\end{center}
\end{slide}
+% no vertical centering
+\centerslidesfalse
+
\ifnum1=0
% intro
\end{slide}
-\fi
% fabrication
\begin{slide}
\vspace{2pt}
-SiC thin film by MBE \& CVD
+SiC thin films by MBE \& CVD
\begin{itemize}
\item Much progress achieved in homo/heteroepitaxial SiC thin film growth
\item \underline{Commercially available} semiconductor power devices based on
\includegraphics[width=2.0cm]{cree.eps}
\end{picture}
-\vspace{-0.4cm}
+\vspace{-0.2cm}
Alternative approach:
Ion beam synthesis (IBS) of burried 3C-SiC layers in Si\hkl(1 0 0)
+\vspace{0.2cm}
+
\scriptsize
-\begin{minipage}{6.5cm}
- \begin{itemize}
- \item \underline{Implantation step 1}\\
- 180 keV C$^+$, $D=7.9\times 10^{17}$ cm$^{-2}$, $T_{\text{i}}=500\,^{\circ}\mathrm{C}$\\[0.1cm]
- Box-like distribution of equally sized \&\\
- epitaxially oriented SiC precipitates
-
- \item \underline{Implantation step 2}\\
- 180 keV C$^+$, $D=0.6\times 10^{17}$ cm$^{-2}$, $T_{\text{i}}=250\,^{\circ}\mathrm{C}$\\[0.1cm]
- Destruction of SiC nanocrystals\\
- in growing amorphous interface layers
- \item \underline{Annealing}\\
- $T=1250\,^{\circ}\mathrm{C}$, $t=10\,\text{h}$\\[0.1cm]
- Homogeneous, stoichiometric SiC layer\\
- with sharp interfaces
- \end{itemize}
+\framebox{
+\begin{minipage}{3.15cm}
+ \begin{center}
+\includegraphics[width=3cm]{imp.eps}\\
+ {\tiny
+ Carbon implantation
+ }
+ \end{center}
\end{minipage}
-\begin{minipage}{0.3cm}
-\hfill
+\begin{minipage}{3.15cm}
+ \begin{center}
+\includegraphics[width=3cm]{annealing.eps}\\
+ {\tiny
+ \unit[12]{h} annealing at \degc{1200}
+ }
+ \end{center}
\end{minipage}
+}
\begin{minipage}{5.5cm}
\includegraphics[width=5.8cm]{ibs_3c-sic.eps}\\[-0.2cm]
\begin{center}
\end{center}
\end{minipage}
-\framebox{
- \begin{minipage}{6.3cm}
- \begin{center}
- {\color{blue}
- Precipitation mechanism not yet fully understood!
- }
- \renewcommand\labelitemi{$\Rightarrow$}
- \small
- \underline{Understanding the SiC precipitation}
- \begin{itemize}
- \item significant technological progress in SiC thin film formation
- \item perspectives for processes relying upon prevention of SiC precipitation
- \end{itemize}
- \end{center}
- \end{minipage}
+\end{slide}
+
+% contents
+
+\begin{slide}
+
+{\large\bf
+ Systematic investigation of C implantations into Si
}
+\vspace{1.7cm}
+\begin{center}
+\hspace{-1.0cm}
+\includegraphics[width=0.75\textwidth]{imp_inv.eps}
+\end{center}
+
\end{slide}
-% contents
+% outline
\begin{slide}
Outline
}
- \begin{itemize}
- \item Implantation of C in Si --- Overview of experimental observations
- \item Utilized simulation techniques and modeled problems
- \begin{itemize}
- \item {\color{blue}Diploma thesis}\\
- \underline{Monte Carlo} simulations
- modeling the selforganization process
- leading to periodic arrays of nanometric amorphous SiC
- precipitates
- \item {\color{blue}Doctoral studies}\\
- Classical potential \underline{molecular dynamics} simulations
- \ldots\\
- \underline{Density functional theory} calculations
- \ldots\\[0.2cm]
- \ldots on defects and SiC precipitation in Si
- \end{itemize}
- \item Summary / Conclusion / Outlook
- \end{itemize}
+\vspace{1.7cm}
+\begin{center}
+\hspace{-1.0cm}
+\includegraphics[width=0.75\textwidth]{imp_inv.eps}
+\end{center}
+
+\begin{pspicture}(0,0)(0,0)
+\rput(6.0,7.0){\rnode{init}{\psframebox[fillstyle=solid,fillcolor=white]{
+\begin{minipage}{11cm}
+{\color{red}Diploma thesis}\\
+ \underline{Monte Carlo} simulation modeling the selforganization process\\
+ leading to periodic arrays of nanometric amorphous SiC precipitates
+\end{minipage}
+}}}
+\end{pspicture}
+\begin{pspicture}(0,0)(0,0)
+\rput(6.0,-0.5){\rnode{init}{\psframebox[fillstyle=solid,fillcolor=white]{
+\begin{minipage}{11cm}
+{\color{blue}Doctoral studies}\\
+ Classical potential \underline{molecular dynamics} simulations \ldots\\
+ \underline{Density functional theory} calculations \ldots\\[0.2cm]
+ \ldots on defect formation and SiC precipitation in Si
+\end{minipage}
+}}}
+\end{pspicture}
+\begin{pspicture}(0,0)(0,0)
+\psellipse[linecolor=red,linewidth=0.05cm](5,3.0)(0.8,1.0)
+\end{pspicture}
+\begin{pspicture}(0,0)(0,0)
+\psellipse[linecolor=blue,linewidth=0.05cm](8.2,3.2)(1.5,1.6)
+\end{pspicture}
+
+\end{slide}
+
+% continue here
+\fi
+\begin{slide}
+
+{\large\bf
+ Selforganization of nanometric amorphous SiC lamellae
+}
+
+\begin{minipage}{6cm}
+\includegraphics[width=6cm]{}
+\end{minipage}
\end{slide}
\end{document}
\ifnum1=0
+\begin{slide}
+
+{\large\bf
+ Selforganization of nanometric amorphous SiC lamellae
+}
+
+\framebox{
+ \begin{minipage}{6.3cm}
+ \begin{center}
+ {\color{blue}
+ Precipitation mechanism not yet fully understood!
+ }
+ \renewcommand\labelitemi{$\Rightarrow$}
+ \small
+ \underline{Understanding the SiC precipitation}
+ \begin{itemize}
+ \item significant technological progress in SiC thin film formation
+ \item perspectives for processes relying upon prevention of SiC precipitation
+ \end{itemize}
+ \end{center}
+ \end{minipage}
+}
+
+\end{slide}
\begin{slide}