X-Git-Url: https://hackdaworld.org/gitweb/?a=blobdiff_plain;f=posic%2Fthesis%2Fsic.tex;h=b41d5758d8bcdb76873449db8745741e63eb96bf;hb=b0738b091c5e345a265200a18abdc0dc846bf9b4;hp=354f9f57e974a368232edb54d91ada5d5cc6a98f;hpb=a141d46595869e132fe461227a1bc820efae3ad8;p=lectures%2Flatex.git diff --git a/posic/thesis/sic.tex b/posic/thesis/sic.tex index 354f9f5..b41d575 100644 --- a/posic/thesis/sic.tex +++ b/posic/thesis/sic.tex @@ -170,10 +170,20 @@ Low defect densities in the buffer layer are a prerequisite for obtaining good q Next to surface morphology defects such as pits and islands, the main defects in 3C-SiC heteroepitaxial layers are twins, stacking faults (SF) and antiphase boundaries (APB) \cite{shibahara86,pirouz87}. APB defects, which constitute the primary residual defects in thick layers, are formed near surface terraces that differ in a single-atom-height step resulting in domains of SiC separated by a boundary, which consists of either Si-Si or C-C bonds due to missing or disturbed sublattice information \cite{desjardins96,kitabatake97}. However, the number of such defects can be reduced by off-axis growth on a Si \hkl(0 0 1) substrate miscut towards \hkl[1 1 0] by \unit[2]{$^{\circ}$}-\unit[4]{$^{\circ}$} \cite{shibahara86,powell87_2}. - -resulting in carb and growth \cite{kitabatake97} ... - -lower temps ... to limit thermal stress due to differing expansion coefficients ... +This results in the thermodynamically favored growth of a single phase due to the uni-directional contraction of Si-C-Si bond chains perpendicular to the terrace steps edges during carbonization and the fast growth parallel to the terrace edges during growth under Si rich conditions \cite{kitabatake97}. +By MBE, lower process temperatures than these typically employed in CVD have been realized \cite{hatayama95,henke95,fuyuki97,takaoka98}, which is essential for limiting thermal stresses and to avoid resulting substrate bending, a key issue in obtaining large area 3C-SiC surfaces. +In summary, the almost universal use of Si has allowed significant progress in the understanding of heteroepitaxial growth of SiC on Si. +However, mismatches in the thermal expansion coefficient and the lattice parameter cause a considerably high concentration of various defects, which is responsible for structural and electrical qualities that are not yet statisfactory. + +The alternative attempt to grow SiC on SiC substrates has shown to drastically reduce the concentration of defects in deposited layers. +By CVD, both, the 3C \cite{kong88,powell90} as well as the 6H \cite{kong88_2,powell90_2} polytype could be successfully grown. +In order to obtain the homoepitactically grown 6H polytype, off-axis 6H-SiC wafers are required as a substrate \cite{ueda90,kimoto93}. +%In the so called step-controlled epitaxy, lateral growth proceeds from atomic steps without the necessity of preceding nucleation events. +Investigations indicate that in the so-called step-controlled epitaxy, crystal growth proceeds through the adsorbtion of Si species at atomic steps and their carbonization by hydrocarbon molecules. +This growth mechanism does not require two-dimensional nucleation. +Instead, crystal growth is governed by mass transport, i.e. the diffusion of reactants in a stagnant layer. +In contrast, layers of the 3C polytype are formed on exactly oriented \hkl(0 0 0 1) 6H-SiC substrates by two-dimensional nucleation on terraces. +Lateral 3C-SiC growth was also observed on on low tilt angle off-axis substrates ... by dislocations \cite{powell91} ... used to lower APB density due to controlled starting points of 3C-SiC growth ... \section{Ion beam synthesis of cubic silicon carbide}