X-Git-Url: https://hackdaworld.org/gitweb/?p=lectures%2Flatex.git;a=blobdiff_plain;f=posic%2Ftalks%2Fdefense.tex;h=5ac85d61c7c72c105c2a5991e4ea3153c1787acb;hp=ba3da3245ed5fdba181ef1401f654fd7052acc42;hb=b75fa3911c13c302a90ce982430815d709159419;hpb=8bbe73d014019b72005b776e372293389f197c5b diff --git a/posic/talks/defense.tex b/posic/talks/defense.tex index ba3da32..5ac85d6 100644 --- a/posic/talks/defense.tex +++ b/posic/talks/defense.tex @@ -248,101 +248,6 @@ E\\ % fabrication -\ifnum1=0 -\begin{slide} - -\headphd - {\large\bf - Fabrication of silicon carbide - } - - \small - - \vspace{2pt} - -\begin{center} - {\color{gray} - \emph{Silicon carbide --- Born from the stars, perfected on earth.} - } -\end{center} - -\vspace{2pt} - -SiC thin films by MBE \& CVD -\begin{itemize} - \item Much progress achieved in homo/heteroepitaxial SiC thin film growth - \item \underline{Commercially available} semiconductor power devices based on - \underline{\foreignlanguage{greek}{a}-SiC} - \item Production of favored \underline{3C-SiC} material - \underline{less advanced} - \item Quality and size not yet sufficient -\end{itemize} -\begin{picture}(0,0)(-310,-20) - \includegraphics[width=2.0cm]{cree.eps} -\end{picture} - -\vspace{-0.5cm} - -%\begin{center} -%\color{red} -%\framebox{ -%{\footnotesize\color{black} -% Mismatch in \underline{thermal expansion coeefficient} -% and \underline{lattice parameter} w.r.t. substrate -%} -%} -%\end{center} - -\vspace{0.1cm} - -{\bf Alternative approach}\\ -Ion beam synthesis (IBS) of burried 3C-SiC layers in Si\hkl(1 0 0) - -\vspace{0.1cm} - -\scriptsize - -\framebox{ -\begin{minipage}{3.15cm} - \begin{center} -\includegraphics[width=3cm]{imp.eps}\\ - {\tiny - Carbon implantation - } - \end{center} -\end{minipage} -\begin{minipage}{3.15cm} - \begin{center} -\includegraphics[width=3cm]{annealing.eps}\\ - {\tiny - Postannealing at $>$ \degc{1200} - } - \end{center} -\end{minipage} -} -\begin{minipage}{5.5cm} - \includegraphics[width=5.8cm]{ibs_3c-sic.eps}\\[-0.2cm] - \begin{center} - {\tiny - XTEM: single crystalline 3C-SiC in Si\hkl(1 0 0) - } - \end{center} -\end{minipage} - -%\begin{minipage}{5.5cm} -%\begin{center} -%{\footnotesize -%No surface bending effects\\ -%High areal homogenity\\[0.1cm] -%$\Downarrow$\\[0.1cm] -%Synthesis of large area SiC films possible -%} -%\end{center} -%\end{minipage} - -\end{slide} -\fi - \begin{slide} \headphd @@ -379,32 +284,34 @@ Ion beam synthesis (IBS) of burried 3C-SiC layers in Si\hkl(1 0 0) \end{center} \end{minipage} \begin{minipage}{5cm} +\begin{center} \begin{pspicture}(0,0)(0,0) \rnode{box}{ \psframebox[fillstyle=solid,fillcolor=white,linecolor=blue,linestyle=solid]{ -\begin{minipage}{5.3cm} +\begin{minipage}{3.3cm} \begin{center} {\color{blue} 3C-SiC precipitation\\ not yet fully understood } \end{center} - \vspace*{0.1cm} - \renewcommand\labelitemi{$\Rightarrow$} - Details of the SiC precipitation - \begin{itemize} - \item significant technological progress\\ - in SiC thin film formation - \item perspectives for processes relying\\ - upon prevention of SiC precipitation - \end{itemize} +% \vspace*{0.1cm} +% \renewcommand\labelitemi{$\Rightarrow$} +% Details of the SiC precipitation +% \begin{itemize} +% \item significant technological progress\\ +% in SiC thin film formation +% \item perspectives for processes relying\\ +% upon prevention of SiC precipitation +% \end{itemize} \end{minipage} }} -\rput(-6.8,5.5){\pnode{h0}} -\rput(-3.0,5.5){\pnode{h1}} +\rput(-5.3,5.5){\pnode{h0}} +\rput(-1.95,5.5){\pnode{h1}} \ncline[linecolor=blue]{-}{h0}{h1} \ncline[linecolor=blue]{->}{h1}{box} \end{pspicture} +\end{center} \end{minipage} \end{slide} @@ -652,7 +559,7 @@ r = \unit[2--4]{nm} {\tiny\color{gray}/Strane~et~al./Guedj~et~al./} \begin{itemize} \item Initial {\color{blue}coherent} SiC structures (tensile strain) - \item Incoherent SiC (strain relaxation) + \item Incoherent SiC nanocrystals (strain relaxation) \end{itemize} \end{itemize} \vspace{0.1cm} @@ -846,13 +753,13 @@ $ \end{minipage} \end{minipage} -\vspace{0.2cm} +\vspace{0.3cm} -\begin{minipage}[b]{6cm} +\begin{minipage}[t]{6cm} {\bf Defect formation energy}\\ \framebox{ -$E_{\text{f}}=E-\sum_i N_i\mu_i$}\\[0.1cm] -Particle reservoir: Si \& SiC\\[0.2cm] +$E_{\text{f}}=E-\sum_i N_i\mu_i$}\\[0.5cm] +%Particle reservoir: Si \& SiC\\[0.2cm] {\bf Binding energy}\\ \framebox{ $ @@ -866,7 +773,8 @@ $ $E_{\text{b}}<0$: energetically favorable configuration\\ $E_{\text{b}}\rightarrow 0$: non-interacting, isolated defects\\ \end{minipage} -\begin{minipage}[b]{6cm} +\begin{minipage}[t]{6cm} +\vspace{1.4cm} {\bf Migration barrier} \footnotesize \begin{itemize} @@ -1633,7 +1541,7 @@ Amorphous SiC-like phase \begin{minipage}{6cm} \centering Formation of \ci{} dumbbells\\ -C atoms in proper 3C-SiC distance first +C atoms separated as expected in 3C-SiC \end{minipage} }} \end{pspicture}\\[0.1cm] @@ -1787,7 +1695,7 @@ equilibrium properties \item Peak at 0.3 nm slightly shifted\\[0.05cm] $\searrow$ \ci{} combinations (dashed arrows)\\ $\nearrow$ \ci{} \hkl<1 0 0> \& {\color{blue}\cs{} combinations} (|)\\ - $\nearrow$ \ci{} \hkl<1 0 0> \& \cs{} combinations (|)\\[0.05cm] + $\nearrow$ \ci{} pure \cs{} combinations ($\downarrow$)\\[0.05cm] Range [|-$\downarrow$]: {\color{blue}\cs{} \& \cs{} with nearby \si} \end{itemize} \end{minipage} @@ -1820,7 +1728,8 @@ equilibrium properties \underline{Si-C bonds:} \begin{itemize} \item Vanishing cut-off artifact (above $1650\,^{\circ}\mathrm{C}$) - \item Structural change: C-Si \hkl<1 0 0> $\rightarrow$ C$_{\text{sub}}$ + \item Structural change: \ci{} \hkl<1 0 0> DB $\rightarrow$ + {\color{blue}\cs{}} \end{itemize} \underline{Si-Si bonds:} {\color{blue}Si-C$_{\text{sub}}$-Si} along \hkl<1 1 0> @@ -1828,11 +1737,10 @@ equilibrium properties \underline{C-C bonds:} \begin{itemize} \item C-C next neighbour pairs reduced (mandatory) - \item Peak at 0.3 nm slightly shifted \item Peak at 0.3 nm slightly shifted\\[0.05cm] $\searrow$ \ci{} combinations (dashed arrows)\\ $\nearrow$ \ci{} \hkl<1 0 0> \& {\color{blue}\cs{} combinations} (|)\\ - $\nearrow$ \ci{} \hkl<1 0 0> \& \cs{} combinations (|)\\[0.05cm] + $\nearrow$ \ci{} pure \cs{} combinations ($\downarrow$)\\[0.05cm] Range [|-$\downarrow$]: {\color{blue}\cs{} \& \cs{} with nearby \si} \end{itemize} \end{minipage} @@ -1854,9 +1762,14 @@ equilibrium properties {\Huge$\lightning$} {\color{red}\ci{}} --- vs --- {\color{blue}\cs{}} {\Huge$\lightning$}\\ \end{center} \begin{itemize} -\item Stretched coherent SiC structures\\ -$\Rightarrow$ Precipitation process involves {\color{blue}\cs} -\item Role of \si{} +\item Stretched coherent SiC structures directly observed\\ +\psframebox[linecolor=blue,linewidth=0.05cm]{ +\begin{minipage}{7cm} +\centering +\cs{} involved in the precipitation mechanism\\ +\end{minipage} +} +\item Emission of \si{} serves several needs: \begin{itemize} \item Vehicle to rearrange \cs --- [\cs{} \& \si{} $\leftrightarrow$ \ci] \item Building block for surrounding Si host \& further SiC @@ -1869,16 +1782,13 @@ $\Rightarrow$ Precipitation process involves {\color{blue}\cs} \item Low T: highly mobile {\color{red}\ci} \item High T: stable configurations of {\color{blue}\cs} \end{itemize} -\end{itemize} -\vspace{0.2cm} -\centering \psframebox[linecolor=blue,linewidth=0.05cm]{ \begin{minipage}{7cm} \centering -Precipitation mechanism involving \cs\\ High T $\leftrightarrow$ IBS conditions far from equilibrium\\ \end{minipage} } +\end{itemize} \end{minipage} \vspace{0.2cm} }} @@ -1958,9 +1868,6 @@ High C \& low T implants % skip high c conc \fi -% for preparation -%\fi - \begin{slide} \headphd @@ -1983,7 +1890,7 @@ High C \& low T implants \item Identified \ci{} migration path \item EA drastically overestimates the diffusion barrier \end{itemize} - \item Combinations of defects + \item Combinations of defects (DFT) \begin{itemize} \item Agglomeration of point defects energetically favorable \item C$_{\text{sub}}$ favored conditions (conceivable in IBS) @@ -2030,10 +1937,12 @@ High C \& low T implants Thanks to \ldots +\begin{minipage}[t]{6cm} \underline{Augsburg} \begin{itemize} \item Prof. B. Stritzker \item Ralf Utermann + \item EP \RM{4} \end{itemize} \underline{Helsinki} @@ -2052,17 +1961,30 @@ High C \& low T implants \item Prof. G. Schmidt \item Dr. E. Rauls \end{itemize} +\end{minipage} +\begin{minipage}[t]{6cm} +\underline{Referees} + \begin{itemize} + \item PD V. Eyert + \item Prof. F. Haider + \end{itemize} +\end{minipage} -\vspace{ 0.2cm} - +\vspace{0.5cm} \begin{center} \framebox{ -\normalsize\bf Thank you for your attention! +\Large\bf Thank you for your attention! } \end{center} \end{slide} + + + + + + \begin{slide} \headphd