/*
* nlsop.c
*
+ * author: frank zirkelbach (frank.zirkelbach@physik.uni-augsburg.de)
+ *
* this program tries helping to understand the amorphous depuration
* and recrystallization of SiCx while ion implantation at temperatures
* below 400 degree celsius.
* refs:
* - J. K. N. Lindner. Habilationsschrift, Universitaet Augsburg.
* - Maik Haeberlen. Diplomarbeit, Universitaet Augsburg.
+ *
+ * Copyright (C) 2004 Frank Zirkelbach
+ *
+ * This program is free software; you can redistribute it and/or modify
+ * it under the terms of the GNU General Public License as published by
+ * the Free Software Foundation; either version 2 of the License, or
+ * (at your option) any later version.
+ *
+ * This program is distributed in the hope that it will be useful,
+ * but WITHOUT ANY WARRANTY; without even the implied warranty of
+ * MERCHANTABILITY or FITNESS FOR A PARTICULAR PURPOSE. See the
+ * GNU General Public License for more details.
+ *
+ * You should have received a copy of the GNU General Public License
+ * along with this program; if not, write to the Free Software
+ * Foundation, Inc., 59 Temple Place, Suite 330, Boston, MA 02111-1307 USA
+ *
*/
#define _GNU_SOURCE
#define MAKE_AMORPH(N) *(N)|=AMORPH
#define MAKE_CRYST(N) *(N)&=~AMORPH
-/* test globals - get removed or included in my_info struct later */
-int amorph_count;
-int cryst_count;
-
int usage(void)
{
puts("usage:");
puts("-h \t\t help");
puts("-n \t\t no user interaction");
puts("-Z \t\t cryst -> amorph c diffusion in z direction");
+ puts("-i \t\t no cryst to cryst diffusion");
printf("-a <value> \t slope of nuclear energy loss (default %f)\n",A_EL);
printf("-b <value> \t nuclear energy loss offset (default %f)\n",B_EL);
printf("-x <value> \t # x cells (default %d)\n",X);
printf("-D <value> \t diffusion rate from cryst to amorph cells (default %f)\n",DR_AC);
printf("-c <value> \t diffusion rate in cryst cells (default %f)\n",DR_CC);
printf("-e <value> \t do diffusion every <value> steps (default %d)\n",DIFF_RATE);
+ puts("-g <file> <step> continue simulation from file and step (step > 0)!");
printf("-W <value> \t write every <value> steps to save file (default %d)\n",RESAVE);
puts("-C <file> \t convert file to gnuplot format");
puts("-L <file> \t load from file");
puts("-S <file> \t save to file");
puts("-R <file> \t read from random file");
- puts("-P <file> \t specify implantatin profile file");
+ puts("-P <file> \t specify implantation profile file");
+ printf("-H <value> \t collisions per ion in simulation window (default %d)\n",CPI);
return 1;
}
p+=*conc*my_info->a_cp*URAND_MAX;
if(!(*thiz&AMORPH))
{
- if(get_rand(URAND_MAX)<=p)
- {
- MAKE_AMORPH(thiz);
- amorph_count++;
- }
+ if(get_rand(URAND_MAX)<=p) MAKE_AMORPH(thiz);
} else
{
/* assume 1-p probability */
- if(get_rand(URAND_MAX)>p)
- {
- MAKE_CRYST(thiz);
- cryst_count++;
- }
+ if(get_rand(URAND_MAX)>p) MAKE_CRYST(thiz);
}
return 1;
for(k=0;k<d3_l->max_z;k++)
{
offset=i+j*d3_l->max_x+k*d3_l->max_x*d3_l->max_y;
- /* case amorph - amorph <-> cryst diffusion */
+ /* case amorph: amorph <- cryst diffusion */
if(*(d3_l->status+offset)&AMORPH)
{
for(c=-1;c<=1;c++)
{
off=i+((j+c+d3_l->max_y)%d3_l->max_y)*d3_l->max_x+k*d3_l->max_x*d3_l->max_y;
carry=0;
- if(!(*(d3_l->status+off)&AMORPH)) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
+ if(!(*(d3_l->status+off)&AMORPH)) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
if(carry!=0)
{
*(d3_l->extra+offset)+=carry;
}
if(my_info->z_diff)
{
- for(c=-1;c<=1;c++)
+ if(k!=0)
{
- if(c!=0)
+ off=i+j*d3_l->max_x+(k-1)*d3_l->max_x*d3_l->max_y;
+ carry=0;
+ if(!*(d3_l->status+off)&AMORPH) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
+ if(carry!=0)
{
- off=i+j*d3_l->max_x+((k+c+d3_l->max_z)%d3_l->max_z)*d3_l->max_x*d3_l->max_y;
- carry=0;
- if(!*(d3_l->status+off)&AMORPH) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
- if(carry!=0)
- {
- *(d3_l->extra+off)-=carry;
- *(d3_l->extra+offset)+=carry;
- }
+ *(d3_l->extra+off)-=carry;
+ *(d3_l->extra+offset)+=carry;
+ }
+ }
+ if(k!=d3_l->max_z-1)
+ {
+ off=i+j*d3_l->max_x+(k+1)*d3_l->max_x*d3_l->max_y;
+ carry=0;
+ if(!*(d3_l->status+off)&AMORPH) carry=(int)(my_info->dr_ac*(*(d3_l->extra+off)));
+ if(carry!=0)
+ {
+ *(d3_l->extra+off)-=carry;
+ *(d3_l->extra+offset)+=carry;
}
}
}
} else
- /* case not amorph - cryst <-> cryst diffusion */
+ /* case not amorph: cryst <-> cryst diffusion */
+ if(my_info->c_diff) {
+ /* if there is c diff, no diff in z-direction */
{
for(c=-1;c<=1;c++)
{
}
}
}
+ /* end test */
+ }
+ /* */
} /* for z */
} /* for y */
} /* for x */
return max;
}
+int write_ac_distr(d3_lattice *d3_l,int ac_distr)
+{
+ int fd,x,y,z;
+ int count=0,offset;
+ char file[16];
+
+ if(ac_distr==1) strcpy(file,"a.plot");
+ if(ac_distr==2) strcpy(file,"c.plot");
+ if(ac_distr==3) strcpy(file,"b.plot");
+
+ if((fd=open(file,O_WRONLY|O_CREAT))<0)
+ {
+ puts("cannot open plot file");
+ return -1;
+ }
+
+ for(z=0;z<d3_l->max_z;z++)
+ {
+ for(x=0;x<d3_l->max_x;x++)
+ {
+ for(y=0;y<d3_l->max_y;y++)
+ {
+ offset=x+y*d3_l->max_x+z*d3_l->max_x*d3_l->max_y;
+ if(ac_distr==1)
+ if(*(d3_l->status+offset)&AMORPH) count+=*(d3_l->extra+offset);
+ if(ac_distr==2)
+ if(!(*(d3_l->status+offset)&AMORPH)) count+=*(d3_l->extra+offset);
+ if(ac_distr==3) count+=*(d3_l->extra+offset);
+ }
+ }
+ dprintf(fd,"%d %d\n",z,count);
+ }
+ close(fd);
+
+ return 1;
+}
+
int write_bmp(d3_lattice *d3_l,int window,u32 x,u32 y,u32 z)
{
- int fd,i,j,size=0,foo=0;
+ int fd,i,j,size=0,foo=0,end=0;
int width=0,height=0;
char bmpfile[MAX_CHARS];
char buf[128];
- if(window==1)
+ if(((window==4)||(window==5))&&(d3_l->max_z<FFT_HEIGHT) )
+ {
+ puts("error: z < FFT_HEIGHT!");
+ puts("not writing bmp file ...");
+ return -1;
+ }
+
+ if(window%3==1)
{
sprintf(bmpfile,"x-z_%d.bmp",y);
foo=3*d3_l->max_x;
- size=(foo+(4-foo%4))*d3_l->max_z;
+ if(window==1)
+ {
+ size=(foo+(4-foo%4))*d3_l->max_z;
+ height=d3_l->max_z;
+ }
+ else
+ {
+ size=(foo+(4-foo%4))*FFT_HEIGHT;
+ end=d3_l->max_z-FFT_HEIGHT;
+ height=FFT_HEIGHT;
+ }
width=d3_l->max_x;
- height=d3_l->max_z;
}
- if(window==2)
+ if(window%3==2)
{
sprintf(bmpfile,"y-z_%d.bmp",x);
foo=3*d3_l->max_y;
- size=(foo+(4-foo%4))*d3_l->max_z;
+ if(window==2)
+ {
+ size=(foo+(4-foo%4))*d3_l->max_z;
+ height=d3_l->max_z;
+ }
+ else
+ {
+ size=(foo+(4-foo%4))*FFT_HEIGHT;
+ end=d3_l->max_z-FFT_HEIGHT;
+ height=FFT_HEIGHT;
+ }
width=d3_l->max_y;
- height=d3_l->max_z;
}
if(window==3)
{
puts("failed writing bmp header");
return -1;
}
- if(window==1)
+ if(window%3==1)
{
- for(j=0;j<d3_l->max_z;j++)
+ for(j=0;j<d3_l->max_z-end;j++)
{
for(i=0;i<d3_l->max_x;i++)
{
- if(*(d3_l->status+i+y*d3_l->max_x+(d3_l->max_z-j)*d3_l->max_x*d3_l->max_y)&RED) memset(buf,0xff,3);
+ if(*(d3_l->status+i+y*d3_l->max_x+(d3_l->max_z-j-1)*d3_l->max_x*d3_l->max_y)&RED) memset(buf,0xff,3);
else memset(buf,0,3);
if(write(fd,buf,3)<3)
{
}
}
}
- if(window==2)
+ if(window%3==2)
{
- for(j=0;j<d3_l->max_z;j++)
+ for(j=0;j<d3_l->max_z-end;j++)
{
for(i=0;i<d3_l->max_y;i++)
{
- if(*(d3_l->status+x+i*d3_l->max_x+(d3_l->max_z-j)*d3_l->max_x*d3_l->max_y)&RED) memset(buf,0xff,3);
+ if(*(d3_l->status+x+i*d3_l->max_x+(d3_l->max_z-j-1)*d3_l->max_x*d3_l->max_y)&RED) memset(buf,0xff,3);
else memset(buf,0,3);
if(write(fd,buf,3)<3)
{
{
for(i=0;i<d3_l->max_x;i++)
{
- if(*(d3_l->status+i+(d3_l->max_y-j)*d3_l->max_x+z*d3_l->max_x*d3_l->max_y)&RED) memset(buf,0xff,3);
+ if(*(d3_l->status+i+(d3_l->max_y-j-1)*d3_l->max_x+z*d3_l->max_x*d3_l->max_y)&RED) memset(buf,0xff,3);
else memset(buf,0,3);
if(write(fd,buf,3)<3)
{
int main(int argc,char **argv)
{
u32 x,y,z,x_c,y_c,z_c;
- int i,quit,escape,switchmode,nowait,bmp;
+ int i,j,quit,escape,switchmode,nowait,bmp,ac_distr;
int refresh,resave;
+ int c_step;
char s_file[MAX_CHARS];
char s_file_tmp[MAX_CHARS];
char l_file[MAX_CHARS];
refresh=REFRESH;
resave=RESAVE;
my_info.z_diff=0;
+ my_info.c_diff=1;
my_info.a_el=A_EL;
my_info.b_el=B_EL;
my_info.a_cd=A_CD;
my_info.dr_ac=DR_AC;
my_info.dr_cc=DR_CC;
my_info.diff_rate=DIFF_RATE;
+ my_info.cpi=CPI;
nowait=0;
quit=0;
escape=0;
switchmode=0;
+ c_step=0;
strcpy(s_file,"");
strcpy(l_file,"");
strcpy(c_file,"");
strcpy(r_file,"");
mode=0;
- amorph_count=0;
- cryst_count=0;
-
for(i=1;i<argc;i++)
{
if(argv[i][0]=='-')
case 'Z':
my_info.z_diff=1;
break;
+ case 'i':
+ my_info.c_diff=0;
+ my_info.dr_cc=0;
+ break;
case 's':
my_info.steps=atoi(argv[++i]);
break;
case 'P':
strcpy(p_file,argv[++i]);
break;
+ case 'g':
+ strcpy(l_file,argv[++i]);
+ if(i<argc-1) if(argv[i+1][0]!='-') c_step=atoi(argv[++i]);
+ break;
+ case 'H':
+ my_info.cpi=atoi(argv[++i]);
+ break;
default:
usage();
return -1;
return 1;
}
#ifdef USE_DFB_API
- else d3_lattice_init(&argc,argv,&d3_l);
+ else d3_lattice_init(&argc,argv,&d3_l);
#endif
}
sprintf(cd_txt,"a_cd: %.3f b_cd: %.3f",my_info.a_cd,my_info.b_cd);
sprintf(cp_txt,"a_cp: %.4f",my_info.a_cp);
sprintf(dr_ac_txt,"a/c diffusion rate: %.4f",my_info.dr_ac);
- sprintf(dr_cc_txt,"c/c diffusion rate: %.4f",my_info.dr_cc);
+ if(my_info.c_diff!=0) sprintf(dr_cc_txt,"c/c diffusion rate: %.4f",my_info.dr_cc);
+ else sprintf(dr_cc_txt,"c/c diffusion rate: none");
sprintf(zdiff_txt,"diffusion in z direction: %c",my_info.z_diff?'y':'n');
sprintf(diff_txt,"diffusion every %d steps",my_info.diff_rate);
strcpy(mode_txt,"view: a/c mode");
arg_v[25]=dr_cc_txt;
#endif
- if(!strcmp(l_file,""))
+ if((!strcmp(l_file,""))||(c_step))
{
if(get_c_ratio(&c_ratio,p_file,&my_info,&d3_l)!=1)
{
puts("failed calculating ratio");
return -1;
}
- i=0;
+ i=(c_step?c_step:0);
while((i<my_info.steps) && (quit==0) && (escape==0))
{
- x_c=get_rand(d3_l.max_x);
- y_c=get_rand(d3_l.max_y);
- z_c=get_rand_lgp(d3_l.max_z,my_info.a_el,my_info.b_el);
+ for(j=0;j<my_info.cpi;j++)
+ {
+ x_c=get_rand(d3_l.max_x);
+ y_c=get_rand(d3_l.max_y);
+ z_c=get_rand_lgp(d3_l.max_z,my_info.a_el,my_info.b_el);
+ process_cell(&d3_l,x_c,y_c,z_c,&my_info);
+ }
distrib_c(&d3_l,&my_info,i,c_ratio);
- process_cell(&d3_l,x_c,y_c,z_c,&my_info);
#ifdef USE_DFB_API
if(i%refresh==0)
{
sprintf(xyz_txt,"x: %d y: %d z: %d",x+1,y+1,z+1);
sprintf(status_txt,"status: %c",(*(d3_l.status+x+y*d3_l.max_x+z*d3_l.max_x*d3_l.max_y)&AMORPH)?'a':'c');
sprintf(conc_txt,"conc: %d",*(d3_l.extra+x+y*d3_l.max_x+z*d3_l.max_x*d3_l.max_y));
- sprintf(steps_txt,"step: %d a_count: %d",i,amorph_count);
- sprintf(cc_txt,"total c: %d c_count: %d",my_info.cc,cryst_count);
+ sprintf(steps_txt,"step: %d",i);
+ sprintf(cc_txt,"total c: %d",my_info.cc);
d3_lattice_draw(&d3_l,x,y,z,25,arg_v,mode,0);
}
#endif
if(switchmode==2) strcpy(mode_txt,"view: a pressure mode");
d3_lattice_draw(&d3_l,x,y,z,25,arg_v,mode,max_extra);
bmp=0;
- scan_event(&d3_l,&x,&y,&z,&quit,&escape,&switchmode,&bmp);
+ ac_distr=0;
+ scan_event(&d3_l,&x,&y,&z,&quit,&escape,&switchmode,&bmp,&ac_distr);
if(bmp) write_bmp(&d3_l,bmp,x,y,z);
-
+ if(ac_distr) write_ac_distr(&d3_l,ac_distr);
}
d3_lattice_release(&d3_l);