\acrodef{c-Si}{crystalline silicon}
\acrodef{CVD}{chemical vapor deposition}
\acrodef{HDTV}{high definition television}
\acrodef{c-Si}{crystalline silicon}
\acrodef{CVD}{chemical vapor deposition}
\acrodef{HDTV}{high definition television}
\acrodef{IBS}{ion beam synthesis}
\acrodef{LED}{light emitting diode}
\acrodef{MBE}{molecular beam epitaxy}
\acrodef{IBS}{ion beam synthesis}
\acrodef{LED}{light emitting diode}
\acrodef{MBE}{molecular beam epitaxy}
\acrodef{PVT}{physical vapor transport}
\acrodef{RF}{radio frequency}
\acrodef{RT}{room temeprature}
\acrodef{PVT}{physical vapor transport}
\acrodef{RF}{radio frequency}
\acrodef{RT}{room temeprature}
% author & title
\author{Frank Zirkelbach}
\title{Simulation study of the precipitation process of silicon carbide in carbon doped silicon}
% author & title
\author{Frank Zirkelbach}
\title{Simulation study of the precipitation process of silicon carbide in carbon doped silicon}