/*
* nlsop.c
*
+ * author: frank zirkelbach (frank.zirkelbach@physik.uni-augsburg.de)
+ *
* this program tries helping to understand the amorphous depuration
* and recrystallization of SiCx while ion implantation at temperatures
* below 400 degree celsius.
* refs:
* - J. K. N. Lindner. Habilationsschrift, Universitaet Augsburg.
* - Maik Haeberlen. Diplomarbeit, Universitaet Augsburg.
+ *
+ * Copyright (C) 2004 Frank Zirkelbach
+ *
+ * This program is free software; you can redistribute it and/or modify
+ * it under the terms of the GNU General Public License as published by
+ * the Free Software Foundation; either version 2 of the License, or
+ * (at your option) any later version.
+ *
+ * This program is distributed in the hope that it will be useful,
+ * but WITHOUT ANY WARRANTY; without even the implied warranty of
+ * MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE. See the
+ * GNU General Public License for more details.
+ *
+ * You should have received a copy of the GNU General Public License
+ * along with this program; if not, write to the Free Software
+ * Foundation, Inc., 59 Temple Place, Suite 330, Boston, MA 02111-1307 USA
+ *
*/
#define _GNU_SOURCE
#define MAKE_AMORPH(N) *(N)|=AMORPH
#define MAKE_CRYST(N) *(N)&=~AMORPH
-/* test globals - get removed or included in my_info struct later */
-int amorph_count;
-int cryst_count;
-unsigned char c_diff;
-
int usage(void)
{
puts("usage:");
puts("-L <file> \t load from file");
puts("-S <file> \t save to file");
puts("-R <file> \t read from random file");
- puts("-P <file> \t specify implantatin profile file");
+ puts("-P <file> \t specify implantation profile file");
+ puts("-N <file> \t specify nuclear energy loss profile file");
+ printf("-H <value> \t collisions per ion in simulation window (default %d)\n",CPI);
+ puts("-m <value> \t specify c->a carbon saturation");
return 1;
}
p+=*conc*my_info->a_cp*URAND_MAX;
if(!(*thiz&AMORPH))
{
- if(get_rand(URAND_MAX)<=p)
- {
- MAKE_AMORPH(thiz);
- amorph_count++;
- }
+ if(get_rand(URAND_MAX)<=p) MAKE_AMORPH(thiz);
} else
{
/* assume 1-p probability */
- if(get_rand(URAND_MAX)>p)
- {
- MAKE_CRYST(thiz);
- cryst_count++;
- }
+ if(get_rand(URAND_MAX)>p) MAKE_CRYST(thiz);
}
return 1;
}
-int distrib_c(d3_lattice *d3_l,info *my_info,int step,double c_ratio)
+int distrib_c(d3_lattice *d3_l,info *my_info,int step,double c_ratio,u32 rj_m,u32 *rj_g)
{
u32 x,y,z;
int i,j,k,c;
{
x=get_rand(d3_l->max_x);
y=get_rand(d3_l->max_y);
- z=get_rand_lgp(d3_l->max_z,my_info->a_cd,my_info->b_cd);
+ // printf("nd: %d %d\n",x,y);
+ // z=get_rand_lgp(d3_l->max_z,my_info->a_cd,my_info->b_cd);
+ z=get_rand_reject(d3_l->max_z,rj_m,rj_g);
+ // printf("%d\n",z);
*(d3_l->extra+x+y*d3_l->max_x+z*d3_l->max_x*d3_l->max_y)+=1;
(my_info->cc)++;
}
{
offset=i+j*d3_l->max_x+k*d3_l->max_x*d3_l->max_y;
/* case amorph: amorph <- cryst diffusion */
- if(*(d3_l->status+offset)&AMORPH)
+ if(*(d3_l->status+offset)&AMORPH && *(d3_l->extra+offset)<my_info->c_sat)
{
for(c=-1;c<=1;c++)
{
{
off=i+((j+c+d3_l->max_y)%d3_l->max_y)*d3_l->max_x+k*d3_l->max_x*d3_l->max_y;
carry=0;
- if(!(*(d3_l->status+off)&AMORPH)) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
+ if(!(*(d3_l->status+off)&AMORPH)) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
if(carry!=0)
{
*(d3_l->extra+offset)+=carry;
}
if(my_info->z_diff)
{
- for(c=-1;c<=1;c++)
+ if(k!=0)
{
- if(c!=0)
+ off=i+j*d3_l->max_x+(k-1)*d3_l->max_x*d3_l->max_y;
+ carry=0;
+ if(!*(d3_l->status+off)&AMORPH) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
+ if(carry!=0)
{
- off=i+j*d3_l->max_x+((k+c+d3_l->max_z)%d3_l->max_z)*d3_l->max_x*d3_l->max_y;
- carry=0;
- if(!*(d3_l->status+off)&AMORPH) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
- if(carry!=0)
- {
- *(d3_l->extra+off)-=carry;
- *(d3_l->extra+offset)+=carry;
- }
+ *(d3_l->extra+off)-=carry;
+ *(d3_l->extra+offset)+=carry;
+ }
+ }
+ if(k!=d3_l->max_z-1)
+ {
+ off=i+j*d3_l->max_x+(k+1)*d3_l->max_x*d3_l->max_y;
+ carry=0;
+ if(!*(d3_l->status+off)&AMORPH) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
+ if(carry!=0)
+ {
+ *(d3_l->extra+off)-=carry;
+ *(d3_l->extra+offset)+=carry;
}
}
}
} else
/* case not amorph: cryst <-> cryst diffusion */
-
- /* test ! */
- if(c_diff) {
- /* */
+ if(my_info->c_diff) {
+ /* if there is c diff, no diff in z-direction */
{
for(c=-1;c<=1;c++)
{
return max;
}
-int write_bmp(d3_lattice *d3_l,int window,u32 x,u32 y,u32 z)
+int write_ac_distr(d3_lattice *d3_l,int ac_distr)
{
- int fd,i,j,size=0,foo=0;
+ int fd,x,y,z;
+ int count,offset;
+ char file[16];
+
+ if(ac_distr==1) strcpy(file,"a.plot");
+ if(ac_distr==2) strcpy(file,"c.plot");
+ if(ac_distr==3) strcpy(file,"b.plot");
+
+ if((fd=open(file,O_WRONLY|O_CREAT))<0)
+ {
+ puts("cannot open plot file");
+ return -1;
+ }
+
+ for(z=0;z<d3_l->max_z;z++)
+ {
+ count=0;
+ for(x=0;x<d3_l->max_x;x++)
+ {
+ for(y=0;y<d3_l->max_y;y++)
+ {
+ offset=x+y*d3_l->max_x+z*d3_l->max_x*d3_l->max_y;
+ if(ac_distr==1)
+ if(*(d3_l->status+offset)&AMORPH) count+=*(d3_l->extra+offset);
+ if(ac_distr==2)
+ if(!(*(d3_l->status+offset)&AMORPH)) count+=*(d3_l->extra+offset);
+ if(ac_distr==3) count+=*(d3_l->extra+offset);
+ }
+ }
+ dprintf(fd,"%d %d\n",z,count);
+ }
+ close(fd);
+
+ return 1;
+}
+
+int write_bmp(d3_lattice *d3_l,int window,u32 x,u32 y,u32 z,int max)
+{
+ int fd,i,j,size=0,foo=0,k,sum;
int width=0,height=0;
char bmpfile[MAX_CHARS];
char buf[128];
sprintf(bmpfile,"x-z_%d.bmp",y);
foo=3*d3_l->max_x;
size=(foo+(4-foo%4))*d3_l->max_z;
- width=d3_l->max_x;
height=d3_l->max_z;
+ width=d3_l->max_x;
}
if(window==2)
{
sprintf(bmpfile,"y-z_%d.bmp",x);
foo=3*d3_l->max_y;
size=(foo+(4-foo%4))*d3_l->max_z;
- width=d3_l->max_y;
height=d3_l->max_z;
+ width=d3_l->max_y;
}
if(window==3)
{
width=d3_l->max_x;
height=d3_l->max_y;
}
+ if(window==4)
+ {
+ sprintf(bmpfile,"x-z_cdistr_%d.bmp",y);
+ foo=3*d3_l->max_x;
+ size=(foo+(4-foo%4))*d3_l->max_z;
+ height=d3_l->max_z;
+ width=d3_l->max_x;
+ }
+ if(window==5)
+ {
+ sprintf(bmpfile,"y-z_cdistr_%d.bmp",x);
+ foo=3*d3_l->max_y;
+ size=(foo+(4-foo%4))*d3_l->max_z;
+ height=d3_l->max_z;
+ width=d3_l->max_y;
+ }
+ if(window==6)
+ {
+ sprintf(bmpfile,"x-y_cdistr_%d.bmp",z);
+ foo=3*d3_l->max_x;
+ size=(foo+(4-foo%4))*d3_l->max_y;
+ width=d3_l->max_x;
+ height=d3_l->max_y;
+ }
if((fd=open(bmpfile,O_WRONLY|O_CREAT))<0)
{
{
for(i=0;i<d3_l->max_x;i++)
{
- if(*(d3_l->status+i+y*d3_l->max_x+(d3_l->max_z-j-1)*d3_l->max_x*d3_l->max_y)&RED) memset(buf,0xff,3);
- else memset(buf,0,3);
+ sum=0;
+ for(k=-2;k<=2;k++)
+ if(*(d3_l->status+i+(((y+k+d3_l->max_y)%d3_l->max_y)*d3_l->max_x)+(d3_l->max_z-j-1)*d3_l->max_x*d3_l->max_y)&RED) sum+=0xff;
+ sum/=5;
+ memset(buf,(unsigned char)sum,3);
if(write(fd,buf,3)<3)
{
puts("failed writing rgb values to bmp file");
{
for(i=0;i<d3_l->max_y;i++)
{
- if(*(d3_l->status+x+i*d3_l->max_x+(d3_l->max_z-j-1)*d3_l->max_x*d3_l->max_y)&RED) memset(buf,0xff,3);
- else memset(buf,0,3);
+ sum=0;
+ for(k=-2;k<=2;k++)
+ if(*(d3_l->status+((x+k+d3_l->max_x)%d3_l->max_x)+i*d3_l->max_x+(d3_l->max_z-j-1)*d3_l->max_x*d3_l->max_y)&RED) sum+=0xff;
+ sum/=5;
+ memset(buf,(unsigned char)sum,3);
if(write(fd,buf,3)<3)
{
puts("failed writing rgb values to bmp file");
}
}
}
+ if(window==4)
+ {
+ for(j=0;j<d3_l->max_z;j++)
+ {
+ for(i=0;i<d3_l->max_x;i++)
+ {
+ sum=*(d3_l->extra+i+y*d3_l->max_x+(d3_l->max_z-j-1)*d3_l->max_x*d3_l->max_y);
+ sum=sum*255/max;
+ memset(buf,(unsigned char)sum,3);
+ if(write(fd,buf,3)<3)
+ {
+ puts("failed writing rgb values to bmp file");
+ return-1;
+ }
+ }
+ if(foo%4)
+ {
+ memset(buf,0,4-foo%4);
+ if(write(fd,buf,4-foo%4)<4-foo%4)
+ {
+ puts("failed writing 4 byte ending");
+ return -1;
+ }
+ }
+ }
+ }
+ if(window==5)
+ {
+ for(j=0;j<d3_l->max_z;j++)
+ {
+ for(i=0;i<d3_l->max_x;i++)
+ {
+ sum=*(d3_l->extra+x+i*d3_l->max_x+(d3_l->max_z-j-1)*d3_l->max_x*d3_l->max_y);
+ sum=sum*255/max;
+ memset(buf,(unsigned char)sum,3);
+ if(write(fd,buf,3)<3)
+ {
+ puts("failed writing rgb values to bmp file");
+ return-1;
+ }
+ }
+ if(foo%4)
+ {
+ memset(buf,0,4-foo%4);
+ if(write(fd,buf,4-foo%4)<4-foo%4)
+ {
+ puts("failed writing 4 byte ending");
+ return -1;
+ }
+ }
+ }
+ }
+ if(window==6)
+ {
+ for(j=0;j<d3_l->max_z;j++)
+ {
+ for(i=0;i<d3_l->max_x;i++)
+ {
+ sum=*(d3_l->extra+i+(d3_l->max_y-j-1)*d3_l->max_x+z*d3_l->max_x*d3_l->max_y);
+ sum=sum*255/max;
+ memset(buf,(unsigned char)sum,3);
+ if(write(fd,buf,3)<3)
+ {
+ puts("failed writing rgb values to bmp file");
+ return-1;
+ }
+ }
+ if(foo%4)
+ {
+ memset(buf,0,4-foo%4);
+ if(write(fd,buf,4-foo%4)<4-foo%4)
+ {
+ puts("failed writing 4 byte ending");
+ return -1;
+ }
+ }
+ }
+ }
close(fd);
return 1;
return 1;
}
+u32 get_reject_graph(info *my_info,d3_lattice *d3_l,char *file,u32 *graph) {
+ double a,b;
+ int i,j,k;
+ int fd;
+ char buf[32],*p;
+ unsigned char *flag;
+ u32 max;
+
+ max=0;
+ if((fd=open(file,O_RDONLY))<0)
+ {
+ puts("cannot open file to calculate rejection graph");
+ return -1;
+ }
+ if((flag=(unsigned char *)malloc(d3_l->max_z))==NULL)
+ {
+ puts("cannot malloc flag memory for rejection graph");
+ return -1;
+ }
+ memset(flag,0,d3_l->max_z);
+ memset(graph,0,d3_l->max_z*sizeof(u32));
+ /* get fixpoints */
+ k=1;
+ while(k)
+ {
+ for(i=0;i<32;i++)
+ {
+ k=read(fd,&buf[i],1);
+ if((buf[i]=='\n')||(k==0)) break;
+ }
+ if(k)
+ {
+ p=strtok(buf," ");
+ a=atof(p)/10; /* nm */
+ p=strtok(NULL," ");
+ b=atof(p);
+ if(a>d3_l->max_z*CELL_LENGTH) k=0;
+ else
+ {
+ graph[(int)(a/CELL_LENGTH)]=(int)(URAND_MAX*b);
+ flag[(int)(a/CELL_LENGTH)]=1;
+ }
+ }
+ }
+ /* do (linear) interpolation here! */
+ i=0;
+ a=0;
+ while(i<d3_l->max_z)
+ {
+ /* graph[0] is 0! */
+ j=i;
+ i++;
+ while(flag[i]==0&&i<d3_l->max_z) i++;
+ for(k=j+1;k<i;k++) graph[k]=(int)((k-j)*((int)graph[i]-(int)graph[j])/(i-j))+graph[j];
+ if(graph[i]>max) max=graph[i];
+ }
+
+ free(flag);
+
+ // printf("debug: (interpolated c profile)\n");
+ // for(i=0;i<d3_l->max_z;i++) printf("%d %d\n",i,graph[i]);
+
+ return max;
+}
+
int main(int argc,char **argv)
{
u32 x,y,z,x_c,y_c,z_c;
- int i,quit,escape,switchmode,nowait,bmp;
+ int i,j,quit,escape,switchmode,nowait,bmp,ac_distr;
int refresh,resave;
int c_step;
char s_file[MAX_CHARS];
char l_file[MAX_CHARS];
char c_file[MAX_CHARS];
char p_file[MAX_CHARS];
+ char n_e_file[MAX_CHARS];
char convert;
char r_file[MAX_CHARS];
#ifdef USE_DFB_API
#ifdef USE_DFB_API
int max_extra;
#endif
+ u32 *c_profile;
+ u32 *n_e_loss;
+ u32 ne_max,ip_max;
d3_l.max_x=X;
d3_l.max_y=Y;
refresh=REFRESH;
resave=RESAVE;
my_info.z_diff=0;
- c_diff=1;
+ my_info.c_diff=1;
my_info.a_el=A_EL;
my_info.b_el=B_EL;
my_info.a_cd=A_CD;
my_info.dr_ac=DR_AC;
my_info.dr_cc=DR_CC;
my_info.diff_rate=DIFF_RATE;
+ my_info.cpi=CPI;
+ my_info.c_sat=C_SAT;
nowait=0;
quit=0;
escape=0;
strcpy(l_file,"");
strcpy(c_file,"");
strcpy(p_file,IMP_PROFILE);
+ strcpy(n_e_file,NEL_PROFILE);
convert=0;
strcpy(r_file,"");
mode=0;
-
- amorph_count=0;
- cryst_count=0;
+ ne_max=0;
+ ip_max=0;
for(i=1;i<argc;i++)
{
my_info.z_diff=1;
break;
case 'i':
- c_diff=0;
+ my_info.c_diff=0;
+ my_info.dr_cc=0;
break;
case 's':
my_info.steps=atoi(argv[++i]);
case 'P':
strcpy(p_file,argv[++i]);
break;
+ case 'N':
+ strcpy(n_e_file,argv[++i]);
+ break;
case 'g':
strcpy(l_file,argv[++i]);
if(i<argc-1) if(argv[i+1][0]!='-') c_step=atoi(argv[++i]);
break;
+ case 'H':
+ my_info.cpi=atoi(argv[++i]);
+ break;
+ case 'm':
+ my_info.c_sat=atoi(argv[++i]);
+ break;
default:
usage();
return -1;
sprintf(s_txt,"steps: %d",my_info.steps);
sprintf(dose_txt,"dose: %.2fe+17 C/cm²",my_info.steps*1.0/(d3_l.max_x*d3_l.max_y*CELL_LENGTH*CELL_LENGTH*1000));
sprintf(r_txt,"pressure range: %d",my_info.range);
- sprintf(ap_txt,"a_ap: %.3f b_ap: %.3f",my_info.a_ap,my_info.b_ap);
- sprintf(el_txt,"a_el: %.3f b_el: %.3f",my_info.a_el,my_info.b_el);
- sprintf(cd_txt,"a_cd: %.3f b_cd: %.3f",my_info.a_cd,my_info.b_cd);
- sprintf(cp_txt,"a_cp: %.4f",my_info.a_cp);
- sprintf(dr_ac_txt,"a/c diffusion rate: %.4f",my_info.dr_ac);
- sprintf(dr_cc_txt,"c/c diffusion rate: %.4f",my_info.dr_cc);
+ sprintf(ap_txt,"a_ap: %f b_ap: %f",my_info.a_ap,my_info.b_ap);
+ sprintf(el_txt,"a_el: %f b_el: %f",my_info.a_el,my_info.b_el);
+ sprintf(cd_txt,"a_cd: %f b_cd: %f",my_info.a_cd,my_info.b_cd);
+ sprintf(cp_txt,"a_cp: %f",my_info.a_cp);
+ sprintf(dr_ac_txt,"a/c diffusion rate: %f",my_info.dr_ac);
+ if(my_info.c_diff!=0) sprintf(dr_cc_txt,"c/c diffusion rate: %f",my_info.dr_cc);
+ else sprintf(dr_cc_txt,"c/c diffusion rate: none");
sprintf(zdiff_txt,"diffusion in z direction: %c",my_info.z_diff?'y':'n');
sprintf(diff_txt,"diffusion every %d steps",my_info.diff_rate);
strcpy(mode_txt,"view: a/c mode");
if((!strcmp(l_file,""))||(c_step))
{
+ /* calculate ratio of c_simwindow / c_total */
if(get_c_ratio(&c_ratio,p_file,&my_info,&d3_l)!=1)
{
puts("failed calculating ratio");
return -1;
}
+ /* compute graphs for random number rejection method */
+ if((c_profile=(u32 *)malloc(d3_l.max_z*sizeof(unsigned int)))==NULL)
+ {
+ puts("failed allocating memory for carbon profile graph");
+ return -1;
+ }
+ if((n_e_loss=(u32 *)malloc(d3_l.max_z*sizeof(unsigned int)))==NULL)
+ {
+ puts("failed allocating memory for nuclear energy loss graph");
+ return -1;
+ }
+ ip_max=get_reject_graph(&my_info,&d3_l,p_file,c_profile);
+ ne_max=get_reject_graph(&my_info,&d3_l,n_e_file,n_e_loss);
+
+#ifdef DEBUG_RAND
+ while(1)
+ {
+#ifdef DEBUG_CP
+ printf("%d\n",get_rand_reject(d3_l.max_z,ip_max,c_profile));
+#endif
+#ifdef DEBUG_NEL
+ printf("%d\n",get_rand_reject(d3_l.max_z,ne_max,n_e_loss));
+#endif
+ }
+#endif
+
i=(c_step?c_step:0);
while((i<my_info.steps) && (quit==0) && (escape==0))
{
- x_c=get_rand(d3_l.max_x);
- y_c=get_rand(d3_l.max_y);
- z_c=get_rand_lgp(d3_l.max_z,my_info.a_el,my_info.b_el);
- distrib_c(&d3_l,&my_info,i,c_ratio);
- process_cell(&d3_l,x_c,y_c,z_c,&my_info);
+ for(j=0;j<my_info.cpi;j++)
+ {
+ x_c=get_rand(d3_l.max_x);
+ y_c=get_rand(d3_l.max_y);
+ // z_c=get_rand_lgp(d3_l.max_z,my_info.a_el,my_info.b_el);
+ z_c=get_rand_reject(d3_l.max_z,ne_max,n_e_loss);
+ process_cell(&d3_l,x_c,y_c,z_c,&my_info);
+ }
+ distrib_c(&d3_l,&my_info,i,c_ratio,ip_max,c_profile);
#ifdef USE_DFB_API
if(i%refresh==0)
{
sprintf(xyz_txt,"x: %d y: %d z: %d",x+1,y+1,z+1);
sprintf(status_txt,"status: %c",(*(d3_l.status+x+y*d3_l.max_x+z*d3_l.max_x*d3_l.max_y)&AMORPH)?'a':'c');
sprintf(conc_txt,"conc: %d",*(d3_l.extra+x+y*d3_l.max_x+z*d3_l.max_x*d3_l.max_y));
- sprintf(steps_txt,"step: %d a_count: %d",i,amorph_count);
- sprintf(cc_txt,"total c: %d c_count: %d",my_info.cc,cryst_count);
+ sprintf(steps_txt,"step: %d",i);
+ sprintf(cc_txt,"total c: %d",my_info.cc);
d3_lattice_draw(&d3_l,x,y,z,25,arg_v,mode,0);
}
#endif
if(switchmode==2) strcpy(mode_txt,"view: a pressure mode");
d3_lattice_draw(&d3_l,x,y,z,25,arg_v,mode,max_extra);
bmp=0;
- scan_event(&d3_l,&x,&y,&z,&quit,&escape,&switchmode,&bmp);
- if(bmp) write_bmp(&d3_l,bmp,x,y,z);
-
+ ac_distr=0;
+ scan_event(&d3_l,&x,&y,&z,&quit,&escape,&switchmode,&bmp,&ac_distr);
+ if(bmp) write_bmp(&d3_l,bmp,x,y,z,max_extra);
+ if(ac_distr) write_ac_distr(&d3_l,ac_distr);
}
d3_lattice_release(&d3_l);