% --------------------------------- references -------------------
-\bibliography{../../bibdb/bibdb}{}
-\bibliographystyle{h-physrev3}
+%\bibliography{../../bibdb/bibdb}{}
+%\bibliographystyle{h-physrev3}
-\end{document}
+\begin{thebibliography}{100}
+
+\bibitem{edgar92}
+J.~H. Edgar,
+\newblock J. Mater. Res. {\bf 7}, 235 (1992).
+
+\bibitem{morkoc94}
+H.~Morko\c{c}, S.~Strite, G.~B. Gao, M.~E. Lin, B.~Sverdlov, and M.~Burns,
+\newblock J. Appl. Phys. {\bf 76}, 1363 (1994).
+
+\bibitem{wesch96}
+W.~Wesch,
+\newblock Nucl. Instrum. Methods Phys. Res. B {\bf 116}, 305 (1996).
+
+\bibitem{capano97}
+M.~A. Capano and R.~J. Trew,
+\newblock MRS Bull. {\bf 22}, 19 (1997).
+
+\bibitem{park98}
+Y.~S. Park,
+\newblock {\em Si{C} Materials and Devices} (Academic Press, San Diego, 1998).
+
+\bibitem{fischer90}
+G.~R. Fisher and P.~Barnes,
+\newblock Philos. Mag. B {\bf 61}, 217 (1990).
+
+\bibitem{powell90}
+J.~A. Powell, D.~J. Larkin, L.~G. Matus, W.~J. Choyke, J.~L. Bradshaw,
+ L.~Henderson, M.~Yoganathan, J.~Yang, and P.~Pirouz,
+\newblock Appl. Phys. Lett. {\bf 56}, 1353 (1990).
+
+\bibitem{fissel95}
+A.~Fissel, U.~Kaiser, E.~Ducke, B.~Schr{\"{o}}ter, and W.~Richter,
+\newblock J. Cryst. Growth {\bf 154}, 72 (1995).
+
+\bibitem{fissel95_apl}
+A.~Fissel, B.~Schr{\"{o}}ter, and W.~Richter,
+\newblock Appl. Phys. Lett. {\bf 66}, 3182 (1995).
+
+\bibitem{nishino83}
+S.~Nishino, J.~A. Powell, and H.~A. Will,
+\newblock Appl. Phys. Lett. {\bf 42}, 460 (1983).
+
+\bibitem{nishino87}
+S.~Nishino, H.~Suhara, H.~Ono, and H.~Matsunami,
+\newblock J. Appl. Phys. {\bf 61}, 4889 (1987).
+
+\bibitem{kitabatake93}
+M.~Kitabatake, M.~Deguchi, and T.~Hirao,
+\newblock J. Appl. Phys. {\bf 74}, 4438 (1993).
+
+\bibitem{borders71}
+J.~A. Borders, S.~T. Picraux, and W.~Beezhold,
+\newblock Appl. Phys. Lett. {\bf 18}, 509 (1971).
+
+\bibitem{lindner99}
+J.~K.~N. Lindner and B.~Stritzker,
+\newblock Nucl. Instrum. Methods Phys. Res. B {\bf 147}, 249 (1999).
+
+\bibitem{lindner01}
+J.~K.~N. Lindner,
+\newblock Nucl. Instrum. Methods Phys. Res. B {\bf 178}, 44 (2001).
+
+\bibitem{lindner02}
+J.~K.~N. Lindner,
+\newblock Appl. Phys. A {\bf 77}, 27 (2003).
+
+\bibitem{lindner99_2}
+J.~K.~N. Lindner and B.~Stritzker,
+\newblock Nucl. Instrum. Methods Phys. Res. B {\bf 148}, 528 (1999).
+
+\bibitem{werner96}
+P.~Werner, R.~K{\"{o}}gler, W.~Skorupa, and D.~Eichler,
+\newblock in {\em Proceedings of the 11th International Conference on Ion Implantation Technology}, pp. 675--678, 1996.
+
+\bibitem{werner97}
+P.~Werner, S.~Eichler, G.~Mariani, R.~K{\"{o}}gler, and W.~Skorupa,
+\newblock Appl. Phys. Lett. {\bf 70}, 252 (1997).
+
+\bibitem{eichhorn99}
+F.~Eichhorn, N.~Schell, W.~Matz, and R.~K{\"{o}}gler,
+\newblock J. Appl. Phys. {\bf 86}, 4184 (1999).
+
+\bibitem{koegler03}
+R.~K{\"{o}}gler, F.~Eichhorn, J.~R. Kaschny, A.~M{\"{u}}cklich, H.~Reuther,
+ W.~Skorupa, C.~Serre, and A.~Perez-Rodriguez,
+\newblock Appl. Phys. A: Mater. Sci. Process. {\bf 76}, 827 (2003).
+
+\bibitem{strane94}
+J.~W. Strane, H.~J. Stein, S.~R. Lee, S.~T. Picraux, J.~K. Watanabe, and J.~W.
+ Mayer,
+\newblock J. Appl. Phys. {\bf 76}, 3656 (1994).
+
+\bibitem{guedj98}
+C.~Guedj, M.~W. Dashiell, L.~Kulik, J.~Kolodzey, and A.~Hairie,
+\newblock J. Appl. Phys. {\bf 84}, 4631 (1998).
+
+\bibitem{nejim95}
+A.~Nejim, P.~L.~F. Hemment, and J.~Stoemenos,
+\newblock Appl. Phys. Lett. {\bf 66}, 2646 (1995).
+
+\bibitem{strane96}
+J.~W. Strane, S.~R. Lee, H.~J. Stein, S.~T. Picraux, J.~K. Watanabe, and J.~W.
+ Mayer,
+\newblock J. Appl. Phys. {\bf 79}, 637 (1996).
+
+\bibitem{laveant2002}
+P.~Lav\'eant, G.~Gerth, P.~Werner, and U.~G{\"{o}}sele,
+\newblock Mater. Sci. Eng., B {\bf 89}, 241 (2002).
+
+\bibitem{bar-yam84}
+Y.~Bar-Yam and J.~D. Joannopoulos,
+\newblock Phys. Rev. Lett. {\bf 52}, 1129 (1984).
+
+\bibitem{bar-yam84_2}
+Y.~Bar-Yam and J.~D. Joannopoulos,
+\newblock Phys. Rev. B {\bf 30}, 1844 (1984).
+
+\bibitem{car84}
+R.~Car, P.~J. Kelly, A.~Oshiyama, and S.~T. Pantelides,
+\newblock Phys. Rev. Lett. {\bf 52}, 1814 (1984).
+
+\bibitem{batra87}
+I.~P. Batra, F.~F. Abraham, and S.~Ciraci,
+\newblock Phys. Rev. B {\bf 35}, 9552 (1987).
+
+\bibitem{bloechl93}
+P.~E. Bl{\"o}chl, E.~Smargiassi, R.~Car, D.~B. Laks, W.~Andreoni, and S.~T.
+ Pantelides,
+\newblock Phys. Rev. Lett. {\bf 70}, 2435 (1993).
+
+\bibitem{tang97}
+M.~Tang, L.~Colombo, J.~Zhu, and T.~D. de~la Rubia,
+\newblock Phys. Rev. B {\bf 55}, 14279 (1997).
+
+\bibitem{leung99}
+W.-K. Leung, R.~J. Needs, G.~Rajagopal, S.~Itoh, and S.~Ihara,
+\newblock Phys. Rev. Lett. {\bf 83}, 2351 (1999).
+
+\bibitem{colombo02}
+L.~Colombo,
+\newblock Annu. Rev. Mater. Res. {\bf 32}, 271 (2002).
+
+\bibitem{goedecker02}
+S.~Goedecker, T.~Deutsch, and L.~Billard,
+\newblock Phys. Rev. Lett. {\bf 88}, 235501 (2002).
+
+\bibitem{al-mushadani03}
+O.~K. Al-Mushadani and R.~J. Needs,
+\newblock Phys. Rev. B {\bf 68}, 235205 (2003).
+
+\bibitem{hobler05}
+G.~Hobler and G.~Kresse,
+\newblock Mater. Sci. Eng., B {\bf 124-125}, 368 (2005).
+
+\bibitem{sahli05}
+B.~Sahli and W.~Fichtner,
+\newblock Phys. Rev. B {\bf 72}, 245210 (2005).
+
+\bibitem{posselt08}
+M.~Posselt, F.~Gao, and H.~Bracht,
+\newblock Phys. Rev. B {\bf 78}, 035208 (2008).
+
+\bibitem{ma10}
+S.~Ma and S.~Wang,
+\newblock Phys. Rev. B {\bf 81}, 193203 (2010).
+
+\bibitem{mazzarolo01}
+M.~Mazzarolo, L.~Colombo, G.~Lulli, and E.~Albertazzi,
+\newblock Phys. Rev. B {\bf 63}, 195207 (2001).
+
+\bibitem{holmstroem08}
+E.~Holmstr{\"o}m, A.~Kuronen, and K.~Nordlund,
+\newblock Phys. Rev. B {\bf 78}, 045202 (2008).
+
+\bibitem{tersoff90}
+J.~Tersoff,
+\newblock Phys. Rev. Lett. {\bf 64}, 1757 (1990).
+
+\bibitem{dal_pino93}
+A.~{Dal Pino}, A.~M. Rappe, and J.~D. Joannopoulos,
+\newblock Phys. Rev. B {\bf 47}, 12554 (1993).
+
+\bibitem{capaz94}
+R.~B. Capaz, A.~{Dal Pino}, and J.~D. Joannopoulos,
+\newblock Phys. Rev. B {\bf 50}, 7439 (1994).
+
+\bibitem{burnard93}
+M.~J. Burnard and G.~G. DeLeo,
+\newblock Phys. Rev. B {\bf 47}, 10217 (1993).
+
+\bibitem{leary97}
+P.~Leary, R.~Jones, S.~{\"O}berg, and V.~J.~B. Torres,
+\newblock Phys. Rev. B {\bf 55}, 2188 (1997).
+
+\bibitem{capaz98}
+R.~B. Capaz, A.~{Dal Pino}, and J.~D. Joannopoulos,
+\newblock Phys. Rev. B {\bf 58}, 9845 (1998).
+
+\bibitem{zhu98}
+J.~Zhu,
+\newblock Comput. Mater. Sci. {\bf 12}, 309 (1998).
+
+\bibitem{mattoni2002}
+A.~Mattoni, F.~Bernardini, and L.~Colombo,
+\newblock Phys. Rev. B {\bf 66}, 195214 (2002).
+
+\bibitem{park02}
+S.~Y. Park, J.~D'Arcy-Gall, D.~Gall, J.~A. N.~T. Soares, Y.-W. Kim, H.~Kim,
+ P.~Desjardins, J.~E. Greene, and S.~G. Bishop,
+\newblock J. Appl. Phys. {\bf 91}, 5716 (2002).
+
+\bibitem{jones04}
+R.~Jones, B.~J. Coomer, and P.~R. Briddon,
+\newblock J. Phys.: Condens. Matter {\bf 16}, S2643 (2004).
+
+\bibitem{chirita97}
+V.~Chirita, L.~Hultman, and L.~R. Wallenberg,
+\newblock Thin Solid Films {\bf 294}, 47 (1997).
+
+\bibitem{cicero02}
+G.~Cicero, L.~Pizzagalli, and A.~Catellani,
+\newblock Phys. Rev. Lett. {\bf 89}, 156101 (2002).
+
+\bibitem{pizzagalli03}
+L.~Pizzagalli, G.~Cicero, and A.~Catellani,
+\newblock Phys. Rev. B {\bf 68}, 195302 (2003).
+
+\bibitem{bockstedte03}
+M.~Bockstedte, A.~Mattausch, and O.~Pankratov,
+\newblock Phys. Rev. B {\bf 68}, 205201 (2003).
+
+\bibitem{rauls03a}
+E.~Rauls, T.~Frauenheim, A.~Gali, and P.~De\'ak,
+\newblock Phys. Rev. B {\bf 68}, 155208 (2003).
+
+\bibitem{gao04}
+F.~Gao, W.~J. Weber, M.~Posselt, and V.~Belko,
+\newblock Phys. Rev. B {\bf 69}, 245205 (2004).
+
+\bibitem{posselt06}
+M.~Posselt, F.~Gao, and W.~J. Weber,
+\newblock Phys. Rev. B {\bf 73}, 125206 (2006).
+
+\bibitem{gao07}
+F.~Gao, J.~Du, E.~J. Bylaska, M.~Posselt, and W.~J. Weber,
+\newblock Appl. Phys. Lett. {\bf 90}, 221915 (2007).
+
+\bibitem{stillinger85}
+F.~H. Stillinger and T.~A. Weber,
+\newblock Phys. Rev. B {\bf 31}, 5262 (1985).
+
+\bibitem{brenner90}
+D.~W. Brenner,
+\newblock Phys. Rev. B {\bf 42}, 9458 (1990).
+
+\bibitem{tersoff_si3}
+J.~Tersoff,
+\newblock Phys. Rev. B {\bf 38}, 9902 (1988).
+
+\bibitem{bazant96}
+M.~Z. Bazant and E.~Kaxiras,
+\newblock Phys. Rev. Lett. {\bf 77}, 4370 (1996).
+
+\bibitem{bazant97}
+M.~Z. Bazant, E.~Kaxiras, and J.~F. Justo,
+\newblock Phys. Rev. B {\bf 56}, 8542 (1997).
+
+\bibitem{justo98}
+J.~F. Justo, M.~Z. Bazant, E.~Kaxiras, V.~V. Bulatov, and S.~Yip,
+\newblock Phys. Rev. B {\bf 58}, 2539 (1998).
+
+\bibitem{balamane92}
+H.~Balamane, T.~Halicioglu, and W.~A. Tiller,
+\newblock Phys. Rev. B {\bf 46}, 2250 (1992).
+
+\bibitem{huang95}
+H.~Huang, N.~M. Ghoniem, J.~K. Wong, and M.~Baskes,
+\newblock Modell. Simul. Mater. Sci. Eng. {\bf 3}, 615 (1995).
+
+\bibitem{godet03}
+J.~Godet, L.~Pizzagalli, S.~Brochard, and P.~Beauchamp,
+\newblock J. Phys.: Condens. Matter {\bf 15}, 6943 (2003).
+
+\bibitem{lucas10}
+G.~Lucas, M.~Bertolus, and L.~Pizzagalli,
+\newblock J. Phys.: Condens. Matter {\bf 22}, 035802 (2010).
+
+\bibitem{tersoff_m}
+J.~Tersoff,
+\newblock Phys. Rev. B {\bf 39}, 5566 (1989).
+
+\bibitem{gao02}
+F.~Gao and W.~J. Weber,
+\newblock Nucl. Instrum. Methods Phys. Res. B {\bf 191}, 487 (2002).
+
+\bibitem{albe_sic_pot}
+P.~Erhart and K.~Albe,
+\newblock Phys. Rev. B {\bf 71}, 035211 (2005).
+
+\bibitem{mattoni2007}
+A.~{Mattoni}, M.~{Ippolito}, and L.~{Colombo},
+\newblock Phys. Rev. B {\bf 76}, 224103 (2007).
+
+\bibitem{zirkelbach10}
+F.~Zirkelbach, B.~Stritzker, K.~Nordlund, J.~K.~N. Lindner, W.~G. Schmidt, and
+ E.~Rauls,
+\newblock Phys. Rev. B {\bf 82}, 094110 (2010).
+
+\bibitem{kresse96}
+G.~Kresse and J.~Furthm{\"{u}}ller,
+\newblock Comput. Mater. Sci. {\bf 6}, 15 (1996).
+
+\bibitem{perdew86}
+J.~P. Perdew and Y.~Wang,
+\newblock Phys. Rev. B {\bf 33}, 8800 (1986).
+
+\bibitem{perdew92}
+J.~P. Perdew, J.~A. Chevary, S.~H. Vosko, K.~A. Jackson, M.~R. Pederson, D.~J.
+ Singh, and C.~Fiolhais,
+\newblock Phys. Rev. B {\bf 46}, 6671 (1992).
+
+\bibitem{hamann79}
+D.~R. Hamann, M.~Schl{\"u}ter, and C.~Chiang,
+\newblock Phys. Rev. Lett. {\bf 43}, 1494 (1979).
+
+\bibitem{vanderbilt90}
+D.~Vanderbilt,
+\newblock Phys. Rev. B {\bf 41}, 7892 (1990).
+
+\bibitem{berendsen84}
+H.~J.~C. Berendsen, J.~P.~M. Postma, W.~F. van Gunsteren, A.~DiNola, and J.~R.
+ Haak,
+\newblock J. Chem. Phys. {\bf 81}, 3684 (1984).
+
+\bibitem{verlet67}
+L.~Verlet,
+\newblock Phys. Rev. {\bf 159}, 98 (1967).
+
+\bibitem{kaukonen98}
+M.~Kaukonen, P.~K. Sitch, G.~Jungnickel, R.~M. Nieminen, S.~P{\"o}ykk{\"o},
+ D.~Porezag, and T.~Frauenheim,
+\newblock Phys. Rev. B {\bf 57}, 9965 (1998).
+
+\bibitem{watkins76}
+G.~D. Watkins and K.~L. Brower,
+\newblock Phys. Rev. Lett. {\bf 36}, 1329 (1976).
+
+\bibitem{song90}
+L.~W. Song and G.~D. Watkins,
+\newblock Phys. Rev. B {\bf 42}, 5759 (1990).
+
+\bibitem{zirkelbach09}
+F.~Zirkelbach, J.~K.~N. Lindner, K.~Nordlund, and B.~Stritzker,
+\newblock Mater. Sci. Eng., B {\bf 159-160}, 149 (2009).
+
+\bibitem{lindner06}
+J.~K.~N. Lindner, M.~H{\"a}berlen, G.~Thorwarth, and B.~Stritzker,
+\newblock Mater. Sci. Eng., C {\bf 26}, 857 (2006).
+
+\bibitem{tipping87}
+A.~K. Tipping and R.~C. Newman,
+\newblock Semicond. Sci. Technol. {\bf 2}, 315 (1987).
+
+\bibitem{song90_2}
+L.~W. Song, X.~D. Zhan, B.~W. Benson, and G.~D. Watkins,
+\newblock Phys. Rev. B {\bf 42}, 5765 (1990).
+
+\bibitem{liu02}
+C.-L. Liu, W.~Windl, L.~Borucki, S.~Lu, and X.-Y. Liu,
+\newblock Appl. Phys. Lett. {\bf 80}, 52 (2002).
+
+\bibitem{voter97}
+A.~F. Voter,
+\newblock Phys. Rev. Lett. {\bf 78}, 3908 (1997).
+
+\bibitem{voter97_2}
+A.~F. Voter,
+\newblock J. Chem. Phys. {\bf 106}, 4665 (1997).
+
+\bibitem{voter98}
+A.~F. Voter,
+\newblock Phys. Rev. B {\bf 57}, R13985 (1998).
+
+\bibitem{sorensen2000}
+M.~R. S{\o }rensen and A.~F. Voter,
+\newblock J. Chem. Phys. {\bf 112}, 9599 (2000).
+
+\bibitem{wu99}
+X.~Wu and S.~Wang,
+\newblock J. Chem. Phys. {\bf 110}, 9401 (1999).
+
+\bibitem{tang95}
+M.~Tang and S.~Yip,
+\newblock Phys. Rev. B {\bf 52}, 15150 (1995).
+
+\bibitem{kimura82}
+T.~Kimura, S.~Kagiyama, and S.~Yugo,
+\newblock Thin Solid Films {\bf 94}, 191 (1982).
+
+\bibitem{eichhorn02}
+F.~Eichhorn, N.~Schell, A.~M{\"{u}}cklich, H.~Metzger, W.~Matz, and
+ R.~K{\"{o}}gler,
+\newblock J. Appl. Phys. {\bf 91}, 1287 (2002).
+
+\bibitem{deguchi92}
+M.~Deguchi, M.~Kitabatake, T.~Hirao, N.~Arai, and T.~Izumi,
+\newblock Japanese J. Appl. Phys. {\bf 31}, 343 (1992).
+
+\bibitem{strane93}
+J.~W. Strane, H.~J. Stein, S.~R. Lee, B.~L. Doyle, S.~T. Picraux, and J.~W.
+ Mayer,
+\newblock Appl. Phys. Lett. {\bf 63}, 2786 (1993).
+
+\end{thebibliography}
+
+\end{document}