Chapter \ref{chapter:basics} introduces some basics and internals of the utilized atomistic simulations as well as special methods of application.
Details of the simulation and associated test calculations are presented in chapter \ref{chapter:simulation}.
In chapter \ref{chapter:defects} results of investigations of single defect configurations, structures of comnbinations of two individual defects as well as some selected diffusion pathways in silicon are shown.
Chapter \ref{chapter:basics} introduces some basics and internals of the utilized atomistic simulations as well as special methods of application.
Details of the simulation and associated test calculations are presented in chapter \ref{chapter:simulation}.
In chapter \ref{chapter:defects} results of investigations of single defect configurations, structures of comnbinations of two individual defects as well as some selected diffusion pathways in silicon are shown.