\subsection{Carbon as an impurity in silicon}
-Below the solid solubility, C mainly occupies substitutionally Si lattice sites in Si \cite{newman65}.
+Below the solid solubility, C impurities mainly occupy substitutionally Si lattice sites in Si \cite{newman65}.
Due to the much smaller covalent radius of C compared to Si every incorporated C atom leads to a decrease in the lattice constant corresponding to a lattice contraction of about one atomic volume \cite{baker68}.
The induced strain is assumed to be responsible for the low solid solubility of C in Si, which was determined \cite{bean71} to be
\begin{equation}
\cdot\exp(\unit[-2.3]{eV/k_{\text{B}}T})
\text{ .} \text{{\color{red}k recursive!}}
\end{equation}
+
The barrier of diffusion of substitutional C has been determined to be around \unit[3]{eV} \cite{newman61}.
However, as suspected due to the substitutional position, the diffusion of C requires intrinsic point defects, i.e. Si self-interstitials and vacancies.
Similar to phosphorous and boron, which exclusively use self-interstitials as a diffusion vehicle, the diffusion of C atoms is expected to obey the same mechanism.
Indeed, enhanced C diffusion was observed in the presence of self-interstitial supersaturation \cite{kalejs84} indicating an appreciable diffusion component involving self-interstitials and only a negligible contribution by vacancies.
Substitutional C and interstitial Si react into a C-Si complex forming a dumbbell structure oriented along a crystallographic \hkl<1 0 0> direction on a regular Si lattice site.
This structure, the so called C-Si \hkl<1 0 0> dumbbell structure, was initially suspected by local vibrational mode absorption \cite{bean70} and finally verified by electron paramegnetic resonance \cite{watkins76} studies on irradiated Si substrates at low temperatures.
-Measuring the annealing rate of the defect as a function of temperature reveals barriers for migration ranging from \unit[0.73]{eV} \cite{song90} to \unit[0.87]{eV} \cite{tipping87}.
+Measuring the annealing rate of the defect as a function of temperature reveals barriers for migration ranging from \unit[0.73]{eV} \cite{song90} to \unit[0.87]{eV} \cite{tipping87}, which is highly mobile compared to substitutional C.
% diffusion pathway?
+% expansion of the lattice (positive strain)
%\subsection{Agglomeration phenomena}
% c-si agglomerattion as an alternative to sic precipitation (due to strain)
\subsection{Suppression of transient enhanced diffusion of dopant species}
+The predominant diffusion mechanism of most dopants in Si based on native self-interstitials \cite{fahey89} has a large impact on the diffusion behavior of dopants that have been implanted in Si.
+The excess population of Si self-interstitials created by low-energy implantations of dopants for shallow junction formation in submicron technologies may enhance the diffusion of the respective dopant during annealing by more than one order of magnitude compared to normal diffusion.
+This kind of diffusion, labeled transient enhanced diffusion (TED), which is driven by the presence of non-equilibrium concentrations of point defects, was first discovered for implantations of boron in Si \cite{hofker74} and is well understood today \cite{michel87,cowern90,stolk95,stolk97}.
+The TED of B was found to be inhibited in the presence of a sufficient amount of incorporated C \cite{cowern96}.
+This is due to the reduction of the excess Si self-interstitials with substitutional C atoms forming the C-Si interstitial complex \cite{stolk97,zhu98}.
+Therefore, incorporation of C provides a promising method for suppressing TED enabling an improved shallow junction formation in future Si devices.
+
+% in general: high c diffusion in areas of high damage, low diffusion for substitutional or even sic prec
+
\subsection{Strained silicon and silicon heterostructures}
-% -> skorupa 3.2: c sub vs sic prec
+
+% lattice location of implanted carbon
+Radiation damage introduced during implantation and a high concentration of the implanted species, which results in the reduction of the topological constraint of the host lattice imposed on the implanted species, can affect the manner of impurity incorporation.
+The probability of finding C, which will be most stable at sites for which the number of neighbors equals the natural valence, i.e. substitutionally on a regular Si site of a perfect lattice, is, thus, reduced at substitutional lattice sites and likewise increased to be found as an interstitial.
+Depending on the way C is incorporated and whether precipitation occurs or not the volume is either reduced in the case of substitutionally incorporated C or expanded in the case of C interstitial formation \cite{goesele85}.
+
+There are, however, ...
+In implanted Si the location of C is to a great deal incorporated as an interstitial atom due to a reduced topological contraint.
+Other methods exist to realize only substitutional C.
+
% -> my own links: strane etc ...
% -> skorupa 3.5: heterostructures
... \cite{lindner99_2} ...
+% -> skorupa 3.2: c sub vs sic prec
+
on surface ... md contraction along 110 ... kitabatake ... and ref in lindner ... rheed from si to sic ...
in ibs ... lindner and skorupa ...
projects / lectures / latex.git / blobdiff