welcome everybody to the the defense of my doctor's thesis entitled ...
as usual, i would like to start with a small motivation,
which in this case focuses on the materials system, SiC.
+and, thereby, approach the problem to be investigated within this study.
slide 2
however, nowadays, much progress has been achieved in SiC thin film growth.
indeed, commerically available semiconductor devices based on alpha SiC exist,
although these are still extremely expensive.
-However, production of the advantageous 3c polytype material is less advanced.
+however, production of the advantageous cubic polytype material is less advanced.
mismatches in the thermal expansion coefficient and the lattice parameter
(with respect to the substrate) cause a considerable amount of defects,
which is responsible for structural and electrical qualities
that are not yet satisfactory.
next to CVD and MBE, the ion beam synthesis technique, which consists of
-high dose ion implantation foolowed by a high-temperature annealing step
-turned out to constitute a promising method to form buried layers of SiC in Si.
-...
+high dose ion implantation followed by a high-temperature annealing step
+turned out to constitute a promising method to form buried layers of SiC in Si
+as indicated in this sketch.
+due to the high areal homogenity achieved in ibs
+the size is only limited by the beam scanning equipment
+and sythesized films do not exhibit surface bending effects
+in contrast these formed by cvd and mbe.
+this enables the synthesis of large are SiC films.
slide 5
-...
+the ibs synthesis of ...
and the task of this work is to gain insight into SiC precipitation in silicon.
slide 6
-this (insight) is achieved by atomistic simulations, which are explained after the assumed precipitation mechnisms present in literature are presented ...
+supposed conv mech
+
slide 7
+
+however, controversial ... exists in literature
+
slide 8
+
+this (insight) is achieved by atomistic simulations, which are explained after the assumed precipitation mechnisms present in literature are presented ...
+
slide 9
slide 10
slide 11