+\begin{figure}[t!h!]
+\begin{center}
+\includegraphics[width=12.5cm]{db_along_110.ps}\\
+\includegraphics[width=12.5cm]{db_along_110_cc.ps}
+\end{center}
+\caption{Minimum binding energy of dumbbell combinations with respect to the separation distance in bonds along \hkl<1 1 0> and C-C distance.}
+\label{fig:defects:comb_db110}
+\end{figure}
+Figure \ref{fig:defects:comb_db110} shows the corresponding plot of the data including a cubic spline interplation and a suitable fitting curve.
+The funtion found most suitable for curve fitting is $f(x)=a/x^3$ comprising the single fit parameter $a$.
+Thus, far-off located dumbbells show an interaction proportional to the reciprocal cube of the distance and the amount of bonds along \hkl<1 1 0> respectively.
+This behavior is no longer valid for the immediate vicinity revealed by the saturating binding energy of a second dumbbell at position 1, which is ignored in the fitting procedure.
+
+\begin{figure}[t!h!]
+\begin{center}
+\begin{minipage}[t]{5cm}
+a) \underline{Pos: 1, $E_{\text{b}}=0.26\text{ eV}$}
+\begin{center}
+\includegraphics[width=4.8cm]{00-1dc/0-26.eps}
+\end{center}
+\end{minipage}
+\begin{minipage}[t]{5cm}
+b) \underline{Pos: 3, $E_{\text{b}}=-0.93\text{ eV}$}
+\begin{center}
+\includegraphics[width=4.8cm]{00-1dc/0-93.eps}
+\end{center}
+\end{minipage}
+\begin{minipage}[t]{5cm}
+c) \underline{Pos: 5, $E_{\text{b}}=0.49\text{ eV}$}
+\begin{center}
+\includegraphics[width=4.8cm]{00-1dc/0-49.eps}
+\end{center}
+\end{minipage}
+\end{center}
+\caption{Relaxed structures of defect complexes obtained by creating a carbon substitutional at position 1 (a)), 3 (b)) and 5 (c)).}
+\label{fig:defects:comb_db_04}
+\end{figure}
+\begin{figure}[t!h!]
+\begin{center}
+\begin{minipage}[t]{7cm}
+a) \underline{Pos: 2, $E_{\text{b}}=-0.51\text{ eV}$}
+\begin{center}
+\includegraphics[width=6cm]{00-1dc/0-51.eps}
+\end{center}
+\end{minipage}
+\begin{minipage}[t]{7cm}
+b) \underline{Pos: 4, $E_{\text{b}}=-0.15\text{ eV}$}
+\begin{center}
+\includegraphics[width=6cm]{00-1dc/0-15.eps}
+\end{center}
+\end{minipage}
+\end{center}
+\caption{Relaxed structures of defect complexes obtained by creating a carbon substitutional at position 2 (a)) and 4 (b)).}
+\label{fig:defects:comb_db_05}
+\end{figure}
+The second part of table \ref{tab:defects:e_of_comb} lists the energetic results of substitutional carbon and vacancy combinations with the initial \hkl<0 0 -1> dumbbell.
+Figures \ref{fig:defects:comb_db_04} and \ref{fig:defects:comb_db_05} show relaxed structures of substitutional carbon in combination with the \hkl<0 0 -1> dumbbell for several positions.
+In figure \ref{fig:defects:comb_db_04} positions 1 (a)), 3 (b)) and 5 (c)) are displayed.
+A substituted carbon atom at position 5 results in an energetically extremely unfavorable configuration.
+Both carbon atoms, the substitutional and the dumbbell atom, pull silicon atom number 1 towards their own location regarding the \hkl<1 1 0> direction.
+Due to this a large amount of tensile strain energy is needed, which explains the high positive value of 0.49 eV.
+The lowest binding energy is observed for a substitutional carbon atom inserted at position 3.
+The substitutional carbon atom is located above the dumbbell substituting a silicon atom which would usually be bound to and displaced along \hkl<0 0 1> and \hkl<1 1 0> by the silicon dumbbell atom.
+In contrast to the previous configuration strain compensation occurs resulting in a binding energy as low as -0.93 eV.
+Substitutional carbon at position 2 and 4, visualized in figure \ref{fig:defects:comb_db_05}, is located below the initial dumbbell.
+Silicon atom number 1, which is bound to the interstitial carbon atom is displaced along \hkl<0 0 -1> and \hkl<-1 -1 0>.
+In case a) only the first displacement is compensated by the substitutional carbon atom.
+This results in a somewhat higher binding energy of -0.51 eV.
+The binding energy gets even higher in case b) ($E_{\text{b}}=-0.15\text{ eV}$), in which the substitutional carbon is located further away from the initial dumbbell.
+In both cases, silicon atom number 1 is displaced in such a way, that the bond to silicon atom number 5 vanishes.
+In case of \ref{fig:defects:comb_db_04} a) the carbon atoms form a bond with a distance of 1.5 \AA, which is close to the C-C distance expected in diamond or graphit.
+Both carbon atoms are highly attracted by each other resulting in large displacements and high strain energy in the surrounding.
+A binding energy of 0.26 eV is observed.
+Substitutional carbon at positions 2, 3 and 4 are the energetically most favorable configurations and constitute promising starting points for SiC precipitation.
+On the one hand, C-C distances around 3.1 \AA{} exist for substitution positions 2 and 3, which are close to the C-C distance expected in silicon carbide.
+On the other hand stretched silicon carbide is obtained by the transition of the silicon dumbbell atom into a silicon self-interstitial located somewhere in the silicon host matrix and the transition of the carbon dumbbell atom into another substitutional atom occupying the dumbbell lattice site.
+
+\begin{figure}[t!h!]
+\begin{center}
+\begin{minipage}[t]{7cm}
+a) \underline{Pos: 2, $E_{\text{b}}=-0.59\text{ eV}$}
+\begin{center}
+\includegraphics[width=6.0cm]{00-1dc/0-59.eps}
+\end{center}
+\end{minipage}
+\begin{minipage}[t]{7cm}
+b) \underline{Pos: 3, $E_{\text{b}}=-3.14\text{ eV}$}
+\begin{center}
+\includegraphics[width=6.0cm]{00-1dc/3-14.eps}
+\end{center}
+\end{minipage}\\[0.2cm]
+\begin{minipage}[t]{7cm}
+c) \underline{Pos: 4, $E_{\text{b}}=-0.54\text{ eV}$}
+\begin{center}
+\includegraphics[width=6.0cm]{00-1dc/0-54.eps}
+\end{center}
+\end{minipage}
+\begin{minipage}[t]{7cm}
+d) \underline{Pos: 5, $E_{\text{b}}=-0.50\text{ eV}$}
+\begin{center}
+\includegraphics[width=6.0cm]{00-1dc/0-50.eps}
+\end{center}
+\end{minipage}
+\end{center}
+\caption{Relaxed structures of defect complexes obtained by creating vacancies at positions 2 (a)), 3 (b)), 4 (c)) and 5 (d)).}
+\label{fig:defects:comb_db_06}
+\end{figure}
+Figure \ref{fig:defects:comb_db_06} displays relaxed structures of vacancies in combination with the \hkl<0 0 -1> dumbbell interstital.
+The creation of a vacancy at position 1 results in a configuration of substitutional carbon on a silicon lattice site and no other remaining defects.
+The carbon dumbbell atom moves to position 1 where the vacancy is created and the silicon dumbbell atom recaptures the dumbbell lattice site.
+With a binding energy of -5.39 eV, this is the energetically most favorable configuration observed.
+A great amount of strain energy is reduced by removing the silicon atom at position 3, which is illustrated in figure \ref{fig:defects:comb_db_06} b).
+The dumbbell structure shifts towards the position of the vacancy which replaces the silicon atom usually bound to and at the same time strained by the silicon dumbbell atom.
+Due to the displacement into the \hkl<1 -1 0> direction the bond of the dumbbell silicon atom to the silicon atom on the top left breaks and instead forms a bond to the silicon atom located in \hkl<1 -1 1> direction which is not shown in the figure.
+A binding energy of -3.14 eV is obtained for this structure composing another energetically favorable configuration.
+A vacancy ctreated at position 2 enables a relaxation of the silicon atom number 1 mainly in \hkl<0 0 -1> direction.
+The bond to silicon atom number 5 breaks.
+Hence, the silicon dumbbell atom is not only displaced along \hkl<0 0 -1> but also and to a greater extent in \hkl<1 1 0> direction.
+The carbon atom is slightly displaced in \hkl<0 1 -1> direction.
+A binding energy of -0.59 eV indicates the occurrence of much less strain reduction compared to that in the latter configuration.
+Evidently this is due to a smaller displacement of silicon atom number 1, which would be directly bound to the replaced silicon atom at position 2.
+In the case of a vacancy created at position 4, even a slightly higher binding energy of -0.54 eV is observed, while the silicon atom at the bottom left, which is bound to the carbon dumbbell atom, is vastly displaced along \hkl<1 0 -1>.
+However the displacement of the carbon atom along \hkl<0 0 -1> is less than it is in the preceding configuration.
+Although expected due to the symmetric initial configuration silicon atom number 1 is not displaced correspondingly and also the silicon dumbbell atom is displaced to a greater extent in \hkl<-1 0 0> than in \hkl<0 -1 0> direction.
+The symmetric configuration is, thus, assumed to constitute a local maximum, which is driven into the present state by the conjugate gradient method used for relaxation.
+Figure \ref{fig:defects:comb_db_06} d) shows the relaxed structure of a vacancy created at position 5.
+The silicon dumbbell atom is largely displaced along \hkl<1 1 0> and somewaht less along \hkl<0 0 -1>, which corresponds to the direction towards the vacancy.
+The silicon dumbbell atom approaches silicon number 1.
+Indeed a non-zero charge density is observed inbetween these two atoms exhibiting a cylinder-like shape superposed with the charge density known from the dumbbell itself.
+Strain reduced by this huge displacement is partially absorbed by tensile strain on silicon atom number 1 originating from attractive forces of the carbon atom and the vacancy.
+A binding energy of -0.50 eV is observed.
+{\color{red}Todo: Jahn-Teller distortion (vacancy) $\rightarrow$ actually three possibilities. Due to the initial defect, symmetries are broken. The system should have relaxed into the minumum energy configuration!?}
+
+{\color{blue}Todo: Si int + vac and C sub/int ...?
+Investigation of vacancy, Si and C interstitital.
+As for the ground state of the single Si self-int, a 110 is also assumed as the lowest possibility in combination with other defects (which is a cruel assumption)!
+}
+
+\section{Migration in systems of combined defects}
+
+During carbon implantation into crystalline silicon the energetic carbon atoms may kick out silicon atoms from their lattice sites.
+A vacancy accompanied by a silicon self-interstitial is generated.
+The silicon self-interstitial may migrate to the surface or recombine with other vacancies.
+Once a vacancy and a carbon interstitial defect exist the energetically most favorable configuration is the configuration of a substitutional carbon atom, that is the carbon atom occupying the vacant site.
+In addition, it is a conceivable configuration the system might experience during the silicon carbide precipitation process.
+Energies needed to overcome the migration barrier of the transformation into this configuration enable predictions concerning the feasibility of a silicon carbide conversion mechanism derived from these microscopic processes.
+This is especially important for the case, in which the vacancy is created at position 3, as discussed in the last section and figure \ref{fig:defects:comb_db_06} b).
+Due to the low binding energy this configuration might constitute a trap, which it is hard to escape from.
+However, migration simulations show that only a low amount of energy is necessary to transform the system into the energetically most favorable configuration.
+\begin{figure}[!t!h]
+\begin{center}
+\includegraphics[width=13cm]{vasp_mig/comb_mig_3-2_vac_fullct.ps}\\[2.0cm]
+\begin{picture}(0,0)(170,0)
+\includegraphics[width=3cm]{vasp_mig/comb_2-1_init.eps}
+\end{picture}
+\begin{picture}(0,0)(80,0)
+\includegraphics[width=3cm]{vasp_mig/comb_2-1_seq_03.eps}
+\end{picture}
+\begin{picture}(0,0)(-10,0)
+\includegraphics[width=3cm]{vasp_mig/comb_2-1_seq_06.eps}
+\end{picture}
+\begin{picture}(0,0)(-120,0)
+\includegraphics[width=3cm]{vasp_mig/comb_2-1_final.eps}
+\end{picture}
+\begin{picture}(0,0)(25,20)
+\includegraphics[width=2.5cm]{100_arrow.eps}
+\end{picture}
+\begin{picture}(0,0)(230,0)
+\includegraphics[height=2.2cm]{001_arrow.eps}
+\end{picture}
+\end{center}
+\caption{Transition of the configuration of the C-Si dumbbell interstitial in combination with a vacancy created at position 2 into the configuration of substitutional carbon.}
+\label{fig:defects:comb_mig_01}
+\end{figure}
+\begin{figure}[!t!h]
+\begin{center}
+\includegraphics[width=13cm]{vasp_mig/comb_mig_4-2_vac_fullct.ps}\\[1.0cm]
+\begin{picture}(0,0)(150,0)
+\includegraphics[width=2cm]{vasp_mig/comb_3-1_init.eps}
+\end{picture}
+\begin{picture}(0,0)(60,0)
+\includegraphics[width=2cm]{vasp_mig/comb_3-1_seq_03.eps}
+\end{picture}
+\begin{picture}(0,0)(-45,0)
+\includegraphics[width=2cm]{vasp_mig/comb_3-1_seq_07.eps}
+\end{picture}
+\begin{picture}(0,0)(-130,0)
+\includegraphics[width=2cm]{vasp_mig/comb_3-1_final.eps}
+\end{picture}
+\begin{picture}(0,0)(25,20)
+\includegraphics[width=2.5cm]{100_arrow.eps}
+\end{picture}
+\begin{picture}(0,0)(230,0)
+\includegraphics[height=2.2cm]{001_arrow.eps}
+\end{picture}
+\end{center}
+\caption{Transition of the configuration of the C-Si dumbbell interstitial in combination with a vacancy created at position 3 into the configuration of substitutional carbon.}
+\label{fig:defects:comb_mig_02}
+\end{figure}
+Figure \ref{fig:defects:comb_mig_01} and \ref{fig:defects:comb_mig_02} show the migration barriers and structures for transitions of the vacancy-interstitial configurations examined in figure \ref{fig:defects:comb_db_06} a) and b) into a configuration of substitutional carbon.
+
+In the first case the focus is on the migration of silicon atom number 1 towards the vacant site created at position 2, while the carbon atom substitutes the site of the migrating silicon atom.
+An energy of 0.6 eV necessary to overcome the migration barrier is found.
+This energy is low enough to constitute a feasible mechanism in SiC precipitation.
+To reverse this process 5.4 eV are needed, which make this mechanism very unprobable.
+The migration path is best described by the reverse process.
+Starting at 100 \% energy is needed to break the bonds of silicon atom 1 to its neighboured silicon atoms and that of the carbon atom to silicon atom number 5.
+At a displacement of 60 \% these bonds are broken.
+Due to this and due to the formation of new bonds, that is the bond of silicon atom number 1 to silicon atom number 5 and the bond of the carbon atom to its siliocn neighbour in the bottom left, a less steep increase of free energy is observed.
+At a displacement of approximately 30 \% the bond of silicon atom number 1 to the just recently created siliocn atom is broken up again, which explains the repeated boost in energy.
+Finally the system gains energy relaxing into the configuration of zero displacement.
+
+Due to the low binding energy observed, the configuration of the vacancy created at position 3 is assumed to be stable against transition.
+However, a relatively simple migration path exists, which intuitively seems to be a low energy process.
+The migration path and the corresponding differences in free energy are displayed in figure \ref{fig:defects:comb_mig_02}.
+In fact, migration simulations yield a barrier as low as 0.1 eV.
+This energy is needed to tilt the dumbbell as the displayed structure at 30 \% displacement shows.
+Once this barrier is overcome, the carbon atom forms a bond to the top left silicon atom and the interstitial silicon atom capturing the vacant site is forming new tetrahedral bonds to its neighboured silicon atoms.
+These new bonds and the relaxation into the substitutional carbon configuration are responsible for the gain free energy.
+For the reverse process approximately 2.4 eV are nedded, which is 24 times higher than the forward process.
+Thus, substitutional carbon is assumed to be stable in contrast to the C-Si dumbbell interstitial located next to a vacancy.
+
+{\color{red}Todo: DB mig along 110 (at the starting of this section)?}
+
+{\color{red}Todo: Migration of Si int + vac and C sub/int ...?}
+
+{\color{red}Todo: Model of kick-out and kick-in mechnism?}
+
+\section{Conclusions concerning the SiC conversion mechanism}
+
+The ground state configuration of a carbon interstitial in crystalline siliocn is found to be the C-Si \hkl<1 0 0> dumbbell interstitial configuration.
+The threefold coordinated carbon and silicon atom share a usual silicon lattice site.
+Migration simulations reveal the carbon interstitial to be mobile at prevailing implantation temperatures requireing an activation energy of approximately 0.9 eV for migration as well as reorientation processes.