corresponding to $3 \, nm$ of substrat
removal
\end{itemize}
+
+ \subsection*{3.3 {\color{blue} TRIM collision statistics}}
+ \begin{center}
+ \includegraphics[width=8cm]{trim_coll_e.eps}
+ \end{center}
+ \begin{center}
+ $\Rightarrow$ mean constant energy loss per collision of an ion
+ \end{center}
\end{kasten}
\end{spalte}
\begin{spalte}
of lamellar structure - the recipe}}
\subsubsection*{4.4.1 Constant carbon concentration}
\makebox[11cm]{%
- \parbox[c]{6cm}{%
- \includegraphics[width=6cm]{multiple_impl_cp_e.eps}
- }
\parbox[c]{5cm}{%
\begin{itemize}
\item multiple implantation \\ steps
\item energies: $180$ - $10 \, keV$
+ \item higher temeprature\\
+ $\rightarrow$ prevent amorphization
\end{itemize}
$\Rightarrow$ nearly constant carbon distribution
($10 \, at.\%$)
}
+ \parbox[c]{6cm}{%
+ \includegraphics[width=6cm]{multiple_impl_cp_e.eps}
+ }
}
\subsubsection*{4.4.2 2 MeV C$^+$ implantation
step}