From dc56cec9a5847d36ab5b428e4bfae2ecf8d04767 Mon Sep 17 00:00:00 2001 From: hackbard Date: Sat, 15 Nov 2008 18:51:45 +0100 Subject: [PATCH] ibs anfang --- posic/talks/seminar_2008.tex | 15 ++++++++++----- 1 file changed, 10 insertions(+), 5 deletions(-) diff --git a/posic/talks/seminar_2008.tex b/posic/talks/seminar_2008.tex index 2d2218e..d946ce3 100644 --- a/posic/talks/seminar_2008.tex +++ b/posic/talks/seminar_2008.tex @@ -272,11 +272,16 @@ Die Alternative: Ionenstrahlsynthese \begin{itemize} - \item Implantation: - 180 keV C$^+\rightarrow$ Si, $D=8.5 \times 10^{17}$ cm$^{-2}$, - $T_{\text{i}}=450 \, ^{\circ} \text{C}$ - \item Temperschritt: - $T=1250 \, ^{\circ} \text{C}$, $t=??\text{ h}$ + \item Implantation 1: + 180 keV C$^+\rightarrow$ FZ-Si(100), $D=7.9 \times 10^{17}$ cm$^{-2}$, + $T_{\text{i}}=500 \, ^{\circ} \text{C}$\\ + $\rightarrow$ + \item Implantation 2: + 180 keV C$^+\rightarrow$ FZ-Si(100), $D=0.6 \times 10^{17}$ cm$^{-2}$, + $T_{\text{i}}=250 \, ^{\circ} \text{C}$\\ + $\rightarrow$ + \item Tempern: + $T=1250 \, ^{\circ} \text{C}$, $t=10\text{ h}$ \end{itemize} \end{slide} -- 2.20.1