-Si self-interstitials (Si$_{\text{i}}$), known as the transport vehicles for dopants \cite{fahey89,stolk95}, get trapped by reacting with the carbon atoms.
-Furthermore, carbon incorporated in silicon is being used to adjust the band gap \cite{soref91,kasper91} and the fabrication of strained silicon \cite{strane94,strane96,osten99} in order to obtain higher charge carrier mobilities \cite{chang05,osten97}.
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-Thus, the understanding of carbon in silicon either as isovalent impurity as well as at concentrations exceeding the solid solubility limit up to the stoichiometric ratio to form silicon carbide is of fundamental interest.
-Atomistic simulations offer
-In particular the last step of the SiC conversion, which cannot
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-Computer simulations ...
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+Si self-interstitials (Si$_{\text{i}}$), known as the transport vehicles for dopants \cite{fahey89,stolk95}, get trapped by reacting with the carbon atoms \cite{stolk97}.
+Furthermore, carbon incorporated in silicon is being used to fabricate strained silicon \cite{strane94,strane96,osten99} utilized in semiconductor industry for increased charge carrier mobilities in silicon \cite{chang05,osten97} as well as to adjust its band gap \cite{soref91,kasper91}.