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-{\large\bf
- Outline
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- \begin{itemize}
- \item Implantation of C in Si --- Overview of experimental observations
- \item Utilized simulation techniques and modeled problems
- \begin{itemize}
- \item {\color{blue}Diploma thesis}\\
- \underline{Monte Carlo} simulations
- modeling the selforganization process
- leading to periodic arrays of nanometric amorphous SiC
- precipitates
- \item {\color{blue}Doctoral studies}\\
- Classical potential \underline{molecular dynamics} simulations
- \ldots\\
- \underline{Density functional theory} calculations
- \ldots\\[0.2cm]
- \ldots on defects and SiC precipitation in Si
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- \item Summary / Conclusion / Outlook
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