From ec33d2be4bcdfec43889d3b9cfa7288ea4ec9af7 Mon Sep 17 00:00:00 2001 From: hackbard Date: Sun, 16 Nov 2008 12:49:20 +0100 Subject: [PATCH] ibs start --- posic/talks/seminar_2008.tex | 24 ++++++++++++++++++++---- 1 file changed, 20 insertions(+), 4 deletions(-) diff --git a/posic/talks/seminar_2008.tex b/posic/talks/seminar_2008.tex index d946ce3..600080c 100644 --- a/posic/talks/seminar_2008.tex +++ b/posic/talks/seminar_2008.tex @@ -271,18 +271,34 @@ Die Alternative: Ionenstrahlsynthese + \small + + \begin{minipage}{6cm} \begin{itemize} - \item Implantation 1: - 180 keV C$^+\rightarrow$ FZ-Si(100), $D=7.9 \times 10^{17}$ cm$^{-2}$, + \item Implantation 1:\\ + 180 keV C$^+\rightarrow$ FZ-Si(100)\\ + $D=7.9 \times 10^{17}$ cm$^{-2}$, $T_{\text{i}}=500 \, ^{\circ} \text{C}$\\ $\rightarrow$ - \item Implantation 2: - 180 keV C$^+\rightarrow$ FZ-Si(100), $D=0.6 \times 10^{17}$ cm$^{-2}$, + \item Implantation 2:\\ + 180 keV C$^+\rightarrow$ FZ-Si(100)\\ + $D=0.6 \times 10^{17}$ cm$^{-2}$, $T_{\text{i}}=250 \, ^{\circ} \text{C}$\\ $\rightarrow$ \item Tempern: $T=1250 \, ^{\circ} \text{C}$, $t=10\text{ h}$ \end{itemize} + \end{minipage} + \hspace*{0.3cm} + \begin{minipage}{6cm} + \includegraphics[width=7cm]{ibs_3c-sic.eps} + {\scriptsize + Querschnitts-TEM-Aufnahme einer einkristallinen vergrabenen + 3C-SiC-Schicht.\\ + (a) Hellfeldaufnahme\\ + (b) 3C-SiC(111) Dunkelfeldaufnahme\\ + } + \end{minipage} \end{slide} -- 2.20.1