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% skip for preparation
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+%\ifnum1=0
% intro
\begin{slide}
+\headphd
{\large\bf
Polytypes of SiC\\[0.6cm]
}
\end{tabular}
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\end{slide}
-\fi
+%\fi
% fabrication
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\includegraphics[width=2.0cm]{cree.eps}
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-{\color{red}\scriptsize Mismatch in thermal expansion coeefficient
- and lattice paramater}
-\vspace{-0.2cm}
+\vspace{-0.5cm}
+
+\begin{center}
+\color{red}
+\framebox{
+{\footnotesize\color{black}
+ Mismatch in \underline{thermal expansion coeefficient}
+ and \underline{lattice parameter} w.r.t. substrate
+}
+}
+\end{center}
+
+\vspace{0.1cm}
{\bf Alternative approach}\\
Ion beam synthesis (IBS) of burried 3C-SiC layers in Si\hkl(1 0 0)
}
\begin{minipage}{5.5cm}
\begin{center}
-{\small
+{\footnotesize
No surface bending effects\\
-$\Rightarrow$ Synthesis of large area SiC films possible
+High areal homogenity\\[0.1cm]
+$\Downarrow$\\[0.1cm]
+Synthesis of large area SiC films possible
}
\end{center}
\end{minipage}
\end{slide}
-\end{document}
+%\end{document}
% temp
-\ifnum1=0
+%\ifnum1=0
% contents
\begin{slide}
-\headphd
-{\large\bf
- Outline
-}
-
- \begin{itemize}
- \item Supposed precipitation mechanism of SiC in Si
- \item Utilized simulation techniques
- \begin{itemize}
- \item Molecular dynamics (MD) simulations
- \item Density functional theory (DFT) calculations
- \end{itemize}
- \item C and Si self-interstitial point defects in silicon
- \item Silicon carbide precipitation simulations
- \item Summary / Conclusion
- \end{itemize}
-
-\end{slide}
-
-\begin{slide}
-
\headphd
{\large\bf
Supposed precipitation mechanism of SiC in Si
\begin{minipage}{4.0cm}
\begin{center}
C-Si dimers (dumbbells)\\[-0.1cm]
- on Si interstitial sites
+ on Si lattice sites
\end{center}
\end{minipage}
\hspace{0.1cm}
\begin{slide}
+\headphd
+{\large\bf
+ Outline
+}
+
+ \begin{itemize}
+ {\color{gray}
+ \item Introduction / Motivation
+ \item Assumed SiC precipitation mechanisms / Controversy
+ }
+ \item Utilized simulation techniques
+ \begin{itemize}
+ \item Molecular dynamics (MD) simulations
+ \item Density functional theory (DFT) calculations
+ \end{itemize}
+ \item Simulation results
+ \begin{itemize}
+ \item C and Si self-interstitial point defects in silicon
+ \item Silicon carbide precipitation simulations
+ \end{itemize}
+ \item Summary / Conclusion
+ \end{itemize}
+
+\end{slide}
+
+\begin{slide}
+
\headphd
{\large\bf
Utilized computational methods
\end{slide}
+\end{document}
+\ifnum1=0
+
\begin{slide}
\footnotesize