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-\begin{document}
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-\title{the molecular dynamic simulation {\em posic}}
-\subtitle{atomistic simulation of the precipitation process of silicon carbide in carbon doped silicon}
-\author[F. Zirkelbach]{Frank Zirkelbach \\ \texttt{frank.zirkelbach@physik.uni-augsburg.de}}
-\institute{
-experimental physics IV\\
-university of augsburg
-}
-\date{june 2006}
-
-\AtBeginSection[]
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- \begin{frame}<beamer>
- \frametitle{agenda}
- \tableofcontents[currentsection]
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-}
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-\begin{frame}
- \titlepage
-\end{frame}
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-\begin{frame}
- \frametitle{agenda}
- \tableofcontents%[pausesections]
-\end{frame}
-
-\section{introduction}
-
- \subsection{as things are now}
-
-\begin{frame}
- \frametitle{introduction}
- \framesubtitle{as things are now}
- \begin{block}{precipitation process of $SiC$ in silicon}
- \begin{itemize}
- \item first steps:\\
- (investigated by high resolution electron microscopy)
- \begin{itemize}
- \item formation of $C-Si$-dumbbells on regular $c-Si$ lattice
- sites
- \item agglomeration into large clusters (embryos)
- \end{itemize}
- \item second step:\\
- (not accessible by experiment)
- \begin{itemize}
- \item cluster size reaches a radius of $2-4 \, nm$
- \item high interfacial energy due to the $SiC/Si$ lattice
- mismatch (~$20 \, \%$) is overcome
- \item precipitation process of $SiC$
- \end{itemize}
- \end{itemize}
- \end{block}
-\end{frame}
-
- \subsection{motivation}
-
-\begin{frame}
- \frametitle{introduction}
- \framesubtitle{motivation}
- \begin{block}{why studying the $SiC$ nucleation process}
- \begin{itemize}
- \item basic research
- \item understanding the 2 steps of the precipitation process\\
- $\Rightarrow$ facilitation of the $SiC$ heteroepitaxy on $c-Si$\\
- $\Rightarrow$ suppress nucleation of $SiC$ in certain applications
- \item $SiC$: most rapidly developed wide band gap semiconductor suitable
- in high temperature, high frequency and high power applications
- \end{itemize}
- \end{block}
-\end{frame}
-
-\begin{frame}
- \frametitle{introduction}
- \framesubtitle{motivation}
- \begin{block}{why doing an atomistic simulation}
- \begin{itemize}
- \item precipitation process is not understood for the most part
- \item monitor the atomic structures in early stages of the embryo formation
- \item atomic rearrangement in the most critical second step\\
- (which is experimentally not accessible)
- \item information about the atomic structure and interface of the
- $SiC$ precipitates and the crystalline silicon\\
- (including stress fields)
- \end{itemize}
- \end{block}
-\end{frame}
-
-\section{experimental observations}
-
-\section{simulation}
-
- \subsection{introduction to atomistic simulations}
-
-\begin{frame}
- \frametitle{simulation}
- \framesubtitle{introduction to atomistic simulations}
-
-\end{frame}
-
- \subsection{computational methods}
-
- \subsection{the {\em posic} simulation}
-
-\section{results}
-
-\section{summary \& outlook}
-
-\end{document}
-