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ibs start
[lectures/latex.git]
/
posic
/
talks
/
seminar_2008.tex
diff --git
a/posic/talks/seminar_2008.tex
b/posic/talks/seminar_2008.tex
index
d946ce3
..
600080c
100644
(file)
--- a/
posic/talks/seminar_2008.tex
+++ b/
posic/talks/seminar_2008.tex
@@
-271,18
+271,34
@@
Die Alternative: Ionenstrahlsynthese
Die Alternative: Ionenstrahlsynthese
+ \small
+
+ \begin{minipage}{6cm}
\begin{itemize}
\begin{itemize}
- \item Implantation 1:
- 180 keV C$^+\rightarrow$ FZ-Si(100), $D=7.9 \times 10^{17}$ cm$^{-2}$,
+ \item Implantation 1:\\
+ 180 keV C$^+\rightarrow$ FZ-Si(100)\\
+ $D=7.9 \times 10^{17}$ cm$^{-2}$,
$T_{\text{i}}=500 \, ^{\circ} \text{C}$\\
$\rightarrow$
$T_{\text{i}}=500 \, ^{\circ} \text{C}$\\
$\rightarrow$
- \item Implantation 2:
- 180 keV C$^+\rightarrow$ FZ-Si(100), $D=0.6 \times 10^{17}$ cm$^{-2}$,
+ \item Implantation 2:\\
+ 180 keV C$^+\rightarrow$ FZ-Si(100)\\
+ $D=0.6 \times 10^{17}$ cm$^{-2}$,
$T_{\text{i}}=250 \, ^{\circ} \text{C}$\\
$\rightarrow$
\item Tempern:
$T=1250 \, ^{\circ} \text{C}$, $t=10\text{ h}$
\end{itemize}
$T_{\text{i}}=250 \, ^{\circ} \text{C}$\\
$\rightarrow$
\item Tempern:
$T=1250 \, ^{\circ} \text{C}$, $t=10\text{ h}$
\end{itemize}
+ \end{minipage}
+ \hspace*{0.3cm}
+ \begin{minipage}{6cm}
+ \includegraphics[width=7cm]{ibs_3c-sic.eps}
+ {\scriptsize
+ Querschnitts-TEM-Aufnahme einer einkristallinen vergrabenen
+ 3C-SiC-Schicht.\\
+ (a) Hellfeldaufnahme\\
+ (b) 3C-SiC(111) Dunkelfeldaufnahme\\
+ }
+ \end{minipage}
\end{slide}
\end{slide}