{-2}$\\
			yellow/blue: high/low concentrations of carbon

	\end{kasten}

	\begin{kasten}
        	\section*{2 \hspace{0.1cm} {\color{blue}Model}}

			\begin{center}
				\includegraphics[width=11cm]{modell_ng_e.eps}
			\end{center}
			\begin{itemize}
\item supersaturation of $C$ in $c-Si$\\
      $\rightarrow$ {\bf carbon induced} nucleation of spherical
      $SiC_x$-precipitates
\item high interfacial energy between $3C-SiC$ and $c-Si$\\
      $\rightarrow$ {\bf amourphous} precipitates
\item $20 - 30\,\%$ lower silicon density of $a-SiC_x$ compared to $c-Si$\\
      $\rightarrow$ {\bf lateral strain} (black arrows)
\item reduction of the carbon supersaturation in $c-Si$\\
      $\rightarrow$ {\bf carbon diffusion} into amorphous volumina
      (white arrows)
\item lateral strain (vertical component relaxating)\\
      $\rightarrow$ {\bf strain induced} lateral amorphization
			\end{itemize}
	\end{kasten}
\end{spalte}
\begin{spalte}
	\begin{kasten}
		\section*{3 \hspace{0.1cm} {\color{blue}Simulation}}

		\subsection*{3.1 {\color{blue} Discretization of the target}}
	    		\begin{center}
            			\includegraphics[width=6cm]{gitter_e.eps}
			\end{center}

		\subsection*{3.2 {\color{blue} Simulation algorithm}}

		\subsubsection*{3.2.1 Amorphization/Recrystallization}
			\begin{itemize}
				\item random numbers according to the nuclear
				      energy loss to determine the volume hit
				      by an impinging ion
				\item compute local probability for
				      amorphization:\\
\[
 p_{c \rightarrow a}(\vec{r}) = {\color{green} p_b} + {\color{blue} p_c c_C(\vec{r})} + {\color{red} \sum_{\textrm{amorphous neighbours}} \frac{p_s c_C(\vec{r'})}{(r-r')^2}}
\]
				      and recrystallization:
\[
 p_{a \rightarrow c}(\vec r) = (1 - p_{c \rightarrow a}(\vec r)) \Big(1 - \frac{\sum_{direct \, neighbours} \delta (\vec{r'})}{6} \Big) \, \textrm{,}
\]
\[
\delta (\vec r) = \left\{
\begin{array}{ll}
	1 & \textrm{volume at position $\vec r$ amorphous} \\
	0 & \textrm{otherwise} \\
\end{array}
\right.
\]
				\item loop for the mean amount of hits by the
				      ion
			\end{itemize}
Three contributions to the amorphization process controlled by:
\begin{itemize}
	\item {\color{green} $p_b$} normal 'ballistic' amorphization
	\item {\color{blue} $p_c$} carbon induced amorphization
	\item {\color{red} $p_s$} stress enhanced amorphization
\end{itemize}

		\subsubsection*{3.2.2 Carbon incorporation}
			\begin{itemize}
				\item random numbers according to the
				      implantation profile to determine the
				      incorporation volume
				\item increase the amount of carbon atoms in
				      that volume
			\end{itemize}
		\subsubsection*{3.2.3 Diffusion/Sputtering}
			\begin{itemize}
				\item every $d_v$ steps transfer $d_r$ of the
				      carbon atoms of crystalline volumina to
				      an amorphous neighbour volume
				\item do the sputter routine after $n$ steps
				      corresponding to $3 \, nm$ of substrat
				      removal
			\end{itemize}

		\subsection*{3.3 {\color{blue} TRIM collision statistics}}
		\begin{center}
			\includegraphics[width=8cm]{trim_coll_e.eps}
		\end{center}
		\begin{center}
		$\Rightarrow$ mean constant energy loss per collision of an ion
		\end{center}
	\end{kasten}
\end{spalte}
\begin{spalte}
	\begin{kasten}
		\section*{4 \hspace{0.1cm} {\color{blue}Simulation results}}

		\subsection*{4.1 {\color{blue} Comparison with experiments}}
			\begin{center}              
			\includegraphics[width=11cm]{dosis_entwicklung_ng_e_1-2.eps}
			\end{center}
			\begin{center}              
			\includegraphics[width=11cm]{dosis_entwicklung_ng_e_2-2.eps}
			\end{center}
	\end{kasten}
	\begin{kasten}
		\subsection*{4.2 {\color{blue} Carbon distribution}}
			\begin{center}              
			\includegraphics[width=11cm]{ac_cconc_ver2_e.eps}
			\end{center}
			
	\end{kasten}
\end{spalte}
% fourth column
\begin{spalte}
	\begin{kasten}
		\subsection*{4.3 {\color{blue} More structural/compositional
		                               information}}
		\begin{center}
			\includegraphics[width=8cm]{97_98_ng_e.eps} \\
			Plane view of consecutive target layers $z$ and $z+1$
		\end{center}
	\end{kasten}
	\begin{kasten}
		\subsection*{4.4 \hspace{0.1cm} {\color{blue} Broad distribution
		             of lamellar structure - the recipe}}
		\subsubsection*{4.4.1 Constant carbon concentration}
			\makebox[11cm]{%
				\parbox[c]{5cm}{%
			\begin{itemize}
				\item multiple implantation \\ steps
				\item energies: $180$ - $10 \, keV$
				\item higher temeprature\\
				      $\rightarrow$ prevent amorphization
			\end{itemize}
			$\Rightarrow$ nearly constant carbon distribution
			($10 \, at.\%$)
				}
				\parbox[c]{6cm}{%
			\includegraphics[width=6cm]{multiple_impl_cp_e.eps}
				}
			}
		\subsubsection*{4.4.2 2 MeV C$^+$ implantation
		                               step}
			\begin{center}              
			\includegraphics[width=10cm]{multiple_impl_e.eps}
			\end{center}

	\end{kasten}
	\begin{kasten}
		\section*{5 \hspace{0.1cm} {\color{red} Conclusions}}
			\begin{itemize}
		\item selforganized nanometric precipitates by ion irradiation
		\item model describing the seoforganization process
		\item precipitate structures traceable by simulation
		\item detailed structural/compositional information
		\item recipe for broad distributions of lamellar structure
			\end{itemize}
	\end{kasten}
\end{spalte}
}
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\resizebox*{0.98\textwidth}{!}{%
\usebox{\spalten}}\hfill\mbox{}\vfill

\end{document}
