\bibitem{taylor} W. J. Taylor, T. Y. Tan, U. G"osele. Appl. Phys. Lett. 62 (1993) 3336.
\bibitem{eftem_tbp} M. H"aberlen, J. K. N. Lindner, B. Stritzker. to be published.
\bibitem{maik_temper} M. H"aberlen, J. K. N. Lindner. B. Stritzker. Nucl. Instr. and Meth. B 206 (2003) 916.
\bibitem{horton} L. L. Horton, J. Bentley, L. Romana, A. Perez, C. J. McHargue, J. C. McCallum. nucl. Instr. and Meth. B 65 (1992) 345.
\bibitem{skorupa} W. Skorupa, V. Heera, Y. Pacaud, H. Weishart in: F. Priolo, J. K. N. Lindner, A. Nylandsted Larsen, J. M. Poate (Eds.). New Trends in Ion Beam Processing of Materials. Europ. Mater. Res. Soc. Symp. Proc. 65 Part 1. Elsevier Amsterdamm (1977) 114.
\bibitem{taylor} W. J. Taylor, T. Y. Tan, U. G"osele. Appl. Phys. Lett. 62 (1993) 3336.
\bibitem{eftem_tbp} M. H"aberlen, J. K. N. Lindner, B. Stritzker. to be published.
\bibitem{maik_temper} M. H"aberlen, J. K. N. Lindner. B. Stritzker. Nucl. Instr. and Meth. B 206 (2003) 916.
\bibitem{horton} L. L. Horton, J. Bentley, L. Romana, A. Perez, C. J. McHargue, J. C. McCallum. nucl. Instr. and Meth. B 65 (1992) 345.
\bibitem{skorupa} W. Skorupa, V. Heera, Y. Pacaud, H. Weishart in: F. Priolo, J. K. N. Lindner, A. Nylandsted Larsen, J. M. Poate (Eds.). New Trends in Ion Beam Processing of Materials. Europ. Mater. Res. Soc. Symp. Proc. 65 Part 1. Elsevier Amsterdamm (1977) 114.