first sent away beta version

[lectures/latex.git] / posic / thesis / sic.tex

diff --git a/posic/thesis/sic.tex b/posic/thesis/sic.tex
index 1302804..cb46a7b 100644 (file)
--- a/posic/thesis/sic.tex
+++ b/posic/thesis/sic.tex
@@ -51,9 +51,10 @@ Thermal conductivity [W/cmK] & 5.0 & 4.9 & 4.9 & 1.5 & 1.3 & 22 \\
 \hline
 \end{tabular}
 \end{center}
-\caption[Properties of SiC polytypes and other semiconductor materials.]{Properties of SiC polytypes and other semiconductor materials. Doping concentrations are $10^{16}\text{ cm}^{-3}$ (A) and $10^{17}\text{ cm}^{-3}$ (B) respectively. References: \cite{wesch96,casady96,park98}. {\color{red}Todo: add more refs + check all values!}}
+\caption[Properties of SiC polytypes and other semiconductor materials.]{Properties of SiC polytypes and other semiconductor materials. Doping concentrations are $10^{16}\text{ cm}^{-3}$ (A) and $10^{17}\text{ cm}^{-3}$ (B) respectively. References: \cite{wesch96,casady96,park98}.}
 \label{table:sic:properties}
 \end{table}
+% todo add more refs + check all values!
 Different polytypes of SiC exhibit different properties.
 Some of the key properties are listed in Table~\ref{table:sic:properties} and compared to other technologically relevant semiconductor materials.
 Despite the lower charge carrier mobilities for low electric fields SiC outperforms Si concerning all other properties.
@@ -359,7 +360,7 @@ Indeed, closely investigating the large amount of literature pulled up in the la
 High resolution transmission electron microscopy (HREM) investigations of C-implanted Si at room temperature followed by rapid thermal annealing (RTA) show the formation of C-Si dumbbell agglomerates, which are stable up to annealing temperatures of about \unit[700-800]{$^{\circ}$C}, and a transformation into 3C-SiC precipitates at higher temperatures \cite{werner96,werner97}.
 The precipitates with diamateres between \unit[2]{nm} and \unit[5]{nm} are incorporated in the Si matrix without any remarkable strain fields, which is explained by the nearly equal atomic density of C-Si agglomerates and the SiC unit cell.
 Implantations at \unit[500]{$^{\circ}$C} likewise suggest an initial formation of C-Si dumbbells on regular Si lattice sites, which agglomerate into large clusters \cite{lindner99_2}.
-The agglomerates of such dimers, which do not generate lattice strain but lead to a local increase of the lattice potential \cite{werner96,wener97}, are indicated by dark contrasts and otherwise undisturbed Si lattice fringes in HREM, as can be seen in Fig.~\ref{fig:sic:hrem:c-si}.
+The agglomerates of such dimers, which do not generate lattice strain but lead to a local increase of the lattice potential \cite{werner96,werner97}, are indicated by dark contrasts and otherwise undisturbed Si lattice fringes in HREM, as can be seen in Fig.~\ref{fig:sic:hrem:c-si}.
 \begin{figure}[t]
 \begin{center}
 \subfigure[]{\label{fig:sic:hrem:c-si}\includegraphics[width=0.25\columnwidth]{tem_c-si-db.eps}}
@@ -420,6 +421,5 @@ On the other hand, processes relying upon prevention of precipitation in order t
 % strane94/guedj98: my model - c redist by si int (spe) and surface diff (mbe)
 % serre95: low/high t implants -> mobile c_i / non-mobile sic precipitates
 
-% todo
-% own polytype stacking sequence image
+% todo - own polytype stacking sequence image