X-Git-Url: https://hackdaworld.org/gitweb/?p=lectures%2Flatex.git;a=blobdiff_plain;f=posic%2Fthesis%2Fsic.tex;h=bdd970084fa091d1f304613a9ff5325970a11cda;hp=5f905784cc6dbef8edb2619bc93728fd27f0d021;hb=ab861cbd757aa36afee0ecd21c1d88bc25f36f36;hpb=9c2b792aa2f6e1cedd1fddb4321677eaa9f33c33 diff --git a/posic/thesis/sic.tex b/posic/thesis/sic.tex index 5f90578..bdd9700 100644 --- a/posic/thesis/sic.tex +++ b/posic/thesis/sic.tex @@ -284,7 +284,7 @@ To further improve the interface quality and crystallinity a two-temperature imp To form a narrow, box-like density profile of oriented SiC nanocrystals, \unit[93]{\%} of the total dose of \unit[$8.5\cdot 10^{17}$]{cm$^{-2}$} is implanted at \unit[500]{$^{\circ}$C}. The remaining dose is implanted at \unit[250]{$^{\circ}$C}, which leads to the formation of amorphous zones above and below the SiC precipitate layer and the destruction of SiC nanocrystals within these zones. After annealing for \unit[10]{h} at \unit[1250]{$^{\circ}$C} a homogeneous, stoichiometric SiC layer with sharp interfaces is formed. -Fig. \ref{fig:sic:hrem_sharp} shows the respective high resolution transmission electron microscopy micrographs. +Fig.~\ref{fig:sic:hrem_sharp} shows the respective high resolution transmission electron microscopy micrographs. \begin{figure}[t] \begin{center} \includegraphics[width=0.6\columnwidth]{ibs_3c-sic.eps}