+{\color{blue}Todo: Si int + vac and C sub ...?
+Investigation of vacancy, Si and C interstitital.
+As for the ground state of the single Si self-int, a 110 is also assumed as the lowest possibility in combination with other defects (which is a cruel assumption)!
+}
+
+\section{Migration in systems of combined defects}
+
+During carbon implantation into crystalline silicon the energetic carbon atoms may kick out silicon atoms from their lattice sites.
+A vacancy accompanied by a silicon self-interstitial is generated.
+The silicon self-interstitial may migrate to the surface or recombine with other vacancies.
+Once a vacancy and a carbon interstitial defect exist the energetically most favorable configuration is the configuration of a substitutional carbon atom, that is the carbon atom occupying the vacant site.
+In addition, it is a conceivable configuration the system might experience during the silicon carbide precipitation process.
+Energies needed to overcome the migration barrier of the transformation into this configuration enable predictions concerning the feasibility of a silicon carbide conversion mechanism derived from these microscopic processes.
+This is especially important for the case, in which the vacancy is created at position 3, as discussed in the last section and figure \ref{fig:defects:comb_db_06} b).
+Due to the low binding energy this configuration might constitute a trap, which it is hard to escape from.
+However, migration simulations show that only a low amount of energy is necessary to transform the system into the energetically most favorable configuration.
+\begin{figure}[!t!h]
+\begin{center}
+\includegraphics[width=13cm]{vasp_mig/comb_mig_3-2_vac_fullct.ps}\\[2.0cm]
+\begin{picture}(0,0)(170,0)
+\includegraphics[width=3.5cm]{vasp_mig/comb_2-1_init.eps}
+\end{picture}
+\begin{picture}(0,0)(60,0)
+\includegraphics[width=3.5cm]{vasp_mig/comb_2-1_seq.eps}
+\end{picture}
+\begin{picture}(0,0)(-120,0)
+\includegraphics[width=3.5cm]{vasp_mig/comb_2-1_final.eps}
+\end{picture}
+\begin{picture}(0,0)(25,20)
+\includegraphics[width=2.5cm]{100_arrow.eps}
+\end{picture}
+\begin{picture}(0,0)(230,0)
+\includegraphics[height=2.2cm]{001_arrow.eps}
+\end{picture}
+\end{center}
+\caption{Transition vacancy-interstitial combinations into the configuration of substitutional carbon.}
+\label{fig:defects:comb_mig_01}
+\end{figure}
+Figure \ref{fig:defects:comb_mig_01} shows the migration barriers and structures for transitions of the vacancy-interstitial configurations examined in figure \ref{fig:defects:comb_db_06} a) and b) into the configuration of substitutional carbon.