% ------ Albe potential ---------
For the classical potential calculations, defect structures were modeled in a supercell of nine Si lattice constants in each direction consisting of 5832 Si atoms.
Reproducing the SiC precipitation was attempted by the successive insertion of 6000 C atoms (the number necessary to form a 3C-SiC precipitate with a radius of $\approx 3.1$ nm) into the Si host, which has a size of 31 Si unit cells in each direction consisting of 238328 Si atoms.
-At constant temperature 10 atoms are inserted at a time.
-Three different regions within the total simulation volume are considered for a statistically distributed insertion of the C atoms: $V_1$ corresponding to the total simulation volume, $V_2$ corresponding to the size of the precipitate and $V_3$, whih holds the necessary amount of Si atoms of the precipitate.
+At constant temperature 10 atoms were inserted at a time.
+Three different regions within the total simulation volume were considered for a statistically distributed insertion of the C atoms: $V_1$ corresponding to the total simulation volume, $V_2$ corresponding to the size of the precipitate and $V_3$, whih holds the necessary amount of Si atoms of the precipitate.
+After C insertion the simulation has been continued for \unit[100]{ps} and cooled down to \unit[20]{$^{\circ}$C} afterwards.
A Tersoff-like bond order potential by Erhart and Albe (EA)\cite{albe_sic_pot} has been utilized, which accounts for nearest neighbor interactions only realized by a cut-off function dropping the interaction to zero in between the first and second next neighbor distance.
The potential was used as is, i.e. without any repulsive potential extension at short interatomic distances.
Constant pressure simulations are realized by the Berendsen barostat\cite{berendsen84} using a time constant of \unit[100]{fs} and a bulk modulus of \unit[100]{GPa} for Si.
For structural relaxation of defect structures the same algorith is used with the temperature set to 0 K.
The formation energy $E-N_{\text{Si}}\mu_{\text{Si}}-N_{\text{C}}\mu_{\text{C}}$ of a defect configuration is defined by chosing SiC as a particle reservoir for the C impurity, i.e. the chemical potentials are determined by the cohesive energies of a perfect Si and SiC supercell after ionic relaxation.
-Migration and recombination pathways have been investigated utilizing the constraint conjugate gradient relaxation technique (CRT)\cite{kaukonen98}.
-The binding energy of a defect pair is given by the difference of the formation energy of the complex and the sum of the two separated defect configurations.
-Accordingly, energetically favorable configurations show binding energies below zero while non-interacting isolated defects result in a binding energy of zero.
+Migration and recombination pathways have been investigated utilizing the constraint conjugate gradient relaxation technique\cite{kaukonen98}.
\section{Results}
This is particularly important since the energy of formation of C$_{\text{s}}$ is drastically underestimated by the EA potential.
A possible occurence of C$_{\text{s}}$ could then be attributed to a lower energy of formation of the C$_{\text{s}}$-Si$_{\text{i}}$ combination due to the low formation energy of C$_{\text{s}}$, which obviously is wrong.
-WEITER: while si 110 for qm, also tet has to be checkd as a combo with Cs.
-The results are summarized in Table.
-However, ...
+Since quantum-mechanical calculation reveal the Si$_{\text{i}}$ \hkl<1 1 0> DB as the ground state configuration of Si$_{\text{i}}$ in Si it is assumed to provide the energetically most favorable configuration in combination with C$_{\text{s}}$.
+Empirical potentials, however, predict Si$_{\text{i}}$ T to be the energetically most favorable configuration.
+Thus, investigations of the relative energies of formation of defect pairs need to include combinations of C$_{\text{s}}$ with Si$_{\text{i}}$ T.
+Results of VASP and EA calculations are summarized in Table~\ref{tab:defect_combos}.
+\begin{table}
+\begin{ruledtabular}
+\begin{tabular}{l c c c}
+ & C$_{\text{i}}$ \hkl<1 0 0> & C$_{\text{s}}$ \& Si$_{\text{i}}$ \hkl<1 1 0> & C$_{\text{s}}$ \& Si$_{\text{i}}$ T\\
+\hline
+ VASP & 3.72 & 4.37 & - \\
+ Erhart/Albe & 3.88 & 4.93 & 5.25$^{\text{a}}$/5.08$^{\text{b}}$/4.43$^{\text{c}}$
+\end{tabular}
+\end{ruledtabular}
+\caption{Formation energies of defect configurations of a single C impurity in otherwise perfect c-Si determined by classical potential and ab initio methods. The formation energies are given in electron volt. T denotes the tetrahedral and the subscripts i and s indicate the interstitial and substitutional configuration. Superscripts a, b and c denote configurations of C$_{\text{s}}$ located at the first, second and third next neighbored lattice site with respect to the Si$_{\text{i}}$ atom.}
+\label{tab:defect_combos}
+\end{table}
+Obviously the EA potential properly describes the relative energies of formation.
+Combined structures of C$_{\text{s}}$ and Si$_{\text{i}}$ T are energetically less favorable than the ground state C$_{\text{i}}$ \hkl<1 0 0> DB configuration.
+With increasing separation distance the enrgies of formation decrease.
+However, even for non-interacting defects, the energy of formation, which is then given by the sum of the formation energies of the separated defects (\unit[4.15]{eV}) is still higher than that of the C$_{\text{i}}$ \hkl<1 0 0> DB.
+Unexpectedly, the structure of a Si$_{\text{i}}$ \hkl<1 1 0> DB and a next neighbored C$_{\text{s}}$, which is the most favored configuration of C$_{\text{s}}$ and Si$_{\text{i}}$ according to quantum-mechanical caluclations\cite{zirkelbach10b} likewise constitutes an energetically favorable configuration within the EA description, which is even preferred over the two least separated configurations of C$_{\text{s}}$ and Si$_{\text{i}}$ T.
+This is attributed to an effective reduction in strain enabled by the respective combination.
+Thus, a proper description with respect to the relative energies of formation is assumed for the EA potential.
+
+\subsection{Carbon mobility}
+\label{subsection:cmob}
+
+To accurately model the SiC precipitation, which involves the agglomeration of C, a proper description of the migration process of the C impurity is required.
+As shown in a previous study\cite{zirkelbach10a} quantum-mechanical results properly describe the C$_{\text{i}}$ \hkl<1 0 0> DB diffusion resulting in a migration barrier height of \unit[0.90]{eV} excellently matching experimental values of \unit[0.70-0.87]{eV}\cite{lindner06,tipping87,song90} and, for this reason, reinforcing the respective migration path as already proposed by Capaz et~al.\cite{capaz94}.
+During transition a C$_{\text{i}}$ \hkl[0 0 -1] DB migrates towards a C$_{\text{i}}$ \hkl[0 -1 0] DB located at the next neighbored lattice site in \hkl[1 1 -1] direction.
+However, it turned out that the description fails if the EA potential is used, which overestimates the migration barrier (\unit[2.2]{eV}) by a factor of 2.4.
+In addition a different diffusion path is found to exhibit the lowest migration barrier.
+A C$_{\text{i}}$ \hkl[0 0 -1] DB turns into the \hkl[0 0 1] configuration at the next neighbored lattice site.
+The transition involves the C$_{\text{i}}$ BC configuration, which, however, was found to be unstable relaxing into the C$_{\text{i}}$ \hkl<1 1 0> DB configuration.
+If the migration is considered to occur within a single step the kinetic energy of \unit[2.2]{eV} is enough to turn the \hkl<1 0 0> DB into the BC and back into a \hkl<1 0 0> DB configuration.
+If, on the other hand, a two step process is assumed the BC configuration will most probably relax into the C$_{\text{i}}$ \hkl<1 1 0> DB configuration resulting in different relative energies of the intermediate state and the saddle point.
+For the latter case a migration path, which involves a C$_{\text{i}}$ \hkl<1 1 0> DB configuration is proposed and displayed in Fig.~\ref{fig:mig}.
+\begin{figure}
+\begin{center}
+\includegraphics[width=\columnwidth]{110mig.ps}
+\end{center}
+\caption{Migration barrier and structures of the \hkl[0 0 -1] DB (left) to the \hkl[0 -1 0] DB (right) transition involving the \hkl[1 1 0] DB (center) configuration.}
+\label{fig:mig}
+\end{figure}
+Approximately \unit[2.24]{eV} are needed to turn the C$_{\text{i}}$ \hkl[0 0 -1] DB into the C$_{\text{i}}$ \hkl[1 1 0] DB located at the next neighbored lattice site in \hkl[1 1 -1] direction.
+Another barrier of \unit[0.90]{eV} exists for the rotation into the C$_{\text{i}}$ \hkl[0 -1 0] DB configuration.
+Roughly the same amount would be necessary to excite the C$_{\text{i}}$ \hkl[1 1 0] DB to the BC configuration (\unit[0.40]{eV}) and a successive migration into the \hkl[0 0 1] DB configuration (\unit[0.50]{eV}) as displayed in our previous study\cite{zirkelbach10a}.
+The former diffusion process, however, would more nicely agree to the ab initio path, since the migration is accompanied by a rotation of the DB orientation.
+By considering a two step process and assuming equal preexponential factors for both diffusion steps, the probability of the total diffusion event is given by $\exp(\frac{\unit[2.24]{eV}+\unit[0.90]{eV}}{k_{\text{B}}T})$, which corresponds to a single diffusion barrier that is 3.5 times higher than the barrier obtained by ab initio calculations.
-\subsection{Mobility}
+Accordingly the effective barrier of migration of C$_{\text{i}}$ is overestimated by a factor of 2.4 to 3.5 compared to the highly accurate quantum-mechanical methods.
+This constitutes a serious limitation that has to be taken into account for modeling the C-Si system using the EA potential.
-A measure for the mobility of the interstitial carbon is the activation energy for the migration path from one stable position to another.
-The stable defect geometries have been discussed in the previous subsection.
-In the following the migration of the most stable configuration, i.e. C$_{\text{i}}$, from one site of the Si host lattice to a neighboring site has been investigated by both, EA and DFT calculations utilizing the constraint conjugate gradient relaxation technique (CRT)\cite{kaukonen98}.
-Three migration pathways are investigated.
-The starting configuration for all pathways was the \hkl[0 0 -1] dumbbell interstitial configuration.
-In path~1 and 2 the final configuration is a \hkl[0 0 1] and \hkl[0 -1 0] dumbbell interstitial respectively, located at the next neighbored Si lattice site displaced by $\frac{a_{\text{Si}}}{4}\hkl[1 1 -1]$, where $a_{\text{Si}}$ is the Si lattice constant.
-In path~1 the C atom resides in the \hkl(1 1 0) plane crossing the BC configuration whereas in path~2 the C atom moves out of the \hkl(1 1 0) plane.
-Path 3 ends in a \hkl[0 -1 0] configuration at the initial lattice site and, for this reason, corresponds to a reorientation of the dumbbell, a process not contributing to long range diffusion.
+\subsection{Molecular dynamics simulations}
+Fig.~\ref{fig:450} shows the radial distribution functions of simulations, in which C was inserted at \unit[450]{$^{\circ}$C}, an operative and efficient temperature in IBS, for all three insertion volumes.
\begin{figure}
\begin{center}
-\includegraphics[width=\columnwidth]{path2_vasp_s.ps}
+\includegraphics[width=\columnwidth]{../img/sic_prec_450_si-si_c-c.ps}\\
+\includegraphics[width=\columnwidth]{../img/sic_prec_450_si-c.ps}
\end{center}
-\caption{Migration barrier and structures of the \hkl[0 0 -1] dumbbell (left) to the \hkl[0 -1 0] dumbbell (right) transition as obtained by first-principles methods. The activation energy of \unit[0.9]{eV} agrees well with experimental findings of \unit[0.70]{eV}\cite{lindner06}, \unit[0.73]{eV}\cite{song90} and \unit[0.87]{eV}\cite{tipping87}.}
-\label{fig:vasp_mig}
-\end{figure}
-The lowest energy path (path~2) as detected by the first-principles approach is illustrated in Fig.~\ref{fig:vasp_mig}, in which the \hkl[0 0 -1] dumbbell migrates towards the next neighbored Si atom escaping the $(1 1 0)$ plane forming a \hkl[0 -1 0] dumbbell.
-The activation energy of \unit[0.9]{eV} excellently agrees with experimental findings ranging from \unit[0.70]{eV} to \unit[0.87]{eV}\cite{lindner06,song90,tipping87}.
-
+\caption{Radial distribution function for C-C and Si-Si (top) as well as Si-C (bottom) pairs for C inserted at \unit[450]{$^{\circ}$C}. In the latter case the resulting C-Si distances for a C$_{\text{i}}$ \hkl<1 0 0> DB are given additionally.}
+\label{fig:450}
+\end{figure}
+There is no significant difference between C insertion into $V_2$ and $V_3$.
+Thus, in the following, the focus is on low ($V_1$) and high ($V_2$, $V_3$) C concentration simulations only.
+
+In the low C concentration simulation the number of C-C bonds is small.
+On average, there are only 0.2 C atoms per Si unit cell.
+By comparing the Si-C peaks of the low concentration simulation with the resulting Si-C distances of a C$_{\text{i}}$ \hkl<1 0 0> DB it becomes evident that the structure is clearly dominated by this kind of defect.
+One exceptional peak exists, which is due to the Si-C cut-off, at which the interaction is pushed to zero.
+Investigating the C-C peak at \unit[0.31]{nm}, which is also available for low C concentrations as can be seen in the inset, reveals a structure of two concatenated, differently oriented C$_{\text{i}}$ \hkl<1 0 0> DBs to be responsible for this distance.
+Additionally the Si-Si radial distribution shows non-zero values at distances around \unit[0.3]{nm}, which, again, is due to the DB structure stretching two next neighbored Si atoms.
+This is accompanied by a reduction of the number of bonds at regular Si distances of c-Si.
+A more detailed description of the resulting C-Si distances in the C$_{\text{i}}$ \hkl<1 0 0> DB configuration and the influence of the defect on the structure is available in a previous study\cite{zirkelbach09}.
+
+For high C concentrations the defect concentration is likewise increased and a considerable amount of damamge is introduced in the insertion volume.
+A subsequent superposition of defects generates new displacement arrangements for the C-C as well as Si-C pair distances, which become hard to categorize and trace and obviously lead to a broader distribution.
+Short range order indeed is observed, i.e. the large amount of strong next neighbored C-C bonds at \unit[0.15]{nm} as expected in graphite or diamond and Si-C bonds at \unit[0.19]{nm} as expected in SiC, but only hardly visible is the long range order.
+This indicates the formation of an amorphous SiC-like phase.
+In fact resulting Si-C and C-C radial distribution functions compare quite well with these obtained by cascade amorphized and melt-quenched amorphous SiC using a modifed Tersoff potential\cite{gao02}.
+
+In both cases, i.e. low and high C concentrations, the formation of 3C-SiC fails to appear.
+With respect to the precipitation model the formation of C$_{\text{i}}$ \hkl<1 0 0> DBs indeed occurs for low C concentrations.
+However, sufficient defect agglomeration is not observed.
+For high C concentrations a rearrangment of the amorphous SiC structure, which is not expected at prevailing temperatures, and a transition into 3C-SiC is not observed either.
+On closer inspection two reasons for describing this obstacle become evident.
+
+First of all there is the time scale problem inherent to MD in general.
+To minimize the integration error the discretized time step must be chosen smaller than the reciprocal of the fastest vibrational mode resulting in a time step of \unit[1]{fs} for the current problem under study.
+Limitations in computer power result in a slow propgation in phase space.
+Several local minima exist, which are separated by large energy barriers.
+Due to the low probability of escaping such a local minimum a single transition event corresponds to a multiple of vibrational periods.
+Long-term evolution such as a phase transformation and defect diffusion, in turn, are made up of a multiple of these infrequent transition events.
+Thus, time scales to observe long-term evolution are not accessible by traditional MD.
+New accelerated methods have been developed to bypass the time scale problem retaining proper thermodynamic sampling\cite{voter97,voter97_2,voter98,sorensen2000,wu99}.
+
+However, the applied potential comes up with an additional limitation already mentioned in the introductory part.
+The cut-off function of the short range potential limits the interaction to next neighbors, which results in overestimated and unphysical high forces between next neighbor atoms.
+This behavior, as observed and discussed for the Tersoff potential\cite{tang95,mattoni2007}, is supported by the overestimated activation energies necessary for C diffusion as investigated in section \ref{subsection:cmob}.
+Indeed it is not only the strong C-C bond which is hard to break inhibiting C diffusion and further rearrengements in the case of the high C concentration simulations.
+This is also true for the low concentration simulations dominated by the occurrence of C$_{\text{i}}$ \hkl<1 1 0> DBs spread over the whole simulation volume, which are unable to agglomerate due to the high migration barrier.
+
+\subsection{Increased temperature simulations}
+
+Due to the potential enhanced problem of slow phase space propagation, pushing the time scale to the limits of computational ressources or applying one of the above mentioned accelerated dynamics methods exclusively might not be sufficient.
+Instead higher temperatures are utilized to compensate overestimated diffusion barriers.
+These are overestimated by a factor of 2.4 to 3.5.
+Scaling the absolute temperatures accordingly results in maximum temperatures of \unit[1460-2260]{$^{\circ}$C}.
+Since melting already occurs shortly below the melting point of the potetnial (2450 K)\cite{albe_sic_pot} due to the presence of defects, a maximum temperature of \unit[2050]{$^{\circ}$C} is used.
+
+Fig.~\ref{fig:tot} shows the resulting radial distribution functions for various temperatures.
+\begin{figure}
+\begin{center}
+\includegraphics[width=\columnwidth]{../img/tot_pc_thesis.ps}\\
+\includegraphics[width=\columnwidth]{../img/tot_pc3_thesis.ps}\\
+\includegraphics[width=\columnwidth]{../img/tot_pc2_thesis.ps}
+\end{center}
+\caption{Radial distribution function for Si-C (top), Si-Si (center) and C-C (bottom) pairs for the C insertion into $V_1$ at elevated temperatures. For the Si-C distribution resulting Si-C distances of a C$_{\text{s}}$ configuration are plotted. In the C-C distribution dashed arrows mark C-C distances occuring from C$_{\text{i}}$ \hkl<1 0 0> DB combinations, solid arrows mark C-C distances of pure C$_{\text{s}}$ combinations and the dashed line marks C-C distances of a C$_{\text{i}}$ and C$_{\text{s}}$ combination.}
+\label{fig:tot}
+\end{figure}
+The first noticeable and promising change observed for the Si-C bonds is the successive decline of the artificial peak at the cut-off distance with increasing temperature.
+Obviously enough kinetic energy is provided to affected atoms that are enabled to escape the cut-off region.
+Additionally a more important structural change was observed, which is illustrated in the two shaded areas of the graph.
+Obviously the structure obtained at \unit[450]{$^{\circ}$C}, which was found to be dominated by C$_{\text{i}}$, transforms into a C$_{\text{s}}$ dominated structure with increasing temperature.
+Comparing the radial distribution at \unit[2050]{$^{\circ}$C} to the resulting bonds of C$_{\text{s}}$ in c-Si excludes all possibility of doubt.
+
+The phase transformation is accompanied by an arising Si-Si peak at \unit[0.325]{nm}, which corresponds to the distance of second next neighbored Si atoms alonga \hkl<1 1 0> boind chain with C$_{\text{s}}$ inbetween.
+Since the expected distance of these Si pairs in 3C-SiC is \unit[0.308]{nm} the existing SiC structures embedded in the c-Si host are stretched.
+
+According to the C-C radial distribution agglomeration of C fails to appear even for elevated temperatures as can be seen on the total amount of C pairs within the investigated separation range, wich does not change significantly.
+However, a small decrease in the amount of next neighboured C pairs can be observed with increasing temperature.
+This high temperature behavior is promising since breaking of these diomand- and graphite-like bonds is mandatory for the formation of 3C-SiC.
+Obviously acceleration of the dynamics occured by supplying additional kinetic energy.
+A slight shift towards higher distances can be observed for the maximum located shortly above \unit[0.3]{nm}.
+Arrows with dashed lines mark C-C distances resulting from C$_{\text{i}}$ \hkl<1 0 0> DB combinations while arrows with solid lines mark distances arising from combinations of C$_{\text{s}}$.
+The continuous dashed line corresponds to the distance of C$_{\text{s}}$ and a next neighboured C$_{\text{i}}$ DB.
+Obviously the shift of the peak is caused by the advancing transformation of the C$_{\text{i}}$ DB into the C$_{\text{s}}$ defect.
+Quite high g(r) values are obtained for distances inbetween the continuous dashed line and the first arrow with a solid line.
+For the most part these structures can be identified as configurations of C$_{\text{s}}$ with either another C atom that basically occupies a Si lattice site but is displaced by a Si interstitial residing in the very next surrounding or a C atom that nearly occupies a Si lattice site forming a defect other than the \hkl<1 0 0>-type with the Si atom.
+Again, this is a quite promising result since the C atoms are taking the appropriate coordination as expected in 3C-SiC.
+
+Fig.~\ref{fig:v2} displays the radial distribution for high C concentrations.
\begin{figure}
\begin{center}
-\includegraphics[width=\columnwidth]{path1_albe_s.ps}
+\includegraphics[width=\columnwidth]{../img/12_pc_thesis.ps}\\
+\includegraphics[width=\columnwidth]{../img/12_pc_c_thesis.ps}
\end{center}
-\caption{Migration barrier and structures of the bond-centered (left) to \hkl[0 0 -1] dumbbell (right) transition utilizing the classical potential method. Two different pathways are obtained for different time constants of the Berendsen thermostat. The lowest activation energy is \unit[2.2]{eV}.}
-\label{fig:albe_mig}
+\caption{Radial distribution function for Si-C (top) and C-C (bottom) pairs for the C insertion into $V_2$ at elevated temperatures.}
+\label{fig:v2}
\end{figure}
-Calculations based on the EA potential yield a different picture.
-Fig.~\ref{fig:albe_mig} shows the evolution of structure and energy along the lowest energy migration path (path~1) based on the EA potential.
-Due to symmetry it is sufficient to merely consider the migration from the BC to the C$_{\text{i}}$ configuration.
-Two different pathways are obtained for different time constants of the Berendsen thermostat.
-With a time constant of \unit[1]{fs} the C atom resides in the \hkl(1 1 0) plane resulting in a migration barrier of \unit[2.4]{eV}.
-However, weaker coupling to the heat bath realized by an increase of the time constant to \unit[100]{fs} enables the C atom to move out of the \hkl(1 1 0) plane already at the beginning, which is accompanied by a reduction in energy, approaching the final configuration on a curved path.
-The energy barrier of this path is \unit[0.2]{eV} lower in energy than the direct migration within the \hkl(1 1 0) plane.
-It should be noted that the BC configuration is actually not a local minimum configuration in EA based calculations since a relaxation into the \hkl<1 1 0> dumbbell configuration occurs.
-However, investigating further migration pathways involving the \hkl<1 1 0> interstitial did not yield lower migration barriers.
-Thus, the activation energy should at least amount to \unit[2.2]{eV}.
-
-\section{Discussion}
-
-The first-principles results are in good agreement to previous work on this subject\cite{burnard93,leary97,dal_pino93,capaz94}.
-The C-Si \hkl<1 0 0> dumbbell interstitial is found to be the ground state configuration of a C defect in Si.
-The lowest migration path already proposed by Capaz et~al.\cite{capaz94} is reinforced by an additional improvement of the quantitative conformance of the barrier height calculated in this work (\unit[0.9]{eV}) with experimentally observed values (\unit[0.70]{eV} -- \unit[0.87]{eV})\cite{lindner06,song90,tipping87}.
-However, it turns out that the bond-centered configuration is not a saddle point configuration as proposed by Capaz et~al.\cite{capaz94} but constitutes a real local minimum if the electron spin is properly accounted for.
-A net magnetization of two electrons, which is already clear by simple molecular orbital theory considerations on the bonding of the sp hybridized C atom, is settled.
-By investigating the charge density isosurface it turns out that the two resulting spin up electrons are localized in a torus around the C atom.
-With an activation energy of \unit[0.9]{eV} the C$_{\text{i}}$ carbon interstitial can be expected to be highly mobile at prevailing temperatures in the process under investigation, i.e. IBS.
-
-We found that the description of the same processes fails if classical potential methods are used.
-Already the geometry of the most stable dumbbell configuration differs considerably from that obtained by first-principles calculations.
-The classical approach is unable to reproduce the correct character of bonding due to the deficiency of quantum-mechanical effects in the potential.
-%ref mod: language - energy / order
-%Nevertheless, both methods predict the same type of interstitial as the ground state configuration, and also the order in energy of the remaining defects is reproduced fairly well.
-Nevertheless, both methods predict the same type of interstitial as the ground state configuration.
-Furthermore, the relative energies of the other defects are reproduced fairly well.
-From this, a description of defect structures by classical potentials looks promising.
-% ref mod: language - changed
-%However, focussing on the description of diffusion processes the situation is changing completely.
-However, focussing on the description of diffusion processes the situation has changed completely.
-Qualitative and quantitative differences exist.
-First of all, a different pathway is suggested as the lowest energy path, which again might be attributed to the absence of quantum-mechanical effects in the classical interaction model.
-Secondly, the activation energy is overestimated by a factor of 2.4 compared to the more accurate quantum-mechanical methods and experimental findings.
-This is attributed to the sharp cut-off of the short range potential.
-As already pointed out in a previous study\cite{mattoni2007} the short cut-off is responsible for overestimated and unphysical high forces of next neighbor atoms.
-The overestimated migration barrier, however, affects the diffusion behavior of the C interstitials.
-By this artifact the mobility of the C atoms is tremendously decreased resulting in an inaccurate description or even absence of the dumbbell agglomeration as proposed by the precipitation model.
-
-\section{Summary}
-
-To conclude, we have shown that ab initio calculations on interstitial carbon in silicon are very close to the results expected from experimental data.
-The calculations presented in this work agree well with other theoretical results.
-So far, the best quantitative agreement with experimental findings has been achieved concerning the interstitial carbon mobility.
-For the first time, we have shown that the bond-centered configuration indeed constitutes a real local minimum configuration resulting in a net magnetization if spin polarized calculations are performed.
-Classical potentials, however, fail to describe the selected processes.
-This has been shown to have two reasons, i.e. the overestimated barrier of migration due to the artificial interaction cut-off on the one hand, and on the other hand the lack of quantum-mechanical effects which are crucial in the problem under study.
-% ref mod: language - being investigated
-%In order to get more insight on the SiC precipitation mechanism, further ab initio calculations are currently investigated.
-In order to get more insight on the SiC precipitation mechanism, further ab initio calculations are currently being performed.
+The amorphous SiC-like phase remains.
+No significant change in structure is observed.
+However, the decrease of the cut-off artifact and slightly sharper peaks observed with increasing temperature, in turn, indicate a slight acceleration of the dynamics realized by the supply of kinetic energy.
+However, it is not sufficient to enable the amorphous to crystalline transition.
+In contrast, even though next neighbored C bonds could be partially dissolved in the system exhibiting low C concentrations the amount of next neighbored C pairs even increased in the latter case.
+Moreover the C-C peak at \unit[0.252]{nm}, which gets slightly more distinct, equals the second next neighbor distance in diamond and indeed is made up by a structure of two C atoms interconnected by a third C atom.
+Obviously processes that appear to be non-conducive are likewise accelerated in a system, in which high amounts of C are incoorporated within a short period of time, which is accompanied by a concurrent introduction of accumulating, for the reason of time non-degradable, damage.
+% non-degradable, non-regenerative, non-recoverable
+Thus, for these systems even larger time scales, which are not accessible within traditional MD, must be assumed for an amorphous to crystalline transition or structural evolution in general.
+% maybe put description of bonds in here ...
+Nevertheless, some results likewiese indicate the acceleration of other processes that, again, involve C$_{\text{s}}$.
+The increasingly pronounced Si-C peak at \unit[0.35]{nm} corresponds to the distance of a C and a Si atom interconnected by another Si atom.
+Additionally the C-C peak at \unit[0.31]{nm} corresponds to the distance of two C atoms bound to a central Si atom.
+For both structures the C atom appears to reside on a substitutional rather than an interstitial lattice site.
+However, huge amount of damage hampers identification.
+The alignment of the investigated structures to the c-Si host is lost in many cases, which suggests the necissity of much more time for structural evolution to maintain the topotaptic orientation of the precipitate.
+
+\section{Summary and discussion}
+
+Investigations are targeted on the initially stated controversy of SiC precipitation, i.e. whether precipitation occurs abrubtly after ehough C$_{\text{i}}$ agglomerated or a successive agglomeration of C$_{\text{s}}$ on usual Si lattice sites (and Si$_{\text{i}}$) followed by a contraction into incoherent SiC.
+Results of a previous ab initio study on defects and defect combinations in C implanted Si\cite{zirkelbach10b} sugeest C$_{\text{s}}$ to play a decisive role in the precipitation of SiC in Si.
+To support previous assumptions MD simulations, which are capable of modeling the necessary amount of atoms, i.e. the precipitate and the surrounding c-Si structure, have been employed in the current study.
+
+In a previous comparative study\cite{zirkelbach10a} we have schown that the utilized empirical potential fails to describe some selected processes.
+Thus, limitations of the employed potential have been further investigated and taken into account in the present study.
+We focussed on two major shortcomings: the overestimated activation energy and the improper description of intrinsic and C point defects in Si.
+Overestimated forces between next neighbor atoms that are expected for short range potentials\cite{mattoni2007} have been confirmed to influence the C$_{\text{i}}$ diffusion.
+The migration barrier was estimated to be larger by a factor of 2.4 to 3.5 compared to highly accurate quantum-mechanical calculations\cite{zirkelbach10a}.
+Concerning point defects the drastically underestimated formation energy of C$_{\text{s}}$ and deficiency in the description of the Si$_{\text{i}}$ ground state necessitated further investigations on structures that are considered important for the problem under study.
+It turned out that the EA potential still favors a C$_{\text{i}}$ \hkl<1 0 0> DB over a C$_{\text{s}}$-Si$_{\text{i}}$ configuration, which, thus, does not constitute any limitation for the simulations aiming to resolve the present controversy of the proposed SiC precipitation models.
+
+MD simulations at temperatures used in IBS resulted in structures that were dominated by the C$_{\text{i}}$ \hkl<1 0 0> DB and its combinations if C is inserted into the total volume.
+Incoorporation into volmes $V_2$ and $V_3$ led to an amorphous SiC-like structure within the respective volume.
+To compensate overestimated diffusion barriers we performed simulations at accordingly increased temperatures.
+No significant change was observed for high C concentrations.
+The amorphous phase is maintained.
+Due to the incoorparation of a huge amount of C into a small volume within a short period of time damage is produced, which obviously decelerates strcutural evolution.
+For the low C concentrations, time scales are still too low to observe C agglomeration sufficient for SiC precipitation, which is attributed to the slow phase space propagation inherent to MD in general.
+However, we observed a phase tranisiton of the C$_{\text{i}}$-dominated into a clearly C$_{\text{s}}$-dominated structure.
+The amount of substitutionally occupied C atoms increases with increasing temperature.
+Entropic contributions are assumed to be responsible for these structures at eleveated temperatures that deviate from the ground state at 0 K.
+Indeed, in a previous ab initio MD simulation\cite{zirkelbach10b} performed at \unit[900]{$^{\circ}$C} we observed the departing of a Si$_{\text{i}}$ \hkl<1 1 0> DB located next to a C$_{\text{s}}$ atom instead of a recombination into the ground state configuration, i.e. a C$_{\text{i}}$ \hkl<1 0 0> DB.
+
+% postannealing less efficient than hot implantation
+Experimental studies revealed increased implantation temperatures to be more efficient than postannealing methods for the formation of topotactically aligned precipitates\cite{eichhorn02}.
+In particular restructuring of strong C-C bonds is affected\cite{deguchi92}, which preferentially arise if additional kinetic energy provided by an increase of the implantation temperature is missing to accelerate or even enable atomic rearrangements.
+We assume this to be related to the problem of slow structural evolution encountered in the high C concentration simulations due to the insertion of high amounts of C into a small volume within a short period of time resulting in essentially no time for the system to rearrange.
+% rt implantation + annealing
+Implantations of an understoichiometric dose at room temperature followed by thermal annealing results in small spherical sized C$_{\text{i}}$ agglomerates at temperatures below \unit[700]{$^{\circ}$C} and SiC precipitates of the same size at temperatures above \unit[700]{$^{\circ}$C}\cite{werner96}.
+Since, however, the implantation temperature is considered more efficient than the postannealing temperature, SiC precipitates are expected -- and indeed are observed for as-implanted samples\cite{lindner99,lindner01} -- in implantations performed at \unit[450]{$^{\circ}$C}.
+Implanted C is therefor expected to occupy substitutionally usual Si lattice sites right from the start.
+
+Thus, we propose an increased participation of C$_{\text{s}}$ already in the initial stages of the implantation process at temperatures above \unit[450]{$^{\circ}$C}, the temperature most aplicable for the formation of SiC layers of high crystalline quality and topotactical alignment\cite{lindner99}.
+Thermally activated, C$_{\text{i}}$ is enabled to turn into C$_{\text{s}}$ accompanied by Si$_{\text{i}}$.
+The associated emission of Si$_{\text{i}}$ is needed for several reasons.
+For the agglomeration and rearrangement of C Si$_{\text{i}}$ is needed to turn C$_{\text{s}}$ into highly mobile C$_{\text{i}}$ again.
+Since the conversion of a coherent SiC structure, i.e. C$_{\text{s}}$ occupying the Si lattice sites of one of the two fcc lattices that build up the c-Si diamond lattice, into incoherent SiC is accompanied by a reduction in volume, large amount of strain is assumed to reside in the coherent as well as incoherent structure.
+Si$_{\text{i}}$ serves either as supply of Si atoms needed in the surrounding of the contracted precipitates or as interstitial defect minimizing the emerging strain energy of a coherent precipitate.
+The latter has been directly identified in the present simulation study, i.e. structures of two C$_{\text{s}}$ atoms with one being slightly displaced by a next neighbored Si$_{\text{i}}$ atom.
+
+It is, thus, concluded that precipitation occurs by successive agglomeration of C$_{\text{s}}$ as already proposed by Nejim et~al.\cite{nejim95}.
+This agrees well with a previous ab inito study on defects in C implanted Si\cite{zirkelbach10b}, which showed C$_{\text{s}}$ to occur in all probability.
+However, agglomeration and rearrangement is enabled by mobile C$_{\text{i}}$, which has to be present at the same time and is formed by recombination of C$_{\text{s}}$ and Si$_{\text{i}}$.
+In contrast to assumptions of an abrupt precipitation of an agglomerate of C$_{\text{i}}$\cite{werner96,werner97,eichhorn99,lindner99_2,koegler03}, however, structural evolution is believed to occur by a successive occupation of usual Si lattice sites with substitutional C.
+This mechanism satisfies the experimentally observed alignment of the \hkl(h k l) planes of the precipitate and the substrate, whereas there is no obvious reason for the topotactic orientation of an agglomerate consisting exclusively of C-Si dimers, which would necessarily involve a much more profound change in structure for the transition into SiC.
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\section*{Acknowledgment}
projects / lectures / latex.git / blobdiff