X-Git-Url: https://hackdaworld.org/gitweb/?p=lectures%2Flatex.git;a=blobdiff_plain;f=posic%2Fthesis%2Fintro.tex;fp=posic%2Fthesis%2Fintro.tex;h=3f0eed858176277c35e8901a72e8cff2f7d7a1b6;hp=13ccf5d4ba61f40ede4172791af06ea603c7c3d5;hb=cb6908b0460905b4a567252e29c18146d3359912;hpb=22bbeaa80fc6a1d531f14e0ae11da66ba3a74f9a diff --git a/posic/thesis/intro.tex b/posic/thesis/intro.tex index 13ccf5d..3f0eed8 100644 --- a/posic/thesis/intro.tex +++ b/posic/thesis/intro.tex @@ -7,7 +7,7 @@ Its radiation hardness allows the operation as a first wall material in nuclear The realization of silicon carbide based applications demands for reasonable sized wafers of high crystalline quality. -Despite the tremendous progress achieved in the fabrication of high purity SiC employing techniques like the modified Lely process for bulk crystal growth \cite{tairov78,tsvetkov98} or chemical vapour deposition (CVD) and molecular beam epitaxy (MBE) for homo- and heteroepitaxial growth \cite{}, available wafer dimensions and crystal qualities are not yet considered sufficient enough. +Despite the tremendous progress achieved in the fabrication of high purity SiC employing techniques like the modified Lely process for bulk crystal growth \cite{tairov78,tsvetkov98} or chemical vapour deposition (CVD) and molecular beam epitaxy (MBE) for homo- and heteroepitaxial growth \cite{kimoto93,powell90,mbe_refs}, available wafer dimensions and crystal qualities are not yet considered sufficient enough. New means: Ion beam synthesis (IBS) of burried SiC layers ... \\