X-Git-Url: https://hackdaworld.org/gitweb/?p=lectures%2Flatex.git;a=blobdiff_plain;f=posic%2Fthesis%2Fsic.tex;h=344856fc7f1438cb8c936207ab3bdbacbf264e96;hp=631f3b7dcd803754994eaf05d965a344d6fb1f9a;hb=92dc54dd081fedc16b79e0b4e451c37f13497220;hpb=ed77f556c402fd6fbef29c3cca23fd9b8b333931 diff --git a/posic/thesis/sic.tex b/posic/thesis/sic.tex index 631f3b7..344856f 100644 --- a/posic/thesis/sic.tex +++ b/posic/thesis/sic.tex @@ -1,28 +1,76 @@ \chapter{Review of the silicon carbon compound} +\label{chapter:sic_rev} -\section{Properties and applications of silicon carbide} +\section{Structure, properties and applications of silicon carbide} -The stoichiometric composition of silicon and carbon termed silicon carbide (SiC) is the only chemical stable compound in the C/Si system \cite{}. +The phase diagram of the C/Si system is shown in figure~\ref{fig:sic:si-c_phase}. +The stoichiometric composition of silicon and carbon termed silicon carbide (SiC) is the only chemical stable compound in the C/Si system \cite{scace59}. +\begin{figure}[ht] +\begin{center} +\includegraphics[width=12cm]{si-c_phase.eps} +\end{center} +\caption[Phase diagram of the C/Si system.]{Phase diagram of the C/Si system \cite{scace59}.} +\label{fig:sic:si-c_phase} +\end{figure} SiC was first discovered by Henri Moissan in 1893 when he observed brilliant sparkling crystals while examining rock samples from a meteor crater in Arizona. He mistakenly identified these crystals as diamond. Although they might have been considered \glqq diamonds from space\grqq{} Moissan identified them as SiC in 1904 \cite{moissan04}. In mineralogy SiC is still referred to as moissanite in honor of its discoverer. It is extremely rare and almost impossible to find in nature. -\subsection{SiC polytypes} - Each of the four sp$^3$ hybridized orbitals of the Si atom overlaps with one of the four sp$^3$ hybridized orbitals of the four surrounding C atoms and vice versa. This results in fourfold coordinated covalent $\sigma$ bonds of equal length and strength for each atom with its neighbours. - Although the local order of Si and C next neighbour atoms characterized by the tetrahedral bonding is the same, more than 250 different types of structures called polytypes of SiC exist \cite{fischer90}. -The polytypes differ in the one-dimensional stacking sequence of identical, closed-packed SiC bilayers. +The polytypes differ in the one-dimensional stacking sequence of identical, close-packed SiC bilayers. +\begin{figure}[ht] +\begin{center} +\includegraphics[width=12cm]{polytypes.eps} +\end{center} +\caption{Stacking sequence of SiC bilayers of the most common polytypes of SiC (from left to right): 3C, 2H, 4H and 6H.} +\label{fig:sic:polytypes} +\end{figure} +Figure~\ref{fig:sic:polytypes} shows the stacking sequence of the most common and technologically most important SiC polytypes, which are the cubic (3C) and hexagonal (2H, 4H and 6H) polytypes. + +\begin{table}[ht] +\begin{center} +\begin{tabular}{l c c c c c c} +\hline +\hline + & 3C-SiC & 4H-SiC & 6H-SiC & Si & GaN & Diamond\\ +\hline +Hardness [Mohs] & \multicolumn{3}{c}{------ 9.6 ------}& 6.5 & - & 10 \\ +Band gap [eV] & 2.36 & 3.23 & 3.03 & 1.12 & 3.39 & 5.5 \\ +Break down field$^{\text{A}}$ [$10^6$ V/cm] & 4 & 3 & 3.2 & 0.6 & 5 & 10 \\ +Saturation drift velocity$^{\text{A}}$ [$10^7$ cm/s] & 2.5 & 2.0 & 2.0 & 1 & 2.7 & 2.7 \\ +Electron mobility$^{\text{B}}$ [cm$^2$/Vs] & 800 & 900 & 400 & 1100 & 900 & 2200 \\ +Hole mobility$^{\text{B}}$ [cm$^2$/Vs] & 320 & 120 & 90 & 420 & 150 & 1600 \\ +Thermal conductivity [W/cmK] & 5.0 & 4.9 & 4.9 & 1.5 & 1.3 & 22 \\ +\hline +\hline +\end{tabular} +\end{center} +\caption[Properties of SiC polytypes and other semiconductor materials.]{Properties of SiC polytypes and other semiconductor materials. Doping concentrations are $10^{16}\text{ cm}^{-3}$ (A) and $10^{17}\text{ cm}^{-3}$ (B) respectively. References: \cite{wesch96,casady96}. {\color{red}Todo: add more refs + check all values!}} +\label{table:sic:properties} +\end{table} +Different polytypes of SiC exhibit different properties. +Some of the key properties are listed in table~\ref{table:sic:properties} and compared to other technologically relevant semiconductor materials. +Despite the low carrier mobilities for low electric fields SiC outperforms Si concerning all other properties. +The wide band gap ... light emitting diodes ... first blue led ... but GaN direct band gap semiconductor ... +However ... combine all electr properties ... high-* .. .devices diodes, inverters ... +break down field and high thermal conductivity ... high-densea and high-power ... +high saturation drift velocity high-frequency ... +Mechanical stability almost like diamond ... +Chemical inert, low neutron capture foobar ... radiation hardness + +Since in this work 3C-SiC unit cell ... two fcc lattices ... + \section{Fabrication of silicon carbide} \section{Ion beam synthesis of cubic silicon carbide} +\section{Substoichiometric concentrations of carbon in crystalline silicon} + \section{Assumed precipitation mechanism of cubic silicon carbide in silicon} \label{section:assumed_prec} -\section{Substoichiometric concentrations of carbon in crystalline silicon} -