+To summarize, the amorphous phase remains.
+Though, sharper peaks in the radial distributions at distances expected for a-SiC are observed indicating a slight acceleration of the dynamics due to elevated temperatures.
+
+\subsubsection{Conclusions concerning the usage of increased temperatures}
+
+Regarding the outcome of both, high and low C concentration simulations at increased temperatures, encouraging conclusions can be drawn.
+With the disappearance of the peaks at the respective cut-off radii, one limitation of the short range potential seems to be accomplished.
+In addition, sharper peaks in the radial distribution functions lead to the assumption of expeditious structural formation.
+The increase in temperature leads to the occupation of new defect states, which is particularly evident but not limited to the low C concentration simulations.
+
+The question remains, whether these states are only occupied due to the additional supply of kinetic energy and, thus, have to be considered unnatural for temperatures applied in IBS or whether the increase in temperature indeed enables infrequent transitions to occur faster, thus, leading to the intended acceleration of the dynamics and weakening of the unphysical quirks inherent to the potential.
+As already pointed out in section~\ref{section:defects:noneq_process_01} and section~\ref{section:defects:noneq_process_02}, IBS is a non-equilibrium process, which might result in the formation of the thermodynamically less stable \cs{} and \si{} configuration.
+Indeed, 3C-SiC is metastable and if not fabricated by IBS requires strong deviation from equilibrium and low temperatures to stabilize the 3C polytype.
+In IBS, highly energetic C atoms are able to generate vacant sites, which in turn can be occupied by highly mobile \ci{} atoms.
+This is in fact found to be favorable in the absence of the \si{}, which turned out to have a low interaction capture radius with the \cs{} atom and very likely prevents the recombination into a thermodynamically stable \ci{} DB for appropriate separations of the defect pair.
+Results gained in this chapter show preferential occupation of Si lattice sites by \cs{} enabled by increased temperatures supporting the assumptions drawn from the defect studies of the last chapter.
+
+Thus, it is concluded that increased temperatures is not exclusively usefull to accelerate the dynamics approximatively describing the structural evolution.
+Moreover it can be considered a necessary condition to deviate the system out of equilibrium enabling the formation of 3C-SiC, which is obviously realized by a successive agglomeration of \cs{}.
+
+\ifnum1=0
+
+\section{Valuation of a practicable temperature limit}
+\label{section:md:tval}
+
+The assumed applicability of increased temperature simulations as discussed above and the remaining absence of either agglomeration of substitutional C in low concentration simulations or amorphous to crystalline transition in high concentration simulations suggests to further increase the system temperature.
+So far, the highest temperature applied corresponds to 95 \% of the absolute Si melting temperature, which is 2450 K and specific to the Erhart/Albe potential.
+However, melting is not predicted to occur instantly after exceeding the melting point due to additionally required transition enthalpy and hysteresis behaviour.
+To check for the possibly highest temperature at which a transition fails to appear plain Si is heated up using a heating rate of $1\,^{\circ}\mathrm{C}/\text{ps}$.
+Fig.~\ref{fig:md:fe_and_t} shows the free energy and temperature evolution in the region around the transition temperature.
+Indeed a transition and the accompanying critical behaviour of the free energy is first observed at approximately 3125 K, which corresponds to 128 \% of the Si melting temperature.
+The difference in free energy is 0.58 eV per atom corresponding to $55.7 \text{ kJ/mole}$, which compares quite well to the Si enthalpy of melting of $50.2 \text{ kJ/mole}$.
+The late transition probably occurs due to the high heating rate and, thus, a large hysteresis behaviour extending the temperature of transition.
+To avoid melting transitions in further simulations system temperatures well below the transition point are considered safe.
+According to this study temperatures of 100 \% and 120 \% of the Si melting point could be used.
+However, defects, which are introduced due to the insertion of C atoms are known to lower the transition point.
+Indeed simulations show melting transitions already at the melting point whenever C is inserted.
+Thus, the system temperature of 95 \% of the Si melting point is considered the maximum limit.
+\begin{figure}[tp]
+\begin{center}
+\includegraphics[width=0.7\textwidth]{fe_and_t.ps}
+\end{center}
+\caption{Free energy and temperature evolution of plain Si at temperatures in the region around the melting transition.}
+\label{fig:md:fe_and_t}
+\end{figure}