From: hackbard Date: Wed, 2 Mar 2011 18:27:24 +0000 (+0100) Subject: another sentence for ssmbe (wahhh!) X-Git-Url: https://hackdaworld.org/gitweb/?a=commitdiff_plain;h=36dfad106c0e3d15dd25accfb5e0eddc50f820d0;p=lectures%2Flatex.git another sentence for ssmbe (wahhh!) --- diff --git a/posic/thesis/sic.tex b/posic/thesis/sic.tex index 9ba0f13..b241efa 100644 --- a/posic/thesis/sic.tex +++ b/posic/thesis/sic.tex @@ -207,7 +207,7 @@ Depending on the gas flow ratio either 3C island formation or step flow growth o Due to the strong adsorption of atomic hydrogen \cite{allendorf91} decomposited of the gas phase reactants at low temperatures, however, there seems to be no benefit of GSMBE compared to CVD. Next to lattice imperfections, incorporated hydrogen effects the surface mobility of the adsorbed species \cite{eaglesham93} setting a minimum limit for the growth temperature, which would preferably be further decreased in order to obtain sharp doping profiles. Thus, growth rates must be adjusted to be lower than the desorption rate of hydrogen, which leads to very low deposition rates at low temperatures. -Solid source MBE (SSMBE) may be the key to avoid these problems. +Solid source MBE (SSMBE) may constitute the preffered method to avoid these problems. Realized on and off-axis 3C on 4H and ... \cite{fissel95,fissel95_apl} ... Nonstoichiometric reconstruction plays a relevenat role ... handled by Si/C flux ratio ... \cite{fissel96,righi03} ... change in adlayer thickness and, consequently, in the surface super structure leading to growth of another polytype \cite{fissel95} ...