From: hackbard Date: Thu, 9 Dec 2010 15:15:19 +0000 (+0100) Subject: almost finished bulk growth X-Git-Url: https://hackdaworld.org/cgi-bin/gitweb.cgi?a=commitdiff_plain;h=9431f8d4651b0bd29fb3e1bb570135514667e40d;p=lectures%2Flatex.git almost finished bulk growth --- diff --git a/posic/thesis/sic.tex b/posic/thesis/sic.tex index 6eacee9..d8adcbe 100644 --- a/posic/thesis/sic.tex +++ b/posic/thesis/sic.tex @@ -119,7 +119,7 @@ The presented methods, thus, focus on vapor transport growth processes such as c \subsection{SiC bulk crystal growth} -The industrial Acheson process \cite{acheson} is utilized to produce SiC on a large scale by thermal reaction of silicon dioxide (silica sand) and carbon (coal). +The industrial Acheson process \cite{knippenberg63} is utilized to produce SiC on a large scale by thermal reaction of silicon dioxide (silica sand) and carbon (coal). The heating is accomplished by a core of graphite centrally placed in the furnace, which is heated up to a maximum temperature of \unit[2700]{$^{\circ}$C}, after which the temperature is gradually lowered. Due to the insufficient and uncontrollable purity, material produced by this method, originally termed carborundum by Acheson, can hardly be used for device applications. However, it is often used as an abrasive material and as seed crystals for subsequent vapor phase growth and sublimation processes. @@ -130,9 +130,14 @@ The obtained polycrystalline material consists of small crystal grains with a si A significant breakthrough was made in 1955 by Lely, who proposed a sublimation process for growing higher purity bulk SiC single crystals \cite{lely55}. In the so called Lely process, a tube of porous graphite is surrounded by polycrystalline SiC as gained by previously described processes. -Lely (sublimation) - -modified Lely or modified sublimation +Heating the hollow carbon cylinder to \unit[2500]{$^{\circ}$C} leads to sublimation of the material at the hot outer wall and diffusion through the porous graphite tube followed by an uncontrolled crystallization on the slightly cooler parts of the inner graphite cavity resulting in the formation of randomly sized, hexagonally shaped platelets, which exibit a layered structure of various alpha polytypes with equal \hkl{0001} orientation. + +Subsequent research \cite{tairov78,tairov81} resulted in the implementation of a seeded growth sublimation process wherein only one large crystal of a single polytype is grown. +In the so called modified Lely or modified sublimation process nucleation occurs on a SiC seed crystal located at the top or bottom of a cylindrical growth cavity. +As in the Lely process, SiC sublimes at a temperature of \unit[2400]{$^{\circ}$C} from a polycrystalline source diffusing through a porous graphite retainer along carefully adjusted thermal and pressure gradients. +Controlled nucleation occurs on the SiC seed, which is held at approximately \unit[2200]{$^{\circ}$C}. +The growth process is commonly done in a high-purity Ar atmosphere. +Refined versions of this physical vapor transport (PVT) technique enabled the reproducible boule growth of device quality SiC crystals, which were for instance used to fabricate blue light emitting diodes with increased quantum efficiencies \cite{hoffmann82}. though significant advances have been achieved a bunch of defects ...