X-Git-Url: https://hackdaworld.org/gitweb/?p=lectures%2Flatex.git;a=blobdiff_plain;f=nlsop%2Fposter%2Fnlsop_ibmm2006.tex;h=285a42caa5a88d4fbd2f4059044bd9ff158366d1;hp=43271f5ddec6613ad50b8d63f6dbaee265c2c167;hb=e553758eb8476a4736350af494a7bb235b9bcd81;hpb=34b57344dd865030cdc34c2594f60c72a46af7e3 diff --git a/nlsop/poster/nlsop_ibmm2006.tex b/nlsop/poster/nlsop_ibmm2006.tex index 43271f5..285a42c 100644 --- a/nlsop/poster/nlsop_ibmm2006.tex +++ b/nlsop/poster/nlsop_ibmm2006.tex @@ -277,6 +277,14 @@ Three contributions to the amorphization process controlled by: corresponding to $3 \, nm$ of substrat removal \end{itemize} + + \subsection*{3.3 {\color{blue} TRIM collision statistics}} + \begin{center} + \includegraphics[width=8cm]{trim_coll_e.eps} + \end{center} + \begin{center} + $\Rightarrow$ mean constant energy loss per collision of an ion + \end{center} \end{kasten} \end{spalte} \begin{spalte} @@ -314,17 +322,19 @@ Three contributions to the amorphization process controlled by: of lamellar structure - the recipe}} \subsubsection*{4.4.1 Constant carbon concentration} \makebox[11cm]{% - \parbox[c]{6cm}{% - \includegraphics[width=6cm]{multiple_impl_cp_e.eps} - } \parbox[c]{5cm}{% \begin{itemize} \item multiple implantation \\ steps \item energies: $180$ - $10 \, keV$ + \item higher temeprature\\ + $\rightarrow$ prevent amorphization \end{itemize} $\Rightarrow$ nearly constant carbon distribution ($10 \, at.\%$) } + \parbox[c]{6cm}{% + \includegraphics[width=6cm]{multiple_impl_cp_e.eps} + } } \subsubsection*{4.4.2 2 MeV C$^+$ implantation step}