+This is not surpsising, since the \hkl<1 0 0> dumbbell is found to be the ground state defect of a C interstitial in c-Si and for the low concentration simulations a carbon interstitial is expected in every fifth silicon unit cell only, thus, excluding defect superposition phenomena.
+The peak distance at 0.186 nm and the bump at 0.175 nm corresponds to the distance $r(3C)$ and $r(1C)$ as listed in table \ref{tab:defects:100db_cmp} and visualized in figure \ref{fig:defects:100db_cmp}.
+In addition it can be easily identified that the \hkl<1 0 0> dumbbell configuration contributes to the peaks at about 0.335 nm, 0.386 nm, 0.434 nm, 0.469 nm and 0.546 nm observed in the $V_1$ simulation.
+Not only the peak locations but also the peak widths and heights become comprehensible.
+The distinct peak at 0.26 nm, which exactly matches the cut-off radius of the Si-C interaction, is again a potential artifact.
+
+For high carbon concentrations, that is the $V_2$ and $V_3$ simulation, the defect concentration is likewiese increased and a considerable amount of damage is introduced in the insertion volume.
+The consequential superposition of these defects and the high amounts of damage generate new displacement arrangements for the C-C as well as for the Si-C pair distances, which become hard to categorize and trace and obviously lead to a broader distribution.
+Short range order indeed is observed but only hardly visible is the long range order.
+This indicates the formation of an amorphous SiC-like phase.
+In fact the resulting Si-C and C-C radial distribution functions compare quite well with these obtained by cascade amorphized and melt-quenched amorphous SiC using a modified Tersoff potential \cite{gao02}.
+
+\subsection{Limitations of conventional MD and short range potentials}
+
+At first the formation of an amorphous SiC-like phase is unexpected since IBS experiments show crystalline 3C-SiC precipitates at prevailing temperatures.
+On closer inspection, however, reasons become clear, which are discussed in the following.
+
+The first reason is a general problem of MD simulations in conjunction with limitations in computer power, which results in a slow and restricted propagation in phase space.
+In molecular systems, characteristic motions take place over a wide range of time scales.
+Vibrations of the covalent bond take place on the order of $10^{-14}\,\text{s}$ of which the thermodynamic and kinetic properties are well described by MD simulations.
+To avoid dicretization errors the integration timestep needs to be chosen smaller than the fastest vibrational frequency in the system.
+On the other hand, infrequent processes, such as conformational changes, reorganization processes during film growth, defect diffusion and phase transitions are processes undergoing long-term evolution in the range of microseconds.
+This is due to the existence of several local minima in the free energy surface separated by large energy barriers compared to the kinetic energy of the particles, that is the system temperature.
+Thus, the average time of a transition from one potential basin to another corresponds to a great deal of vibrational periods, which in turn determine the integration timestep.
+Hence, time scales covering the neccessary amount of infrequent events to observe long-term evolution are not accessible by traditional MD simulations, which are limited to the order of nanoseconds.
+New methods have been developed to bypass the time scale problem like hyperdnyamics (HMD) \cite{voter97,voter97_2}, parallel replica dynamics \cite{voter98}, temperature acclerated dynamics (TAD) \cite{sorensen2000} and self-guided dynamics (SGMD) \cite{wu99} retaining proper thermodynmic sampling.
+
+In addition to the time scale limitation, problems attributed to the short range potential exist.
+The sharp cut-off funtion, which limits the interacting ions to the next neighboured atoms by gradually pushing the interaction force and energy to zero between the first and second next neighbour distance, is responsible for overestimated and unphysical high forces of next neighboured atoms \cite{tang95,mattoni2007}.
+Indeed it is not only the strong C-C bond which is hard to break inhibiting carbon diffusion and further rearrengements.
+This is also true for the low concentration simulations dominated by the occurrence of C-Si dumbbells spread over the whole simulation volume.
+The bonds of these C-Si pairs are also affected by the cut-off artifact preventing carbon diffusion and agglomeration of the dumbbells.
+This can be seen from the almost horizontal progress of the total energy graph in the continuation step, even for the low concentration simulation.
+The unphysical effects inherent to this type of model potentials are solely attributed to their short range character.
+However, since valueable insights into various physical properties can be gained using this potentials, modifications mainly affecting the cut-off were designed.
+One possibility is to simply skip the force contributions containing the derivatives of the cut-off function, which was successfully applied to reproduce the brittle propagation of fracture in SiC at zero temperature \cite{mattoni2007}.
+Another one is to use variable cut-off values scaled by the system volume, which properly describes thermomechanical properties of 3C-SiC \cite{tang95} but might be rather ineffective for the challange inherent to this study.
+
+To conclude the obstacle needed to get passed is twofold.
+The sharp cut-off of the used bond order model potential introduces overestimated high forces between next neighboured atoms enhancing the problem of slow phase space propagation immanent to MD simulations.
+Thus, pushing the time scale to the limits of computational ressources or applying one of the above mentioned accelerated dynamics methods exclusively will not be sufficient enough.
+
+Instead the first approach followed in this study, is the use of higher temperatures as exploited in TAD to find transition pathways of one local energy minimum to another one more quickly.
+Since merely increasing the temperature leads to different equilibrium kinetics than valid at low temperatures, TAD introduces basin-constrained MD allowing only those transitions that should occur at the original temperature and a properly advancing system clock \cite{sorensen2000}.
+The TAD corrections are not applied in coming up simulations.
+This is justified by two reasons.
+First of all a compensation of the overestimated bond strengthes due to the short range potential is expected.
+Secondly there is no conflict applying higher temperatures without the TAD corrections, since crystalline 3C-SiC is also observed for higher temperatures than $450\,^{\circ}\mathrm{C}$ in IBS \cite{lindner01}.
+It is therefore expected that the kinetics affecting the 3C-SiC precipitation are not much different at higher temperatures aside from the fact that it is occuring much more faster.
+Moreover, the interest of this study is focused on structural evolution of a system far from equilibrium instead of equilibrium properties which rely upon proper phase space sampling.
+On the other hand, during implantation, the actual temperature inside the implantation volume is definetly higher than the experimentally determined temperature tapped from the surface of the sample.