+\section{Summary and conclusion}
+
+\begin{thebibliography}{20}
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+\bibitem{lamellar_inclusions} J. K. N. Lindner, M. Häberlen, M. Schmidt, W. Attenberger, B. Stritzker, Nucl. Instr. Meth. B 186 (2002) 206.
+\bibitem{model_joerg} J. K. N. Lindner, Nucl. Instr. Meth. B 178 (2001) 44.
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+\bibitem{eftem_maik} M. Häberlen, Bildung und Ausheilverhalten nanometrischer amorpher Einschlüsse in Kohlenstoff-implantierten Silizium, Diploma thesis, Augsburg, 2002 (in Germany).
+\bibitem{si_dens1} L. L. Horton, J. Bentley, L. Romana, A. Perez, C. J. McHargue, J. C. McCallum, Nucl. Instr. Meth. B 65 (1992) 345.
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+\end{thebibliography}
+
+\newpage
+
+\section*{Figure Captions}
+
+\begin{enumerate}
+\item Cross-sectional transmission electron microscopy (XTEM) image of a $Si(100)$ sample implanted with $180 \, keV$ $C^+$ ions at a fluence of $4.3 \times 10^{17} \, cm^{-2}$ and a substrate temperature of $150 \, ^{\circ} \mathrm{C}$. Lamellar and spherical amorphous inclusions at the interface of the continuous amorphous layer are marked by L and S.
+\item Schematic explaining the selforganization of amorphous $SiC_x$ precipitates and the evolution into ordered lamellae with increasing fluence (see text).
+\item Comparison of simulation results and XTEM images ($180 \, keV$ $C^+$ implantation into silicon at $150 \, ^{\circ} mathrm{C}$) for several fluence. Amorphous cells are white. Simulation parameters: $p_b=0.01$, $p_c=0.001$, $p_s=0.0001$, $d_r=0.05$, $d_v=1 \times 10^6$.
+\item Amorphous cell distribution and corresponding carbon implantation profile. The implantation profile shows the mean amount of carbon in amorphous and crystalline volumes as well as the sum for a fluence of $4.3 \times 10^{17} \, cm^{-2}$.
+\item Simulation result for a $2 \, MeV$ $C^+$ irradiation into silicon doped with $10 \, at. \%$ carbon by multiple implantation steps between $180$ and $10 \, keV$. $20 \times 10^6$ simulation steps correspond to a fluence of $0.54 \times 10^{17} \, cm^{-2}$.
+\end{enumerate}
+
+\newpage
+\section*{Figures}
+
+\begin{figure}[!h]
+\begin{center}
+\includegraphics[width=14cm]{k393abild1_e.eps}
+\caption[foo]{}
+\end{center}
+\label{img:tem}
+\end{figure}
+
+\newpage
+\begin{figure}[!h]
+\begin{center}
+\includegraphics[width=14cm]{modell_ng_e.eps}
+\caption[foo]{}
+\end{center}
+\label{img:model}
+\end{figure}
+
+\newpage
+\begin{figure}[!h]
+\begin{center}
+\includegraphics[width=14cm]{dosis_entwicklung_all_e.eps}
+\caption[foo]{}
+\end{center}
+\label{img:dose_cmp}
+\end{figure}
+
+\newpage
+\begin{figure}[!h]
+\begin{center}
+\includegraphics[width=14cm]{ac_cconc_ver2_e.eps}
+\caption[foo]{}
+\end{center}
+\label{img:carbon_distr}
+\end{figure}
+
+\newpage
+\begin{figure}[!h]
+\begin{center}
+\includegraphics[width=14cm]{multiple_impl_e.eps}
+\caption[foo]{}
+\end{center}
+\label{img:broad_lam}
+\end{figure}