X-Git-Url: https://hackdaworld.org/gitweb/?p=lectures%2Flatex.git;a=blobdiff_plain;f=posic%2Ftalks%2Fmpi_app.tex;h=e90f38fe4177feeb6db1594c093e698ce9507bfb;hp=157894e7ecf05e7c1451472ad5ecee3e23d4260f;hb=d3b0a76fe369fc79a1d014e8eef3dec01323c8fa;hpb=a5bbdd506c6098302c78d741f53254c9813bb627 diff --git a/posic/talks/mpi_app.tex b/posic/talks/mpi_app.tex index 157894e..e90f38f 100644 --- a/posic/talks/mpi_app.tex +++ b/posic/talks/mpi_app.tex @@ -20,10 +20,13 @@ \usepackage{pstricks} \usepackage{pst-node} +\usepackage{pst-grad} %\usepackage{epic} %\usepackage{eepic} +\usepackage{layout} + \usepackage{graphicx} \graphicspath{{../img/}} @@ -55,17 +58,16 @@ \begin{document} \extraslideheight{10in} -\slideframe{none} +\slideframe{plain} \pagestyle{empty} % specify width and height -\slidewidth 27.7cm -\slideheight 19.1cm +\slidewidth 26.3cm +\slideheight 19.9cm -% shift it into visual area properly -\def\slideleftmargin{3.3cm} -\def\slidetopmargin{0.6cm} +% margin +\def\slidetopmargin{-0.15cm} \newcommand{\ham}{\mathcal{H}} \newcommand{\pot}{\mathcal{V}} @@ -97,6 +99,24 @@ \newcommand{\dista}[1]{\unit[#1]{\AA}{}} \newcommand{\perc}[1]{\unit[#1]{\%}{}} +% no vertical centering +%\centerslidesfalse + +% layout check +%\layout +\begin{slide} +\center +{\Huge +E\\ +F\\ +G\\ +A B C D E F G H G F E D C B A +G\\ +F\\ +E\\ +} +\end{slide} + % topic \begin{slide} @@ -124,142 +144,137 @@ \end{center} \end{slide} +% no vertical centering +\centerslidesfalse + +\ifnum1=0 + % intro \begin{slide} -{\large\bf - Introduction --- The C/Si system\\ -} +%{\large\bf +% Phase diagram of the C/Si system\\ +%} +\vspace*{0.2cm} + +\begin{minipage}{6.5cm} +\includegraphics[width=6.5cm]{si-c_phase.eps} \begin{center} -\includegraphics[width=6.3cm]{si-c_phase.eps}\\ {\tiny R. I. Scace and G. A. Slack, J. Chem. Phys. 30, 1551 (1959) } \end{center} \begin{pspicture}(0,0)(0,0) -\psellipse[linecolor=red,linewidth=0.1cm](6.95,3.95)(0.5,2.8) +\psellipse[linecolor=blue,linewidth=0.1cm](3.55,4.0)(0.5,2.9) \end{pspicture} +\end{minipage} +\begin{minipage}{6cm} +{\bf Phase diagram of the C/Si system}\\[0.2cm] +{\color{blue}Stoichiometric composition} +\begin{itemize} +\item only chemical stable compound +\item wide band gap semiconductor\\ + \underline{silicon carbide}, SiC +\end{itemize} +\end{minipage} \end{slide} -\end{document} -\ifnum1=0 - % motivation / properties / applications of silicon carbide \begin{slide} +\vspace*{1.8cm} + \small \begin{pspicture}(0,0)(13.5,5) - \psframe*[linecolor=hb](0,0)(13.5,5) + \psframe*[linecolor=hb](-0.2,0)(12.9,5) - \pspolygon[linecolor=hlbb,fillcolor=hlbb,fillstyle=solid](5.5,1)(7,1)(7,3)(5.5,3) - \pspolygon[linecolor=hlbb,fillcolor=hlbb,fillstyle=solid](6.75,0.5)(8,2)(8,2)(6.75,3.5) + \pspolygon[linecolor=hlbb,fillcolor=hlbb,fillstyle=solid](5.2,1)(6.5,1)(6.5,3)(5.2,3) + \pspolygon[linecolor=hlbb,fillcolor=hlbb,fillstyle=solid](6.4,0.5)(7.7,2)(7.7,2)(6.4,3.5) - \rput[lt](0.2,4.6){\color{gray}PROPERTIES} + \rput[lt](0,4.6){\color{gray}PROPERTIES} - \rput[lt](0.5,4){wide band gap} - \rput[lt](0.5,3.5){high electric breakdown field} - \rput[lt](0.5,3){good electron mobility} - \rput[lt](0.5,2.5){high electron saturation drift velocity} - \rput[lt](0.5,2){high thermal conductivity} + \rput[lt](0.3,4){wide band gap} + \rput[lt](0.3,3.5){high electric breakdown field} + \rput[lt](0.3,3){good electron mobility} + \rput[lt](0.3,2.5){high electron saturation drift velocity} + \rput[lt](0.3,2){high thermal conductivity} - \rput[lt](0.5,1.5){hard and mechanically stable} - \rput[lt](0.5,1){chemically inert} + \rput[lt](0.3,1.5){hard and mechanically stable} + \rput[lt](0.3,1){chemically inert} - \rput[lt](0.5,0.5){radiation hardness} + \rput[lt](0.3,0.5){radiation hardness} - \rput[rt](13.3,4.6){\color{gray}APPLICATIONS} + \rput[rt](12.7,4.6){\color{gray}APPLICATIONS} - \rput[rt](13,3.85){high-temperature, high power} - \rput[rt](13,3.5){and high-frequency} - \rput[rt](13,3.15){electronic and optoelectronic devices} + \rput[rt](12.5,3.85){high-temperature, high power} + \rput[rt](12.5,3.5){and high-frequency} + \rput[rt](12.5,3.15){electronic and optoelectronic devices} - \rput[rt](13,2.35){material suitable for extreme conditions} - \rput[rt](13,2){microelectromechanical systems} - \rput[rt](13,1.65){abrasives, cutting tools, heating elements} + \rput[rt](12.5,2.35){material suitable for extreme conditions} + \rput[rt](12.5,2){microelectromechanical systems} + \rput[rt](12.5,1.65){abrasives, cutting tools, heating elements} - \rput[rt](13,0.85){first wall reactor material, detectors} - \rput[rt](13,0.5){and electronic devices for space} + \rput[rt](12.5,0.85){first wall reactor material, detectors} + \rput[rt](12.5,0.5){and electronic devices for space} \end{pspicture} -\begin{picture}(0,0)(-3,68) -\includegraphics[width=2.6cm]{wide_band_gap.eps} +\begin{picture}(0,0)(5,-162) +\includegraphics[height=2.2cm]{3C_SiC_bs.eps} \end{picture} -\begin{picture}(0,0)(-285,-162) -\includegraphics[width=3.38cm]{sic_led.eps} +\begin{picture}(0,0)(-120,-162) +\includegraphics[height=2.2cm]{nasa_600c_led.eps} \end{picture} -\begin{picture}(0,0)(-195,-162) -\includegraphics[width=2.8cm]{6h-sic_3c-sic.eps} +\begin{picture}(0,0)(-270,-162) +\includegraphics[height=2.2cm]{6h-sic_3c-sic.eps} \end{picture} -\begin{picture}(0,0)(-313,65) -\includegraphics[width=2.2cm]{infineon_schottky.eps} +%%%% +\begin{picture}(0,0)(10,65) +\includegraphics[height=2.8cm]{sic_switch.eps} \end{picture} -\begin{picture}(0,0)(-220,65) -\includegraphics[width=2.9cm]{sic_wechselrichter_ise.eps} +%\begin{picture}(0,0)(-243,65) +\begin{picture}(0,0)(-110,65) +\includegraphics[height=2.8cm]{ise_99.eps} \end{picture} -\begin{picture}(0,0)(0,-160) -\includegraphics[width=3.0cm]{sic_proton.eps} +%\begin{picture}(0,0)(-135,65) +\begin{picture}(0,0)(-100,65) +\includegraphics[height=1.2cm]{infineon_schottky.eps} \end{picture} -\begin{picture}(0,0)(-60,65) -\includegraphics[width=3.4cm]{sic_switch.eps} +\begin{picture}(0,0)(-233,65) +\includegraphics[height=2.8cm]{solar_car.eps} \end{picture} \end{slide} - -% contents - -\begin{slide} - -{\large\bf - Outline -} - - \begin{itemize} - \item Implantation of C in Si --- Overview of experimental observations - \item Utilized simulation techniques and modeled problems - \begin{itemize} - \item {\color{blue}Diploma thesis}\\ - \underline{Monte Carlo} simulations - modeling the selforganization process - leading to periodic arrays of nanometric amorphous SiC - precipitates - \item {\color{blue}Doctoral studies}\\ - Classical potential \underline{molecular dynamics} simulations - \ldots\\ - \underline{Density functional theory} calculations - \ldots\\[0.2cm] - \ldots on defects and SiC precipitation in Si - \end{itemize} - \item Summary / Conclusion / Outlook - \end{itemize} - -\end{slide} - - - -\end{document} - -\ifnum1=0 - - -% start of contents +% motivation \begin{slide} {\large\bf - Polytypes of SiC + Polytypes of SiC\\[0.4cm] } - \vspace{4cm} +\includegraphics[width=3.8cm]{cubic_hex.eps}\\ +\begin{minipage}{1.9cm} +{\tiny cubic (twist)} +\end{minipage} +\begin{minipage}{2.9cm} +{\tiny hexagonal (no twist)} +\end{minipage} - \small +\begin{picture}(0,0)(-150,0) + \includegraphics[width=7cm]{polytypes.eps} +\end{picture} + +\vspace{0.6cm} + +\footnotesize \begin{tabular}{l c c c c c c} \hline @@ -275,34 +290,20 @@ Thermal conductivity [W/cmK] & 5.0 & 4.9 & 4.9 & 1.5 & 1.3 & 22 \\ \hline \end{tabular} -{\tiny - Values for $T=300$ K -} - -\begin{picture}(0,0)(-160,-155) - \includegraphics[width=7cm]{polytypes.eps} -\end{picture} -\begin{picture}(0,0)(-10,-185) - \includegraphics[width=3.8cm]{cubic_hex.eps}\\ -\end{picture} -\begin{picture}(0,0)(-10,-175) - {\tiny cubic (twist)} -\end{picture} -\begin{picture}(0,0)(-60,-175) - {\tiny hexagonal (no twist)} -\end{picture} \begin{pspicture}(0,0)(0,0) -\psellipse[linecolor=green](5.7,3.03)(0.4,0.5) +\psellipse[linecolor=green](5.7,2.10)(0.4,0.5) \end{pspicture} \begin{pspicture}(0,0)(0,0) -\psellipse[linecolor=green](5.6,1.68)(0.4,0.2) +\psellipse[linecolor=green](5.6,0.92)(0.4,0.2) \end{pspicture} \begin{pspicture}(0,0)(0,0) -\psellipse[linecolor=red](10.7,1.13)(0.4,0.2) +\psellipse[linecolor=red](10.45,0.45)(0.4,0.2) \end{pspicture} \end{slide} +% fabrication + \begin{slide} {\large\bf @@ -311,110 +312,357 @@ Thermal conductivity [W/cmK] & 5.0 & 4.9 & 4.9 & 1.5 & 1.3 & 22 \\ \small - \vspace{4pt} + \vspace{2pt} - SiC - \emph{Born from the stars, perfected on earth.} - - \vspace{4pt} +\begin{center} + {\color{gray} + \emph{Silicon carbide --- Born from the stars, perfected on earth.} + } +\end{center} - Conventional thin film SiC growth: - \begin{itemize} - \item \underline{Sublimation growth using the modified Lely method} - \begin{itemize} - \item SiC single-crystalline seed at $T=1800 \, ^{\circ} \text{C}$ - \item Surrounded by polycrystalline SiC in a graphite crucible\\ - at $T=2100-2400 \, ^{\circ} \text{C}$ - \item Deposition of supersaturated vapor on cooler seed crystal - \end{itemize} - \item \underline{Homoepitaxial growth using CVD} - \begin{itemize} - \item Step-controlled epitaxy on off-oriented 6H-SiC substrates - \item C$_3$H$_8$/SiH$_4$/H$_2$ at $1100-1500 \, ^{\circ} \text{C}$ - \item Angle, temperature $\rightarrow$ 3C/6H/4H-SiC - \end{itemize} - \item \underline{Heteroepitaxial growth of 3C-SiC on Si using CVD/MBE} - \begin{itemize} - \item Two steps: carbonization and growth - \item $T=650-1050 \, ^{\circ} \text{C}$ - \item SiC/Si lattice mismatch $\approx$ 20 \% - \item Quality and size not yet sufficient - \end{itemize} - \end{itemize} +\vspace{2pt} - \begin{picture}(0,0)(-280,-65) - \includegraphics[width=3.8cm]{6h-sic_3c-sic.eps} - \end{picture} - \begin{picture}(0,0)(-280,-55) - \begin{minipage}{5cm} - {\tiny - NASA: 6H-SiC and 3C-SiC LED\\[-7pt] - on 6H-SiC substrate - } - \end{minipage} - \end{picture} - \begin{picture}(0,0)(-265,-150) - \includegraphics[width=2.4cm]{m_lely.eps} - \end{picture} - \begin{picture}(0,0)(-333,-175) - \begin{minipage}{5cm} - {\tiny - 1. Lid\\[-7pt] - 2. Heating\\[-7pt] - 3. Source\\[-7pt] - 4. Crucible\\[-7pt] - 5. Insulation\\[-7pt] - 6. Seed crystal - } - \end{minipage} - \end{picture} - \begin{picture}(0,0)(-230,-35) - \framebox{ - {\footnotesize\color{blue}\bf Hex: micropipes along c-axis} +SiC thin films by MBE \& CVD +\begin{itemize} + \item Much progress achieved in homo/heteroepitaxial SiC thin film growth + \item \underline{Commercially available} semiconductor power devices based on + \underline{\foreignlanguage{greek}{a}-SiC} + \item Production of favored \underline{3C-SiC} material + \underline{less advanced} + \item Quality and size not yet sufficient +\end{itemize} +\begin{picture}(0,0)(-310,-20) + \includegraphics[width=2.0cm]{cree.eps} +\end{picture} + +\vspace{-0.2cm} + +Alternative approach: +Ion beam synthesis (IBS) of burried 3C-SiC layers in Si\hkl(1 0 0) + +\vspace{0.2cm} + +\scriptsize + +\framebox{ +\begin{minipage}{3.15cm} + \begin{center} +\includegraphics[width=3cm]{imp.eps}\\ + {\tiny + Carbon implantation } - \end{picture} - \begin{picture}(0,0)(-230,-10) - \framebox{ - \begin{minipage}{3cm} - {\footnotesize\color{blue}\bf 3C-SiC fabrication\\ - less advanced} - \end{minipage} + \end{center} +\end{minipage} +\begin{minipage}{3.15cm} + \begin{center} +\includegraphics[width=3cm]{annealing.eps}\\ + {\tiny + \unit[12]{h} annealing at \degc{1200} } - \end{picture} + \end{center} +\end{minipage} +} +\begin{minipage}{5.5cm} + \includegraphics[width=5.8cm]{ibs_3c-sic.eps}\\[-0.2cm] + \begin{center} + {\tiny + XTEM: single crystalline 3C-SiC in Si\hkl(1 0 0) + } + \end{center} +\end{minipage} \end{slide} +% contents + \begin{slide} - {\large\bf - Fabrication of silicon carbide - } +{\large\bf + Systematic investigation of C implantations into Si +} - \small +\vspace{1.7cm} +\begin{center} +\hspace{-1.0cm} +\includegraphics[width=0.75\textwidth]{imp_inv.eps} +\end{center} - Alternative approach: - Ion beam synthesis (IBS) of burried 3C-SiC layers in Si\hkl(1 0 0) - \begin{itemize} - \item \underline{Implantation step 1}\\ - 180 keV C$^+$, $D=7.9\times 10^{17}$ cm$^{-2}$, $T_{\text{i}}=500\,^{\circ}\mathrm{C}$\\ - $\Rightarrow$ box-like distribution of equally sized - and epitactically oriented SiC precipitates - - \item \underline{Implantation step 2}\\ - 180 keV C$^+$, $D=0.6\times 10^{17}$ cm$^{-2}$, $T_{\text{i}}=250\,^{\circ}\mathrm{C}$\\ - $\Rightarrow$ destruction of SiC nanocrystals - in growing amorphous interface layers - \item \underline{Annealing}\\ - $T=1250\,^{\circ}\mathrm{C}$, $t=10\,\text{h}$\\ - $\Rightarrow$ homogeneous, stoichiometric SiC layer - with sharp interfaces - \end{itemize} +\end{slide} + +% outline + +\fi + +\begin{slide} + +{\large\bf + Outline +} + +\vspace{1.7cm} +\begin{center} +\hspace{-1.0cm} +\includegraphics[width=0.75\textwidth]{imp_inv.eps} +\end{center} + +\begin{pspicture}(0,0)(0,0) +\rput(6.0,7.0){\rnode{init}{\psframebox[fillstyle=gradient,gradbegin=white,gradend=red,gradlines=1000,gradmidpoint=0.5,linestyle=none]{ +\begin{minipage}{11cm} +{\color{black}Diploma thesis}\\ + \underline{Monte Carlo} simulation modeling the selforganization process\\ + leading to periodic arrays of nanometric amorphous SiC precipitates +\end{minipage} +}}} +\end{pspicture} +\begin{pspicture}(0,0)(0,0) +\rput(6.0,-0.5){\rnode{init}{\psframebox[fillstyle=gradient,gradbegin=white,gradend=blue,gradmidpoint=0.5,gradlines=1000,linestyle=none]{ +\begin{minipage}{11cm} +{\color{black}Doctoral studies}\\ + Classical potential \underline{molecular dynamics} simulations \ldots\\ + \underline{Density functional theory} calculations \ldots\\[0.2cm] + \ldots on defect formation and SiC precipitation in Si +\end{minipage} +}}} +\end{pspicture} +\begin{pspicture}(0,0)(0,0) +\psellipse[linecolor=red,linewidth=0.05cm](5,3.0)(0.8,1.0) +\end{pspicture} +\begin{pspicture}(0,0)(0,0) +\psellipse[linecolor=blue,linewidth=0.05cm](8.2,3.2)(1.5,1.6) +\end{pspicture} + +\end{slide} + +\begin{slide} + +{\large\bf + Selforganization of nanometric amorphous SiC lamellae +} + +\begin{pspicture}(0,0)(0,0) +\psframebox[fillstyle=gradient,gradbegin=white,gradend=red,gradlines=1000,gradmidpoint=0.5,linestyle=none]{ +\begin{minipage}{14cm} +\hfill +\vspace*{0.5cm} +\end{minipage} +} +\end{pspicture} + +\small + +\vspace{0.2cm} + +\begin{itemize} + \item Regularly spaced, nanometric spherical\\ + and lamellar amorphous inclusions\\ + at the upper a/c interface + \item Carbon accumulation\\ + in amorphous volumes +\end{itemize} + +\vspace{0.4cm} + +\begin{minipage}{12cm} +\includegraphics[width=9cm]{../../nlsop/img/k393abild1_e_l.eps}\\ +{\scriptsize +XTEM bright-field, \unit[180]{keV} C$^+ \rightarrow$ Si, \degc{150}, +Dose: \unit[4.3 $\times 10^{17}$]{cm$^{-2}$} +} +\end{minipage} + +\begin{picture}(0,0)(-182,-215) +\begin{minipage}{6.5cm} +\begin{center} +\includegraphics[width=6.5cm]{../../nlsop/img/eftem.eps}\\[-0.2cm] +{\scriptsize +XTEM bright-field and respective EFTEM C map +} +\end{center} +\end{minipage} +\end{picture} + +\end{slide} + +\end{document} +\ifnum1=0 + +\begin{slide} + +{\large\bf + Model displaying the formation of ordered lamellae +} + +\vspace{0.1cm} + +\begin{center} + \includegraphics[width=8.0cm]{../../nlsop/img/modell_ng_e.eps} +\end{center} + +\footnotesize + +\begin{itemize} +\item Supersaturation of C in c-Si\\ + $\rightarrow$ {\bf Carbon induced} nucleation of spherical + SiC$_x$-precipitates +\item High interfacial energy between 3C-SiC and c-Si\\ + $\rightarrow$ {\bf Amorphous} precipitates +\item \unit[20-- 30]{\%} lower silicon density of a-SiC$_x$ compared to c-Si\\ + $\rightarrow$ {\bf Lateral strain} (black arrows) +\item Implantation range near surface\\ + $\rightarrow$ {\bf Relaxation} of {\bf vertical strain component} +\item Reduction of the carbon supersaturation in c-Si\\ + $\rightarrow$ {\bf Carbon diffusion} into amorphous volumina + (white arrows) +\item Remaining lateral strain\\ + $\rightarrow$ {\bf Strain enhanced} lateral amorphisation +\item Absence of crystalline neighbours (structural information)\\ + $\rightarrow$ {\bf Stabilization} of amorphous inclusions + {\bf against recrystallization} +\end{itemize} + +\end{slide} + +\begin{slide} + +{\large\bf + Implementation of the Monte Carlo code +} + +\small + +\begin{enumerate} + \item \underline{Amorphization / Recrystallization}\\ + Ion collision in discretized target determined by random numbers + distributed according to nuclear energy loss. + Amorphization/recrystallization probability: +\[ +p_{c \rightarrow a}(\vec{r}) = {\color{green} p_b} + {\color{blue} p_c c_C(\vec{r})} + {\color{red} \sum_{\textrm{amorphous neighbours}} \frac{p_s c_C(\vec{r'})}{(r-r')^2}} +\] +\begin{itemize} + \item {\color{green} $p_b$} normal `ballistic' amorphization + \item {\color{blue} $p_c$} carbon induced amorphization + \item {\color{red} $p_s$} stress enhanced amorphization +\end{itemize} +\[ +p_{a \rightarrow c}(\vec r) = (1 - p_{c \rightarrow a}(\vec r)) \Big(1 - \frac{\sum_{direct \, neighbours} \delta (\vec{r'})}{6} \Big) \, \textrm{,} +\] +\[ +\delta (\vec r) = \left\{ +\begin{array}{ll} + 1 & \textrm{if volume at position $\vec r$ is amorphous} \\ + 0 & \textrm{otherwise} \\ +\end{array} +\right. +\] + \item \underline{Carbon incorporation}\\ + Incorporation volume determined according to implantation profile + \item \underline{Diffusion / Sputtering} + \begin{itemize} + \item Transfer fraction of C atoms + of crystalline into neighbored amorphous volumes + \item Remove surface layer + \end{itemize} +\end{enumerate} + +\end{slide} + +\begin{slide} + +\begin{minipage}{3.7cm} +{\large\bf + Results +} + +\footnotesize + +\vspace{1.0cm} + +Evolution of the \ldots +\begin{itemize} + \item continuous\\ + amorphous layer + \item a/c interface + \item lamella precipitates +\end{itemize} +\ldots reproduced!\\[1.5cm] + +{\color{blue} +\begin{center} +Experiment \& simulation\\ +in good agreement\\[1.0cm] + +Simulation is able to model the whole depth region\\[1.0cm] +\end{center} +} + +\end{minipage} +\begin{minipage}{0.4cm} +\vfill +\end{minipage} +\begin{minipage}{8.0cm} + \vspace{-0.2cm} + \includegraphics[width=9cm]{../../nlsop/img/dosis_entwicklung_ng_e_1-2.eps}\\ + \includegraphics[width=9cm]{../../nlsop/img/dosis_entwicklung_ng_e2_2-2.eps} +\end{minipage} + +\end{slide} + +\begin{slide} + +{\large\bf + Structural \& compositional details +} + +\begin{minipage}[t]{7.5cm} +\includegraphics[height=6.5cm]{../../nlsop/img/ac_cconc_ver2_e.eps}\\ +\end{minipage} +\begin{minipage}[t]{5.0cm} +\includegraphics[height=6.5cm]{../../nlsop/img/97_98_e.eps} +\end{minipage} + +\footnotesize + +\vspace{-0.1cm} + +\begin{itemize} + \item Fluctuation of C concentration in lamellae region + \item \unit[8--10]{at.\%} C saturation limit + within the respective conditions + \item Complementarily arranged and alternating sequence of layers\\ + with a high and low amount of amorphous regions + \item C accumulation in the amorphous phase / Origin of stress +\end{itemize} + +\begin{picture}(0,0)(-265,-30) +\framebox{ +\begin{minipage}{3cm} +\begin{center} +{\color{blue} +Precipitation process\\ +gets traceable\\ +by simulation! +} +\end{center} +\end{minipage} +} +\end{picture} + +\end{slide} + + +\end{document} + +% continue here +\fi + +\ifnum1=0 + +\begin{slide} + +{\large\bf + Model displaying the formation of ordered lamellae +} - \begin{minipage}{6.3cm} - \includegraphics[width=6cm]{ibs_3c-sic.eps}\\[-0.2cm] - {\tiny - XTEM micrograph of single crystalline 3C-SiC in Si\hkl(1 0 0) - } - \end{minipage} \framebox{ \begin{minipage}{6.3cm} \begin{center} @@ -431,9 +679,8 @@ Thermal conductivity [W/cmK] & 5.0 & 4.9 & 4.9 & 1.5 & 1.3 & 22 \\ \end{center} \end{minipage} } - -\end{slide} +\end{slide} \begin{slide}