X-Git-Url: https://hackdaworld.org/gitweb/?p=lectures%2Flatex.git;a=blobdiff_plain;f=posic%2Fthesis%2Fsic.tex;fp=posic%2Fthesis%2Fsic.tex;h=8625011fa1bdb36120a346ba371e3bbcb402b0cd;hp=f66107dad6580c73bcf2c7954e88fa6ad336c6bc;hb=1de6d05da5be8de10b91e221d1de6580742e93f9;hpb=d02fc9175bf382d3fede6800f667cda3de7528b3 diff --git a/posic/thesis/sic.tex b/posic/thesis/sic.tex index f66107d..8625011 100644 --- a/posic/thesis/sic.tex +++ b/posic/thesis/sic.tex @@ -413,7 +413,7 @@ The precipitation mechanism based on a preceding dumbbell agglomeration as indic \label{fig:sic:db_agglom} \end{figure} The incorporated C atoms form C-Si dumbbells on regular Si lattice sites. -With increasing dose and proceeding time the highly mobile dumbbells agglomerate into large clusters. +With increasing dose and proceeding time, the highly mobile dumbbells agglomerate into large clusters. Finally, when the cluster size reaches a critical radius, the high interfacial energy due to the 3C-SiC/c-Si lattice misfit is overcome and precipitation occurs. Due to the slightly lower silicon density of 3C-SiC, excessive silicon atoms exist, which will most probably end up as self-interstitials in the c-Si matrix since there is more space than in 3C-SiC.