\vspace{-0.5cm}
-\begin{center}
-\color{red}
-\framebox{
-{\footnotesize\color{black}
- Mismatch in \underline{thermal expansion coeefficient}
- and \underline{lattice parameter} w.r.t. substrate
-}
-}
-\end{center}
+%\begin{center}
+%\color{red}
+%\framebox{
+%{\footnotesize\color{black}
+% Mismatch in \underline{thermal expansion coeefficient}
+% and \underline{lattice parameter} w.r.t. substrate
+%}
+%}
+%\end{center}
\vspace{0.1cm}
\end{minipage}
}
\begin{minipage}{5.5cm}
-\begin{center}
-{\footnotesize
-No surface bending effects\\
-High areal homogenity\\[0.1cm]
-$\Downarrow$\\[0.1cm]
-Synthesis of large area SiC films possible
-}
-\end{center}
+ \includegraphics[width=5.8cm]{ibs_3c-sic.eps}\\[-0.2cm]
+ \begin{center}
+ {\tiny
+ XTEM: single crystalline 3C-SiC in Si\hkl(1 0 0)
+ }
+ \end{center}
\end{minipage}
+%\begin{minipage}{5.5cm}
+%\begin{center}
+%{\footnotesize
+%No surface bending effects\\
+%High areal homogenity\\[0.1cm]
+%$\Downarrow$\\[0.1cm]
+%Synthesis of large area SiC films possible
+%}
+%\end{center}
+%\end{minipage}
+
\end{slide}
\begin{slide}
\end{slide}
-% contents
-
\begin{slide}
\headphd
\begin{slide}
+% contents
+
\headphd
{\large\bf
Outline
\headphd
{\large\bf
- Summary / Conclusions
+ Summary and Conclusions
}
-\scriptsize
+\footnotesize
+
+\vspace{0.1cm}
\framebox{
\begin{minipage}{12.3cm}
\begin{itemize}
\item Point defects excellently / fairly well described
by DFT / EA
- \item C$_{\text{sub}}$ drastically underestimated by EA
- \item EA predicts correct ground state:
- C$_{\text{sub}}$ \& \si{} $>$ \ci{}
- \item Identified migration path explaining
- diffusion and reorientation experiments by DFT
- \item EA fails to describe \ci{} migration:
- Wrong path \& overestimated barrier
+ \item Identified \ci{} migration path
+ \item EA drastically overestimates the diffusion barrier
\end{itemize}
\item Combinations of defects
\begin{itemize}
\item Agglomeration of point defects energetically favorable
- by compensation of stress
- \item Formation of C-C unlikely
\item C$_{\text{sub}}$ favored conditions (conceivable in IBS)
\item \ci{} \hkl<1 0 0> $\leftrightarrow$ \cs{} \& \si{} \hkl<1 1 0>\\
Low barrier (\unit[0.77]{eV}) \& low capture radius
\begin{minipage}[t]{12.3cm}
\underline{Pecipitation simulations}
\begin{itemize}
- \item High C concentration $\rightarrow$ amorphous SiC like phase
\item Problem of potential enhanced slow phase space propagation
\item Low T $\rightarrow$ C-Si \hkl<1 0 0> dumbbell dominated structure
\item High T $\rightarrow$ C$_{\text{sub}}$ dominated structure
\item High T necessary to simulate IBS conditions (far from equilibrium)
- \item Precipitation by successive agglomeration of \cs (epitaxy)
+ \item Increased participation of \cs{} in the precipitation process
\item \si{}: vehicle to form \cs{} \& supply of Si \& stress compensation
(stretched SiC, interface)
\end{itemize}
}
\begin{center}
-{\color{blue}
+{\color{blue}\bf
\framebox{Precipitation by successive agglomeration of \cs{}}
}
\end{center}
\begin{slide}
- {\large\bf
- Acknowledgements
- }
+\headphd
+{\large\bf
+ Acknowledgements
+}
\vspace{0.1cm}
\underline{Augsburg}
\begin{itemize}
- \item Prof. B. Stritzker (accomodation at EP \RM{4})
- \item Ralf Utermann (EDV)
+ \item Prof. B. Stritzker
+ \item Prof. F. Haider
+ \item Ralf Utermann
\end{itemize}
\underline{Berlin/Brandenburg}
\begin{itemize}
- \item PD Volker Eyert (Ref)
+ \item PD V. Eyert
\end{itemize}
\underline{Helsinki}
\begin{itemize}
- \item Prof. K. Nordlund (MD)
+ \item Prof. K. Nordlund
\end{itemize}
\underline{Munich}
\begin{itemize}
- \item Bayerische Forschungsstiftung (financial support)
+ \item Bayerische Forschungsstiftung
\end{itemize}
\underline{Paderborn}
\begin{itemize}
- \item Prof. J. Lindner (SiC)
- \item Prof. G. Schmidt (DFT + financial support)
- \item Dr. E. Rauls (DFT + SiC)
+ \item Prof. J. Lindner
+ \item Prof. G. Schmidt
+ \item Dr. E. Rauls
\end{itemize}
+\vspace{0.1cm}
+
\begin{center}
\framebox{
\bf Thank you for your attention!