first sent away beta version

[lectures/latex.git] / posic / thesis / sic.tex

diff --git a/posic/thesis/sic.tex b/posic/thesis/sic.tex
index 1302804..cb46a7b 100644 (file)
--- a/posic/thesis/sic.tex
+++ b/posic/thesis/sic.tex
@@ -51,9 +51,10 @@ Thermal conductivity [W/cmK] & 5.0 & 4.9 & 4.9 & 1.5 & 1.3 & 22 \\
 \hline
 \end{tabular}
 \end{center}
 \hline
 \end{tabular}
 \end{center}

-\caption[Properties of SiC polytypes and other semiconductor materials.]{Properties of SiC polytypes and other semiconductor materials. Doping concentrations are $10^{16}\text{ cm}^{-3}$ (A) and $10^{17}\text{ cm}^{-3}$ (B) respectively. References: \cite{wesch96,casady96,park98}. {\color{red}Todo: add more refs + check all values!}}
+\caption[Properties of SiC polytypes and other semiconductor materials.]{Properties of SiC polytypes and other semiconductor materials. Doping concentrations are $10^{16}\text{ cm}^{-3}$ (A) and $10^{17}\text{ cm}^{-3}$ (B) respectively. References: \cite{wesch96,casady96,park98}.}

 \label{table:sic:properties}
 \end{table}
 \label{table:sic:properties}
 \end{table}

+% todo add more refs + check all values!

 Different polytypes of SiC exhibit different properties.
 Some of the key properties are listed in Table~\ref{table:sic:properties} and compared to other technologically relevant semiconductor materials.
 Despite the lower charge carrier mobilities for low electric fields SiC outperforms Si concerning all other properties.
 Different polytypes of SiC exhibit different properties.
 Some of the key properties are listed in Table~\ref{table:sic:properties} and compared to other technologically relevant semiconductor materials.
 Despite the lower charge carrier mobilities for low electric fields SiC outperforms Si concerning all other properties.


@@ -359,7 +360,7 @@ Indeed, closely investigating the large amount of literature pulled up in the la
 High resolution transmission electron microscopy (HREM) investigations of C-implanted Si at room temperature followed by rapid thermal annealing (RTA) show the formation of C-Si dumbbell agglomerates, which are stable up to annealing temperatures of about \unit[700-800]{$^{\circ}$C}, and a transformation into 3C-SiC precipitates at higher temperatures \cite{werner96,werner97}.
 The precipitates with diamateres between \unit[2]{nm} and \unit[5]{nm} are incorporated in the Si matrix without any remarkable strain fields, which is explained by the nearly equal atomic density of C-Si agglomerates and the SiC unit cell.
 Implantations at \unit[500]{$^{\circ}$C} likewise suggest an initial formation of C-Si dumbbells on regular Si lattice sites, which agglomerate into large clusters \cite{lindner99_2}.
 High resolution transmission electron microscopy (HREM) investigations of C-implanted Si at room temperature followed by rapid thermal annealing (RTA) show the formation of C-Si dumbbell agglomerates, which are stable up to annealing temperatures of about \unit[700-800]{$^{\circ}$C}, and a transformation into 3C-SiC precipitates at higher temperatures \cite{werner96,werner97}.
 The precipitates with diamateres between \unit[2]{nm} and \unit[5]{nm} are incorporated in the Si matrix without any remarkable strain fields, which is explained by the nearly equal atomic density of C-Si agglomerates and the SiC unit cell.
 Implantations at \unit[500]{$^{\circ}$C} likewise suggest an initial formation of C-Si dumbbells on regular Si lattice sites, which agglomerate into large clusters \cite{lindner99_2}.

-The agglomerates of such dimers, which do not generate lattice strain but lead to a local increase of the lattice potential \cite{werner96,wener97}, are indicated by dark contrasts and otherwise undisturbed Si lattice fringes in HREM, as can be seen in Fig.~\ref{fig:sic:hrem:c-si}.
+The agglomerates of such dimers, which do not generate lattice strain but lead to a local increase of the lattice potential \cite{werner96,werner97}, are indicated by dark contrasts and otherwise undisturbed Si lattice fringes in HREM, as can be seen in Fig.~\ref{fig:sic:hrem:c-si}.

 \begin{figure}[t]
 \begin{center}
 \subfigure[]{\label{fig:sic:hrem:c-si}\includegraphics[width=0.25\columnwidth]{tem_c-si-db.eps}}
 \begin{figure}[t]
 \begin{center}
 \subfigure[]{\label{fig:sic:hrem:c-si}\includegraphics[width=0.25\columnwidth]{tem_c-si-db.eps}}


@@ -420,6 +421,5 @@ On the other hand, processes relying upon prevention of precipitation in order t
 % strane94/guedj98: my model - c redist by si int (spe) and surface diff (mbe)
 % serre95: low/high t implants -> mobile c_i / non-mobile sic precipitates
 
 % strane94/guedj98: my model - c redist by si int (spe) and surface diff (mbe)
 % serre95: low/high t implants -> mobile c_i / non-mobile sic precipitates
 

-% todo
-% own polytype stacking sequence image
+% todo - own polytype stacking sequence image