The influence of a nearby vacancy, another carbon interstitial and a substitutional defect as well as a silicon self-interstitial has been investigated systematically.\r
Interactions of various combinations of defects have been characterized including a couple of selected migration pathways within these configurations.\r
Almost all of the investigated pairs of defects tend to agglomerate allowing for a reduction in strain.\r
-The formation of structures involving strong carbon-carbon bonds was found to occur very unlikely.\r
-In contrast, substitutional carbon was found to occur in all probability.\r
+The formation of structures involving strong carbon-carbon bonds has been found to occur very unlikely.\r
+In contrast, substitutional carbon occurs in all probability.\r
A long range capture radius has been observed for pairs of interstitial carbon as well as interstitial carbon and vacancies.\r
A rather small capture radius has been identified for substitutional carbon and silicon self-interstitials.\r
We derive conclusions on the precipitation mechanism of silicon carbide in bulk silicon and discuss conformability to experimental findings.\r