- \bibitem{1} L.L. Snead, S.J. Zinkle, J.C. Hay, M.C. Osborne, Nucl. Instr. and Meth. B 141 (1998) 123
- \bibitem{2} A.H. van Ommen, Nucl. Instr. and Meth. B 39 (1989) 194
- \bibitem{3} M. Ishimaru, R.M. Dickerson, K.E. Sickafus, Nucl. Instr. and Meth. B 166-167 (2000) 390
- \bibitem{4} J.K.N. Lindner, Appl. Phys. A 77 (2003) 27-38
- \bibitem{5} J.K.N. Lindner, M. Häberlen, M. Schmidt, W. Attenberger, B. Stritzker, Nucl. Instr. and Meth. B 186 (2000) 206-211
- \bibitem{6} W.J. Taylor, T.Y. Tan, U.Gösele, Appl. Phys. Lett. 62 (1993) 3336
- \bibitem{7} J. Linnross, R.G. Elliman, W.L. Brown, J. Mater, Res. 3 (1988) 1208
- \bibitem{8} SRIM2000 Version of the TRIM program described by J.F. Ziegler, J.P. Biersack, U. Littmark in: The Stopping and Range of Ions in Matter, vol. 1, Pergamon Press, New York, 1985
- \bibitem{9} J.K.N. Lindner, W. Reiber, B. Stritzker, Mater. Sci. Forum Vols. 264-268 (1998) 215-218
+ \bibitem{1} L.L. Snead, S.J. Zinkle, J.C. Hay, M.C. Osborne, Nucl. Instr. and Meth. B 141 (1998) 123.
+ \bibitem{2} A.H. van Ommen, Nucl. Instr. and Meth. B 39 (1989) 194.
+ \bibitem{3} M. Ishimaru, R.M. Dickerson, K.E. Sickafus, Nucl. Instr. and Meth. B 166-167 (2000) 390.
+ \bibitem{4} J.K.N. Lindner, Appl. Phys. A 77 (2003) 27-38.
+ \bibitem{5} J.K.N. Lindner, M. Häberlen, M. Schmidt, W. Attenberger, B. Stritzker, Nucl. Instr. and Meth. B 186 (2000) 206-211.
+ \bibitem{6} W.J. Taylor, T.Y. Tan, U.Gösele, Appl. Phys. Lett. 62 (1993) 3336.
+ \bibitem{7} M. Häberlen, J.K.N. Lindner, B. Stritzker, to be published.
+ \bibitem{8} M. Häberlen, J.K.N. Lindner, B. Stritzker, Nucl. Instr. and Meth. B 206 (2003) 916-921.
+ \bibitem{9} J. Linnross, R.G. Elliman, W.L. Brown, J. Mater, Res. 3 (1988) 1208.
+ \bibitem{10} L. L. Horton, J. Bentley, L. Romana, A. Perez, C.J. McHargue, J.C. McCallum, Nucl. Intr. and Meth. B 65 (1992) 345.
+ \bibitem{11} W. Skorupa, V. Heera, Y. Pacaud, H. Weishart, in: F. Priolo, J.K.N. Lindner, A. Nylandsted Larsen, J.M. Poate (Eds.), New Trends in Ion Beam Processing of Materials, Europ. Mater. Res. Soc. Symp. Proc. 65, Part 1, Elsevier, Amsterdam, 1997, p. 114.
+ \bibitem{12} SRIM2000 Version of the TRIM program described by J.F. Ziegler, J.P. Biersack, U. Littmark in: The Stopping and Range of Ions in Matter, vol. 1, Pergamon Press, New York, 1985.
+ \bibitem{13} J.K.N. Lindner, W. Reiber, B. Stritzker, Mater. Sci. Forum Vols. 264-268 (1998) 215-218.