\usepackage{acronym}
\acrodef{ALE}{atomic layer epitaxy}
\acrodef{APB}{anti phase boundary}
+\acrodef{c-Si}{crystalline silicon}
\acrodef{CVD}{chemical vapor deposition}
\acrodef{HDTV}{high definition television}
\acrodef{IBS}{ion beam synthesis}
\acrodef{MEMS}{microelectromechanical system}
\acrodef{PVT}{physical vapor transport}
\acrodef{RF}{radio frequency}
-
+\acrodef{RT}{room temeprature}
+\acrodef{RBS}{Rutherford backscattering spectrometry}
+\acrodef{IR}{infrared}
% units
\usepackage{units}