in gr"o"ser werdenden amorphen Grenzschichten
\item Tempern:
$T=1250 \, ^{\circ} \text{C}$, $t=10\text{ h}$\\
- Homogene, st"ochiometrische 3C-SiC Schicht mit
+ Homogene st"ochiometrische 3C-SiC Schicht mit
scharfen Grenzfl"achen
\end{itemize}
SiC-Ausscheidungsvorgang
}
- \vspace{64pt}
+ Hochaufl"osungs-TEM:\\[-0.5cm]
- Hier die aus experimentellen Untersuchungen heraus vermuteten
- Ausscheidungsvorgaenge rein.
+ \begin{minipage}{3.3cm}
+ \includegraphics[width=3.3cm]{tem_c-si-db.eps}
+ \end{minipage}
+ \begin{minipage}{9cm}
+ Bereich oberhalb des Implantationsmaximums\\
+ Wolkenstruktur "uberlagert auf ungest"orten Si-Muster\\
+ $\rightarrow$ C-Si Dumbbells
+ \end{minipage}
+ \begin{minipage}{3.3cm}
+ \includegraphics[width=3.3cm]{tem_3c-sic.eps}
+ \end{minipage}
+ \begin{minipage}{9cm}
+ Bereich ums Implantationsmaximum\\
+ Moir\'e-Kontrast-Muster\\
+ $\rightarrow$ inkoh"arente 3C-SiC-Ausscheidungen in c-Si-Matrix
+ \end{minipage}
\end{slide}
\begin{minipage}{4cm}
\begin{itemize}
\item $E_f=0.47$ eV
- \item Very often observed
- \item Most energetically\\
- favorable configuration
- \item Experimental\\
- evidence [6]
+ \item sehr h"aufig beobachtet
+ \item energetisch g"unstigste Konfiguration
+ \item experimentelle und theoretische Best"atigungen
+ f"ur die Existenz dieser Konfiguration
\end{itemize}
- \vspace{24pt}
- {\tiny
- [6] G. D. Watkins and K. L. Brower,\\
- Phys. Rev. Lett. 36 (1976) 1329.
- }
\end{minipage}
\begin{minipage}{8cm}
\includegraphics[width=9cm]{100-c-si-db_s.eps}
\end{itemize}
}}}}
\rput(3.5,1){\rnode{cool}{\psframebox[fillstyle=solid,fillcolor=lbb]{
- \parbox{3.5cm}{
- Abk"uhlen auf $20\, ^{\circ}\textrm{C}$
+ \parbox{5.0cm}{
+ Nach 100 ps abk"uhlen auf $20\, ^{\circ}\textrm{C}$
}}}}
\ncline[]{->}{init}{insert}
\ncline[]{->}{insert}{cool}
\end{slide}
-\end{document}
-
\begin{slide}
{\large\bf
\includegraphics[width=6.3cm]{pc_si-si.eps}
\begin{minipage}[t]{6.3cm}
- \tiny
+ \scriptsize
\begin{itemize}
- \item C-C peak at 0.15 nm similar to next neighbour distance of graphite
- or diamond\\
+ \item C-C, 0.15 nm: NN-Abstand in Graphit bzw. Diamant\\
$\Rightarrow$ Formation of strong C-C bonds
(almost only for high C concentrations)
- \item Si-C peak at 0.19 nm similar to next neighbour distance in 3C-SiC
- \item C-C peak at 0.31 nm equals C-C distance in 3C-SiC\\
- (due to concatenated, differently oriented
- <100> dumbbell interstitials)
+ \item Si-C, 0.19 nm: NN-Abstand in 3C-SiC
+ \item C-C, 0.31 nm: C-C Abstand in 3C-SiC\\
+ (vekettetrkettete, verschieden orientierte 100 C-Si Dumbbells)
\item Si-Si shows non-zero g(r) values around 0.31 nm like in 3C-SiC\\
and a decrease at regular distances\\
(no clear peak,