\end{figure}
A transformation from a structure dominated by C$_{\text{i}}$ into a C$_{\text{s}}$ dominated structure with increasing temperature can clearly be observed if compared with the radial distribution of C$_{\text{s}}$ in c-Si.
Thus, the C$_{\text{s}}$ defect and, thus, stretched coherent structures of SiC, must be considered to play an important role in the IBS at elevated temperatures.
\end{figure}
A transformation from a structure dominated by C$_{\text{i}}$ into a C$_{\text{s}}$ dominated structure with increasing temperature can clearly be observed if compared with the radial distribution of C$_{\text{s}}$ in c-Si.
Thus, the C$_{\text{s}}$ defect and, thus, stretched coherent structures of SiC, must be considered to play an important role in the IBS at elevated temperatures.