X-Git-Url: https://hackdaworld.org/gitweb/?a=blobdiff_plain;f=posic%2Ftalks%2Fseminar_2008.tex;h=600080c7c1af27858dd6d64d0182e9d96b37c8e0;hb=ec33d2be4bcdfec43889d3b9cfa7288ea4ec9af7;hp=2d2218e87122c23cf1f18f39fa77be45634c9a8f;hpb=a63663eef597c796faf6a3882166a5d66ce4e6f3;p=lectures%2Flatex.git

diff --git a/posic/talks/seminar_2008.tex b/posic/talks/seminar_2008.tex
index 2d2218e..600080c 100644
--- a/posic/talks/seminar_2008.tex
+++ b/posic/talks/seminar_2008.tex
@@ -271,13 +271,34 @@
 
  Die Alternative: Ionenstrahlsynthese
 
+ \small
+
+ \begin{minipage}{6cm}
  \begin{itemize}
-  \item Implantation:
-        180 keV C$^+\rightarrow$ Si, $D=8.5 \times 10^{17}$ cm$^{-2}$,
-        $T_{\text{i}}=450 \, ^{\circ} \text{C}$
-  \item Temperschritt:
-        $T=1250 \, ^{\circ} \text{C}$, $t=??\text{ h}$
+  \item Implantation 1:\\
+        180 keV C$^+\rightarrow$ FZ-Si(100)\\
+        $D=7.9 \times 10^{17}$ cm$^{-2}$,
+        $T_{\text{i}}=500 \, ^{\circ} \text{C}$\\
+        $\rightarrow$
+  \item Implantation 2:\\
+        180 keV C$^+\rightarrow$ FZ-Si(100)\\
+        $D=0.6 \times 10^{17}$ cm$^{-2}$,
+        $T_{\text{i}}=250 \, ^{\circ} \text{C}$\\
+        $\rightarrow$
+  \item Tempern:
+        $T=1250 \, ^{\circ} \text{C}$, $t=10\text{ h}$
  \end{itemize}
+ \end{minipage}
+ \hspace*{0.3cm}
+ \begin{minipage}{6cm}
+ \includegraphics[width=7cm]{ibs_3c-sic.eps}
+ {\scriptsize
+ Querschnitts-TEM-Aufnahme einer einkristallinen vergrabenen
+ 3C-SiC-Schicht.\\
+ (a) Hellfeldaufnahme\\
+ (b) 3C-SiC(111) Dunkelfeldaufnahme\\
+ }
+ \end{minipage}
 
 \end{slide}