ibs anfang

[lectures/latex.git] / posic / talks / seminar_2008.tex

diff --git a/posic/talks/seminar_2008.tex b/posic/talks/seminar_2008.tex
index 2d2218e..d946ce3 100644 (file)
--- a/posic/talks/seminar_2008.tex
+++ b/posic/talks/seminar_2008.tex
@@ -272,11 +272,16 @@
  Die Alternative: Ionenstrahlsynthese
 
  \begin{itemize}
-  \item Implantation:
-        180 keV C$^+\rightarrow$ Si, $D=8.5 \times 10^{17}$ cm$^{-2}$,
-        $T_{\text{i}}=450 \, ^{\circ} \text{C}$
-  \item Temperschritt:
-        $T=1250 \, ^{\circ} \text{C}$, $t=??\text{ h}$
+  \item Implantation 1:
+        180 keV C$^+\rightarrow$ FZ-Si(100), $D=7.9 \times 10^{17}$ cm$^{-2}$,
+        $T_{\text{i}}=500 \, ^{\circ} \text{C}$\\
+        $\rightarrow$
+  \item Implantation 2:
+        180 keV C$^+\rightarrow$ FZ-Si(100), $D=0.6 \times 10^{17}$ cm$^{-2}$,
+        $T_{\text{i}}=250 \, ^{\circ} \text{C}$\\
+        $\rightarrow$
+  \item Tempern:
+        $T=1250 \, ^{\circ} \text{C}$, $t=10\text{ h}$
  \end{itemize}
 
 \end{slide}