\section*{Motivation}
{\bf Importance of the 3C-SiC precipitation process in silicon}
\begin{itemize}
- \item SiC is a promissing wide band gap material for high-temperature,
- high-power. high-frequency semiconductor devices [1].
+ \item SiC is a promising wide band gap material for high-temperature,
+ high-power, high-frequency semiconductor devices [1].
\item 3C-SiC epitaxial thin film formation on Si requires detailed
knowledge of SiC nucleation.
\item Fabrication of high carbon doped, strained pseudomorphic
\includegraphics[width=8cm]{c_in_si_int_001db_0.eps}
\end{minipage}\\[1cm]
\begin{center}
-\includegraphics[width=24cm]{100-c-si-db_s.eps}
+\includegraphics[width=26cm]{100-c-si-db_s.eps}\\[0.35cm]
\end{center}
{\tiny
[6] G. D. Watkins and K. L. Brower, Phys. Rev. Lett. 36 (1976) 1329.}
\rput(7.5,5){\rnode{insert}{\psframebox[fillstyle=solid,fillcolor=lachs]{
\parbox{15cm}{
Insertion of 6000 carbon atoms at constant\\
- temperature into:
+ temperature into $V_1$ or $V_2$ or $V_3$:
\begin{itemize}
\item Total simulation volume $V_1$
\item Volume of minimal 3C-SiC precipitation $V_2$