\chapter{Point defects in silicon}
\label{chapter:defects}
-Regarding the supposed conversion mechanisms of SiC in c-Si as introduced in section~\ref{section:assumed_prec} the understanding of C and Si interstitial point defects in c-Si is of fundamental interest.
+Regarding the supposed conversion mechanisms of SiC in c-Si as introduced in section~\ref{section:assumed_prec}, the understanding of C and Si interstitial point defects in c-Si is of fundamental interest.
During implantation, defects such as vacancies (V), substitutional C (C$_{\text{s}}$), interstitial C (C$_{\text{i}}$) and Si self-interstitials (Si$_{\text{i}}$) are created, which are believed to play a decisive role in the precipitation process.
In the following, these defects are systematically examined by computationally efficient, classical potential as well as highly accurate DFT calculations with the parameters and simulation conditions that are defined in chapter~\ref{chapter:simulation}.
Both methods are used to investigate selected diffusion processes of some of the defect configurations.
\section{Silicon self-interstitials}
-For investigating the \si{} structures a Si atom is inserted or removed according to Fig.~\ref{fig:basics:ins_pos} of section~\ref{section:basics:defects}.
+For investigating the \si{} structures, a Si atom is inserted or removed according to Fig.~\ref{fig:basics:ins_pos} of section~\ref{section:basics:defects}.
The formation energies of \si{} configurations are listed in Table~\ref{tab:defects:si_self} for both methods used in this work as well as results obtained by other {\em ab initio} studies~\cite{al-mushadani03,leung99}.
\bibpunct{}{}{,}{n}{}{}
\begin{table}[tp]
It has turned out to be very difficult to capture the results of quantum-mechanical calculations in analytical potential models.
Among the established analytical potentials only the environment-dependent interatomic potential (EDIP)~\cite{bazant97,justo98} and Stillinger-Weber~\cite{stillinger85} potential reproduce the correct order in energy of the defects.
However, these potentials show shortcomings concerning the description of other physical properties and are unable to describe the C-C and C-Si interaction.
-In fact the EA potential calculations favor the tetrahedral defect configuration.
+In fact, the EA potential calculations favor the tetrahedral defect configuration.
This limitation is assumed to arise due to the cut-off.
In the tetrahedral configuration the second neighbors are only slightly more distant than the first neighbors, which creates the particular problem.
Indeed, an increase of the cut-off results in increased values of the formation energies~\cite{albe_sic_pot}, which is most significant for the tetrahedral configuration.
\caption{Kinetic energy plot of the relaxation process of the hexagonal silicon self-interstitial defect simulation using the EA potential.}
\label{fig:defects:kin_si_hex}
\end{figure}
-To exclude failures in the implementation of the potential or the MD code itself the hexagonal defect structure was double-checked with the \textsc{parcas} MD code~\cite{parcas_md}.
+To exclude failures in the implementation of the potential or the MD code itself, the hexagonal defect structure was double-checked with the \textsc{parcas} MD code~\cite{parcas_md}.
The respective relaxation energetics are likewise plotted and look similar to the energetics obtained by \textsc{posic}.
In fact, the same type of interstitial arises using random insertions.
In addition, variations exist, in which the displacement is only along two \hkl<1 0 0> axes ($E_\text{f}=3.8\,\text{eV}$) or along a single \hkl<1 0 0> axes ($E_\text{f}=3.6\,\text{eV}$) successively approximating the tetrahedral configuration and formation energy.
For the vacancy the net spin up electron density is localized in caps at the four surrounding Si atoms directed towards the vacant site.
No other intrinsic defect configuration, within the ones that are mentioned, is affected by spin polarization.
-In the case of the classical potential simulations bonds between atoms are displayed if there is an interaction according to the potential model, i.e.\ if the distance of two atoms is within the cut-off radius $S_{ij}$ introduced in equation \eqref{eq:basics:fc}.
+In the case of the classical potential simulations, bonds between atoms are displayed if there is an interaction according to the potential model, i.e.\ if the distance of two atoms is within the cut-off radius $S_{ij}$ introduced in equation \eqref{eq:basics:fc}.
For the tetrahedral and the slightly displaced configurations four bonds to the atoms located in the center of the planes of the unit cell exist in addition to the four tetrahedral bonds.
-The length of these bonds are, however, close to the cut-off range and thus are weak interactions not constituting actual chemical bonds.
+The length of these bonds are, however, close to the cut-off range and, thus, are weak interactions not constituting actual chemical bonds.
The same applies to the bonds between the interstitial and the upper two atoms in the \si{} \hkl<1 1 0> DB configuration.
A more detailed description of the chemical bonding is achieved through quantum-mechanical calculations by investigating the accumulation of negative charge between the nuclei.
\subsection{Defect structures in a nutshell}
-For investigating the \ci{} structures a C atom is inserted or removed according to Fig.~\ref{fig:basics:ins_pos} of section~\ref{section:basics:defects}.
+For investigating the \ci{} structures, a C atom is inserted or removed according to Fig.~\ref{fig:basics:ins_pos} of section~\ref{section:basics:defects}.
Formation energies of the most common C point defects in crystalline Si are summarized in Table~\ref{tab:defects:c_ints}.
The relaxed configurations are visualized in Fig.~\ref{fig:defects:c_conf}.
Again, the displayed structures are the results obtained by the classical potential calculations.
An experimental value of the formation energy of \cs{} was determined by a fit to solubility data yielding a concentration of $3.5 \times 10^{24} \exp{(-2.3\,\text{eV}/k_{\text{B}}T)} \text{ cm}^{-3}$~\cite{bean71}.
However, there is no particular reason for treating the prefactor as a free parameter in the fit to the experimental data.
It is simply given by the atomic density of pure silicon, which is $5\times 10^{22}\text{ cm}^{-3}$.
-Tersoff~\cite{tersoff90} and Dal Pino et al.~\cite{dal_pino93} pointed out that by combining this prefactor with the calculated values for the energy of formation ranging from \unit[1.6--1.89]{eV} an excellent agreement with the experimental solubility data within the entire temperature range of the experiment is obtained.
-This reinterpretation of the solubility data, first proposed by Tersoff and later on reinforced by Dal~Pino~et~al. is in good agreement with the results of the quantum-mechanical calculations performed in this work.
-Unfortunately the EA potential undervalues the formation energy roughly by a factor of two, which is a definite drawback of the potential.
+Tersoff~\cite{tersoff90} and Dal~Pino~et~al.~\cite{dal_pino93} pointed out that by combining this prefactor with the calculated values for the energy of formation ranging from \unit[1.6--1.89]{eV}, an excellent agreement with the experimental solubility data within the entire temperature range of the experiment is obtained.
+This reinterpretation of the solubility data, first proposed by Tersoff and later on reinforced by Dal~Pino~et~al.\ is in good agreement with the results of the quantum-mechanical calculations performed in this work.
+Unfortunately, the EA potential undervalues the formation energy roughly by a factor of two, which is a definite drawback of the potential.
Except for Tersoff's results for the tetrahedral configuration, the \ci{} \hkl<1 0 0> DB is the energetically most favorable interstitial configuration.
As mentioned above, the low energy of formation for the tetrahedral interstitial in the case of the Tersoff potential is believed to be an artifact of the abrupt cut-off set to \unit[2.5]{\AA} (see Ref. 11 and 13 in~\cite{tersoff90}) and the real formation energy is, thus, supposed to be located between \unit[3--10]{eV}.
This is discussed in more detail in section~\ref{subsection:100mig}.
To conclude, discrepancies between the results from classical potential calculations and those obtained from first principles are observed.
-Within the classical potentials EA outperforms Tersoff and is, therefore, used for further studies.
+Within the classical potentials, EA outperforms Tersoff and is, therefore, used for further studies.
Both methods (EA and DFT) predict the \ci{} \hkl<1 0 0> DB configuration to be most stable.
Also the remaining defects and their energetic order are described fairly well.
It is thus concluded that, so far, modeling of the SiC precipitation by the EA potential might lead to trustable results.
\subsection[C \hkl<1 0 0> dumbbell interstitial configuration]{\boldmath C \hkl<1 0 0> dumbbell interstitial configuration}
\label{subsection:100db}
-As the \ci{} \hkl<1 0 0> DB constitutes the ground-state configuration of a C atom incorporated into otherwise perfect c-Si it is the most probable and, hence, one of the most important interstitial configurations of C in Si.
+As the \ci{} \hkl<1 0 0> DB constitutes the ground-state configuration of a C atom incorporated into otherwise perfect c-Si, it is the most probable and, hence, one of the most important interstitial configurations of C in Si.
The structure was initially suspected by IR local vibrational mode absorption~\cite{bean70} and finally verified by electron paramagnetic resonance (EPR)~\cite{watkins76} studies on irradiated Si substrates at low temperatures.
Fig.~\ref{fig:defects:100db_cmp} schematically shows the \ci{} \hkl<1 0 0> DB structure and Table~\ref{tab:defects:100db_cmp} lists the details of the atomic displacements, distances and bond angles obtained by classical potential and quantum-mechanical calculations.
This is supported by the image of the charge density isosurface in Fig.~\ref{img:defects:charge_den_and_ksl}.
The two lower Si atoms are $sp^3$ hybridized and form $\sigma$ bonds to the Si DB atom.
The same is true for the upper two Si atoms and the C DB atom.
-In addition the DB atoms form $\pi$ bonds.
+In addition, the DB atoms form $\pi$ bonds.
However, due to the increased electronegativity of the C atom the electron density is attracted by and, thus, localized around the C atom.
In the same figure the Kohn-Sham levels are shown.
There is no magnetization density.
However, this fact could not be reproduced by spin polarized \textsc{vasp} calculations performed in this work.
Present results suggest this configuration to correspond to a real local minimum.
In fact, an additional barrier has to be passed to reach this configuration starting from the \ci{} \hkl<1 0 0> interstitial configuration, which is investigated in section~\ref{subsection:100mig}.
-After slightly displacing the C atom along the \hkl[1 0 0] (equivalent to a displacement along \hkl[0 1 0]), \hkl[0 0 1], \hkl[0 0 -1] and \hkl[1 -1 0] direction the distorted structures relax back into the BC configuration.
-As will be shown in subsequent migration simulations the same would happen to structures where the C atom is displaced along the migration direction, which approximately is the \hkl[1 1 0] direction.
+After slightly displacing the C atom along the \hkl[1 0 0] (equivalent to a displacement along \hkl[0 1 0]), \hkl[0 0 1], \hkl[0 0 -1] and \hkl[1 -1 0] direction, the distorted structures relax back into the BC configuration.
+As will be shown in subsequent migration simulations, the same would happen to structures where the C atom is displaced along the migration direction, which approximately is the \hkl[1 1 0] direction.
These relaxations indicate that the BC configuration is a real local minimum instead of an assumed saddle point configuration.
Fig.~\ref{img:defects:bc_conf} shows the structure, charge density isosurface and Kohn-Sham levels of the BC configuration.
In fact, the net magnetization of two electrons is already suggested by simple molecular orbital theory considerations with respect to the bonding of the C atom.
%
\begin{minipage}{15cm}
\centering
-\framebox{\hkl<0 0 -1> $\rightarrow$ \hkl<0 0 1>}\\
+\framebox{\hkl[0 0 -1] $\rightarrow$ \hkl[0 0 1]}\\
\begin{minipage}{4.5cm}
\includegraphics[width=4.5cm]{c_pd_vasp/100_2333.eps}
\end{minipage}
%
\begin{minipage}{15cm}
\centering
-\framebox{\hkl<0 0 -1> $\rightarrow$ \hkl<0 -1 0>}\\
+\framebox{\hkl[0 0 -1] $\rightarrow$ \hkl[0 -1 0]}\\
\begin{minipage}{4.5cm}
\includegraphics[width=4.5cm]{c_pd_vasp/100_2333.eps}
\end{minipage}
%
\begin{minipage}{15cm}
\centering
-\framebox{\hkl<0 0 -1> $\rightarrow$ \hkl<0 -1 0> (in place)}\\
+\framebox{\hkl[0 0 -1] $\rightarrow$ \hkl[0 -1 0] (in place)}\\
\begin{minipage}{4.5cm}
\includegraphics[width=4.5cm]{c_pd_vasp/100_2333.eps}
\end{minipage}
\label{img:defects:c_mig_path}
\end{figure}
Three different migration paths are accounted in this work, which are displayed in Fig.~\ref{img:defects:c_mig_path}.
-The first migration investigated is a transition of a \hkl<0 0 -1> into a \hkl<0 0 1> DB interstitial configuration.
+The first migration investigated is a transition of a \hkl[0 0 -1] into a \hkl[0 0 1] DB interstitial configuration.
During this migration the C atom is changing its Si DB partner.
-The new partner is the one located at $a_{\text{Si}}/4 \hkl<1 1 -1>$ relative to the initial one, where $a_{\text{Si}}$ is the Si lattice constant.
+The new partner is the one located at $a_{\text{Si}}/4 \hkl[1 1 -1]$ relative to the initial one, where $a_{\text{Si}}$ is the Si lattice constant.
Two of the three bonds to the next neighbored Si atoms are preserved while the breaking of the third bond and the accompanying formation of a new bond is observed.
-The C atom resides in the \hkl(1 1 0) plane.
+The C atom resides in the \hkl(-1 1 0) plane.
This transition involves the intermediate BC configuration.
However, results discussed in the previous section indicate that the BC configuration is a real local minimum.
-Thus, the \hkl<0 0 -1> to \hkl<0 0 1> migration can be thought of a two-step mechanism in which the intermediate BC configuration constitutes a metastable configuration.
-Due to symmetry it is enough to consider the transition from the BC to the \hkl<1 0 0> configuration or vice versa.
+Thus, the \hkl[0 0 -1] to \hkl[0 0 1] migration can be thought of a two-step mechanism, in which the intermediate BC configuration constitutes a metastable configuration.
+Due to symmetry, it is enough to consider the transition from the BC to the \hkl<1 0 0> configuration or vice versa.
In the second path, the C atom is changing its Si partner atom as in path one.
-However, the trajectory of the C atom is no longer proceeding in the \hkl(1 1 0) plane.
-The orientation of the new DB configuration is transformed from \hkl<0 0 -1> to \hkl<0 -1 0>.
+However, the trajectory of the C atom is no longer proceeding in the \hkl(-1 1 0) plane.
+The orientation of the new DB configuration is transformed from \hkl[0 0 -1] to \hkl[0 -1 0].
Again, one bond is broken while another one is formed.
As a last migration path, the defect is only changing its orientation.
Thus, this path is not responsible for long-range migration.
\begin{center}
\includegraphics[width=0.7\textwidth]{im_00-1_nosym_sp_fullct_thesis_vasp_s.ps}
\end{center}
-\caption[Migration barrier and structures of the {\hkl[0 0 -1]} DB to BC transition.]{Migration barrier and structures of the \hkl<0 0 -1> DB (left) to BC (right) transition. Bonds of the C atom are illustrated by blue lines.}
+\caption[Migration barrier and structures of the {\hkl[0 0 -1]} DB to BC transition.]{Migration barrier and structures of the \hkl[0 0 -1] DB (left) to BC (right) transition. Bonds of the C atom are illustrated by blue lines.}
\label{fig:defects:00-1_001_mig}
\end{figure}
In Fig.~\ref{fig:defects:00-1_001_mig} results of the \hkl<0 0 -1> to \hkl<0 0 1> migration fully described by the migration of the \hkl<0 0 -1> to the BC configuration is displayed.
As already known from the migration of the \hkl<0 0 -1> to the BC configuration discussed in Fig.~\ref{fig:defects:00-1_001_mig}, another \unit[0.25]{eV} are needed to turn back from the BC to a \hkl<1 0 0>-type interstitial.
However, due to the fact that this migration consists of three single transitions with the second one having an activation energy slightly higher than observed for the direct transition, this sequence of paths is considered very unlikely to occur.
The migration barrier of the \hkl<1 1 0> to \hkl<0 0 -1> transition, in which the C atom is changing its Si partner and, thus, moving to the neighbored lattice site, corresponds to approximately \unit[1.35]{eV}.
-During this transition the C atom is escaping the \hkl(1 1 0) plane approaching the final configuration on a curved path.
+During this transition the C atom is escaping the \hkl(-1 1 0) plane approaching the final configuration on a curved path.
This barrier is much higher than the ones found previously, which again make this transition very unlikely to occur.
For this reason, the assumption that C diffusion and reorientation is achieved by transitions of the type presented in Fig.~\ref{fig:defects:00-1_0-10_mig} is reinforced.
Fig.~\ref{fig:defects:cp_bc_00-1_mig} shows the evolution of structure and energy along the \ci{} BC to \hkl[0 0 -1] DB transition.
Since the \ci{} BC configuration is unstable relaxing into the \hkl[1 1 0] DB configuration within this potential, the low kinetic energy state is used as a starting configuration.
Two different pathways are obtained for different time constants of the Berendsen thermostat.
-With a time constant of \unit[1]{fs} the C atom resides in the \hkl(1 1 0) plane
+With a time constant of \unit[1]{fs}, the C atom resides in the \hkl(-1 1 0) plane
resulting in a migration barrier of \unit[2.4]{eV}.
-However, weaker coupling to the heat bath realized by an increase of the time constant to \unit[100]{fs} enables the C atom to move out of the \hkl(1 1 0) plane already at the beginning, which is accompanied by a reduction in energy, approaching the final configuration on a curved path.
-The energy barrier of this path is \unit[0.2]{eV} lower in energy than the direct migration within the \hkl(1 1 0) plane.
+However, weaker coupling to the heat bath realized by an increase of the time constant to \unit[100]{fs} enables the C atom to move out of the \hkl(-1 1 0) plane already at the beginning, which is accompanied by a reduction in energy, approaching the final configuration on a curved path.
+The energy barrier of this path is \unit[0.2]{eV} lower in energy than the direct migration within the \hkl(-1 1 0) plane.
However, the investigated pathways cover an activation energy approximately twice as high as the one obtained by quantum-mechanical calculations.
If the entire transition of the \hkl[0 0 -1] into the \hkl[0 0 1] configuration is considered a two step process passing the intermediate BC configuration, an additional activation energy of \unit[0.5]{eV} is necessary to escape the BC towards the \hkl[0 0 1] configuration.
Assuming equal preexponential factors for both diffusion steps, the total probability of diffusion is given by $\exp\left((2.2\,\text{eV}+0.5\,\text{eV})/k_{\text{B}}T\right)$.
\label{fig:defects:110_mig}
\end{figure}
Fig.~\ref{fig:defects:110_mig} shows migration barriers of the \ci{} \hkl[1 1 0] DB to \hkl[0 0 -1], \hkl[0 -1 0] (in place) and BC configuration.
-As expected there is no maximum for the transition into the BC configuration.
+As expected, there is no maximum for the transition into the BC configuration.
As mentioned earlier, the BC configuration itself constitutes a saddle point configuration relaxing into the energetically more favorable \hkl[1 1 0] DB configuration.
An activation energy of \unit[2.2]{eV} is necessary to reorientate the \hkl[0 0 -1] into the \hkl[1 1 0] DB configuration, which is \unit[1.3]{eV} higher in energy.
Residing in this state another \unit[0.90]{eV} is enough to make the C atom form a \hkl[0 0 -1] DB configuration with the Si atom of the neighbored lattice site.
In contrast to quantum-mechanical calculations, in which the direct transition is the energetically most favorable transition and the transition composed of the intermediate migration steps is very unlikely to occur, the just presented pathway is much more conceivable in classical potential simulations, since the energetically most favorable transition found so far is likewise composed of two migration steps with activation energies of \unit[2.2]{eV} and \unit[0.5]{eV}, for which the intermediate state is the BC configuration, which is unstable.
-Thus the just proposed migration path, which involves the \hkl[1 1 0] interstitial configuration, becomes even more probable than the initially proposed path, which involves the BC configuration that is, in fact, unstable.
+Thus, the just proposed migration path, which involves the \hkl[1 1 0] interstitial configuration, becomes even more probable than the initially proposed path, which involves the BC configuration that is, in fact, unstable.
Due to these findings, the respective path is proposed to constitute the diffusion-describing path.
The evolution of structure and configurational energy is displayed again in Fig.~\ref{fig:defects:involve110}.
\begin{figure}[tp]
The C atom of the second and the Si atom of the initial DB move towards each other forming a bond, which results in a somewhat lower binding energy of \unit[-2.25]{eV}.
The corresponding defect structure is displayed in Fig.~\ref{fig:defects:225}.
In this configuration the initial Si and C DB atoms are displaced along \hkl[1 0 0] and \hkl[-1 0 0] in such a way that the Si atom is forming tetrahedral bonds with two Si and two C atoms.
-The C and Si atom constituting the second defect are as well displaced in such a way, that the C atom forms tetrahedral bonds with four Si neighbors, a configuration expected in SiC.
+The C and Si atom constituting the second defect are as well displaced in such a way that the C atom forms tetrahedral bonds with four Si neighbors, a configuration expected in SiC.
The two carbon atoms, which are spaced by \unit[2.70]{\AA}, do not form a bond but anyhow reside in a shorter distance than expected in SiC.
Si atom number 2 is pushed towards the C atom, which results in the breaking of the bond to Si atom number 4.
Breaking of the $\sigma$ bond is indeed confirmed by investigating the charge density isosurface of this configuration.
The C atoms are spaced by \unit[3.14]{\AA}, which is very close to the expected C-C next neighbor distance of \unit[3.08]{\AA} in SiC.
Figure~\ref{fig:defects:205} displays the results of a \hkl[0 0 1] DB inserted at position 3.
The binding energy is \unit[-2.05]{eV}.
-Both DBs are tilted along the same direction remaining aligned in parallel and the second DB is pushed downwards in such a way, that the four DB atoms form a rhomboid.
+Both DBs are tilted along the same direction remaining aligned in parallel and the second DB is pushed downwards in such a way that the four DB atoms form a rhomboid.
Both C atoms form tetrahedral bonds to four Si atoms.
However, Si atom number 1 and number 3, which are bound to the second \ci{} atom are also bound to the initial C atom.
These four atoms of the rhomboid reside in a plane and, thus, do not match the situation in SiC.
In both configurations, the far-off atom of the second DB resides in threefold coordination.
The interaction of \ci{} \hkl<1 0 0> DBs is investigated along the \hkl[1 1 0] bond chain assuming a possible reorientation of the DB atom at each position to minimize its configurational energy.
-Therefore, the binding energies of the energetically most favorable configurations with the second DB located along the \hkl[1 1 0] direction and resulting C-C distances of the relaxed structures are summarized in Table~\ref{tab:defects:comb_db110}.
+Therefor, the binding energies of the energetically most favorable configurations with the second DB located along the \hkl[1 1 0] direction and resulting C-C distances of the relaxed structures are summarized in Table~\ref{tab:defects:comb_db110}.
\begin{table}[tp]
\begin{center}
\begin{tabular}{l c c c c c c}
Intermediate configurations within the investigated turbulent pathway identify barrier heights of more than \unit[4]{eV} resulting in a low probability for the transition.
The high activation energy is attributed to the stability of such a low energy configuration, in which the C atom of the second DB is located close to the initial DB.
Due to an effective stress compensation realized in the respective low energy configuration, which will necessarily be lost during migration, a high energy configuration needs to get passed, which is responsible for the high barrier.
-Low barriers are only identified for transitions starting from energetically less favorable configurations, e.g. the configuration of a \hkl[-1 0 0] DB located at position 2 (\unit[-0.36]{eV}).
+Low barriers are only identified for transitions starting from energetically less favorable configurations, e.g.\ the configuration of a \hkl[-1 0 0] DB located at position 2 (\unit[-0.36]{eV}).
Starting from this configuration, an activation energy of only \unit[1.2]{eV} is necessary for the transition into the ground state configuration.
The corresponding migration energies and atomic configurations are displayed in Fig.~\ref{fig:036-239}.
\begin{figure}[tp]
Obviously, agglomeration of C$_{\text{i}}$ and C$_{\text{s}}$ is energetically favorable except for separations along one of the \hkl<1 1 0> directions.
The energetically most favorable configuration (configuration $\beta$) forms a strong but compressively strained C-C bond with a separation distance of \unit[0.142]{nm} sharing a Si lattice site.
Again, conclusions concerning the probability of formation are drawn by investigating respective migration paths.
-Since C$_{\text{s}}$ is unlikely to exhibit a low activation energy for migration the focus is on C$_{\text{i}}$.
+Since C$_{\text{s}}$ is unlikely to exhibit a low activation energy for migration, the focus is on C$_{\text{i}}$.
Pathways starting from the next most favored configuration, i.e.\ \cs{} located at position 2, into configuration $\alpha$ and $\beta$ are investigated, which show activation energies above \unit[2.2]{eV} and \unit[2.5]{eV}.
The respective barriers and structures are displayed in Fig.~\ref{fig:051-xxx}.
For the transition into configuration $\beta$, as before, the non-magnetic configuration is obtained.
%In case a) only the first displacement is compensated by the substitutional carbon atom.
%This results in a somewhat higher binding energy of -0.51 eV.
%The binding energy gets even higher in case b) ($E_{\text{b}}=-0.15\text{ eV}$), in which the substitutional carbon is located further away from the initial dumbbell.
-%In both cases, silicon atom number 1 is displaced in such a way, that the bond to silicon atom number 5 vanishes.
+%In both cases, silicon atom number 1 is displaced in such a way that the bond to silicon atom number 5 vanishes.
%In case of~\ref{fig:defects:comb_db_04} a) the carbon atoms form a bond with a distance of 1.5 \AA, which is close to the C-C distance expected in diamond or graphit.
%Both carbon atoms are highly attracted by each other resulting in large displacements and high strain energy in the surrounding.
%A binding energy of 0.26 eV is observed.
\end{figure}
Figure~\ref{fig:defects:comb_db_06} shows the associated configurations.
All investigated structures are preferred compared to isolated, largely separated defects.
-In contrast to C$_{\text{s}}$ this is also valid for positions along \hkl[1 1 0] resulting in an entirely attractive interaction between defects of these types.
+In contrast to C$_{\text{s}}$, this is also valid for positions along \hkl[1 1 0] resulting in an entirely attractive interaction between defects of these types.
Even for the largest possible distance (R) achieved in the calculations of the periodic supercell a binding energy as low as \unit[-0.31]{eV} is observed.
The creation of a vacancy at position 1 results in a configuration of substitutional C on a Si lattice site and no other remaining defects.
The \ci{} DB atom moves to position 1 where the vacancy is created and the \si{} DB atom recaptures the DB lattice site.
The C atom is slightly displaced in \hkl[0 1 -1] direction.
A binding energy of \unit[-0.59]{eV} indicates the occurrence of much less strain reduction compared to that in the latter configuration.
Evidently this is due to a smaller displacement of Si atom 1, which would be directly bound to the replaced Si atom at position 2.
-In the case of a vacancy created at position 4, even a slightly higher binding energy of \unit[-0.54]{eV} is observed, while the Si atom at the bottom left, which is bound to the \ci{} DB atom, is vastly displaced along \hkl[1 0 -1].
+In the case of a vacancy created at position 4, even a slightly higher binding energy of \unit[-0.54]{eV} is observed while the Si atom at the bottom left, which is bound to the \ci{} DB atom, is vastly displaced along \hkl[1 0 -1].
However the displacement of the C atom along \hkl[0 0 -1] is less compared to the one in the previous configuration.
Although expected due to the symmetric initial configuration, Si atom number 1 is not displaced correspondingly and also the \si DB atom is displaced to a greater extent in \hkl[-1 0 0] than in \hkl[0 -1 0] direction.
The symmetric configuration is, thus, assumed to constitute a local maximum, which is driven into the present state by the conjugate gradient method used for relaxation.
\label{fig:059-539}
\end{figure}
Activation energies as low as \unit[0.1]{eV} and \unit[0.6]{eV} are observed.
-In the first case the Si and C atom of the DB move towards the vacant and initial DB lattice site respectively.
+In the first case, the Si and C atom of the DB move towards the vacant and initial DB lattice site respectively.
In total three Si-Si and one more Si-C bond is formed during transition.
The activation energy of \unit[0.1]{eV} is needed to tilt the DB structure.
Once this barrier is overcome, the C atom forms a bond to the top left Si atom and the \si{} atom capturing the vacant site is forming new tetrahedral bonds to its neighbored Si atoms.
A net amount of five Si-Si and one Si-C bond are additionally formed during transition.
An activation energy of \unit[0.6]{eV} necessary to overcome the migration barrier is found.
This energy is low enough to constitute a feasible mechanism in SiC precipitation.
-To reverse this process \unit[5.4]{eV} are needed, which make this mechanism very improbable.
+To reverse this process, \unit[5.4]{eV} are needed, which make this mechanism very improbable.
%
The migration path is best described by the reverse process.
Starting at \unit[100]{\%}, energy is needed to break the bonds of Si atom 1 to its neighbored Si atoms as well as the bond of the C atom to Si atom number 5.
At \unit[50]{\%} displacement, these bonds are broken.
-Due to this and due to the formation of new bonds, e.g. the bond of Si atom number 1 to Si atom number 5, a less steep increase of configurational energy is observed.
+Due to this, and due to the formation of new bonds, e.g.\ the bond of Si atom number 1 to Si atom number 5, a less steep increase of configurational energy is observed.
In a last step, the just recently formed bond of Si atom number 1 to Si atom number 5 is broken up again as well as the bond of the initial Si DB atom and its Si neighbor in \hkl[-1 -1 -1] direction, which explains the repeated boost in energy.
Finally, the system gains some configurational energy by relaxation into the configuration corresponding to \unit[0]{\%} displacement.
%
In summary, pairs of C$_{\text{i}}$ DBs and vacancies, like no other before, show highly attractive interactions for all investigated combinations independent of orientation and separation direction of the defects.
Furthermore, small activation energies, even for transitions into the ground state exist.
-If the vacancy is created at position 1 the system will end up in a configuration of C$_{\text{s}}$ anyways.
+If the vacancy is created at position 1, the system will end up in a configuration of C$_{\text{s}}$ anyways.
Based on these results, a high probability for the formation of C$_{\text{s}}$ must be concluded.
\subsection{Combinations of \si{} and \cs}
\label{subsection:si-cs}
So far the C-Si \hkl<1 0 0> DB interstitial was found to be the energetically most favorable configuration.
-In fact substitutional C exhibits a configuration more than \unit[3]{eV} lower with respect to the formation energy.
+In fact, substitutional C exhibits a configuration more than \unit[3]{eV} lower with respect to the formation energy.
However, the configuration does not account for the accompanying Si self-interstitial that is generated once a C atom occupies the site of a Si atom.
With regard to the IBS process, in which highly energetic C atoms enter the Si target being able to kick out Si atoms from their lattice sites, such configurations are absolutely conceivable and a significant influence on the precipitation process might be attributed to them.
Thus, combinations of \cs{} and an additional \si{} are examined in the following.
\end{table}
Obviously the EA potential properly describes the relative energies of formation.
Combined structures of C$_{\text{s}}$ and Si$_{\text{i}}$ T are energetically less favorable than the ground state C$_{\text{i}}$ \hkl<1 0 0> DB configuration.
-With increasing separation distance the energies of formation decrease.
+With increasing separation distance, the energies of formation decrease.
However, even for non-interacting defects, the energy of formation, which is then given by the sum of the formation energies of the separated defects (\unit[4.15]{eV}) is still higher than that of the C$_{\text{i}}$ \hkl<1 0 0> DB.
Unexpectedly, the structure of a Si$_{\text{i}}$ \hkl<1 1 0> DB and a neighbored C$_{\text{s}}$, which is the most favored configuration of a C$_{\text{s}}$ and Si$_{\text{i}}$ DB according to quantum-mechanical calculations, likewise constitutes an energetically favorable configuration within the EA description, which is even preferred over the two least separated configurations of C$_{\text{s}}$ and Si$_{\text{i}}$ T.
This is attributed to an effective reduction in strain enabled by the respective combination.
Obtained results for separated point defects in Si are in good agreement to previous theoretical work on this subject, both for intrinsic defects~\cite{leung99,al-mushadani03} as well as for C point defects~\cite{dal_pino93,capaz94}.
The ground-state configurations of these defects, i.e.\ the Si$_{\text{i}}$ \hkl<1 1 0> and C$_{\text{i}}$ \hkl<1 0 0> DB, are reproduced and compare well to previous findings of theoretical investigations on Si$_{\text{i}}$~\cite{leung99,al-mushadani03} as well as theoretical~\cite{dal_pino93,capaz94,burnard93,leary97,jones04} and experimental~\cite{watkins76,song90} studies on C$_{\text{i}}$.
-A quantitatively improved activation energy of \unit[0.9]{eV} for a qualitatively equal migration path based on studies by Capaz et.~al.~\cite{capaz94} to experimental values~\cite{song90,lindner06,tipping87} ranging from \unit[0.70--0.87]{eV} reinforce their derived mechanism of diffusion for C$_{\text{i}}$ in Si
+A quantitatively improved activation energy of \unit[0.9]{eV} for a qualitatively equal migration path based on studies by Capaz et~al.~\cite{capaz94} to experimental values~\cite{song90,lindner06,tipping87} ranging from \unit[0.70--0.87]{eV} reinforce their derived mechanism of diffusion for C$_{\text{i}}$ in Si
However, it turns out that the BC configuration is not a saddle point configuration as proposed by Capaz et~al.~\cite{capaz94} but constitutes a real local minimum if the electron spin is properly accounted for.
A net magnetization of two electrons, which is already clear by simple molecular orbital theory considerations on the bonding of the $sp$ hybridized C atom, is settled.
By investigating the charge density isosurface it turns out that the two resulting spin up electrons are localized in a torus around the C atom.
-With an activation energy of \unit[0.9]{eV} the C$_{\text{i}}$ carbon interstitial can be expected to be highly mobile at prevailing temperatures in the process under investigation, i.e.\ IBS.
+With an activation energy of \unit[0.9]{eV}, the C$_{\text{i}}$ carbon interstitial can be expected to be highly mobile at prevailing temperatures in the process under investigation, i.e.\ IBS.
Since the \ci{} \hkl<1 0 0> DB is the ground-state configuration and highly mobile, possible migration of these DBs to form defect agglomerates, as demanded by the model introduced in section~\ref{section:assumed_prec}, is considered possible.
-Unfortunately the description of the same processes fails if classical potential methods are used.
+Unfortunately, the description of the same processes fails if classical potential methods are used.
Already the geometry of the most stable DB configuration differs considerably from that obtained by first-principles calculations.
The classical approach is unable to reproduce the correct character of bonding due to the deficiency of quantum-mechanical effects in the potential.
Nevertheless, both methods predict the same type of interstitial as the ground-state configuration and also the order in energy of the remaining defects is reproduced fairly well.
projects / lectures / latex.git / blobdiff