For the amorphization/recrystallization process random values are computed to specify the volume which is hit by an impinging carbon ion. Two random numbers $x,y \in [0,1]$ are generated and mapped to the coordinates $k,l$ using a uniform probability distribution, $p(x)dx=dx \textrm{, } p(y)dy=dy$. A random number $z$ corresponding to the $m$ coordinate is distributed according to the linear approximated nuclear stopping power, $p(z)dz=(s z+s_0)dz$, where $s$ and $s_0$ are simulation parameters describing the nuclear energy loss. After calculating the local probability of amorphization $p_{c \rightarrow a}(k,l,m)$ of the selected volume another random number determines depending on the current status whether the volume turns amorphous, recrystallizes or remains unchanged. This step is looped for the average hits per ion in the simulation window as extracted from TRIM \cite{9} collision data.
For the amorphization/recrystallization process random values are computed to specify the volume which is hit by an impinging carbon ion. Two random numbers $x,y \in [0,1]$ are generated and mapped to the coordinates $k,l$ using a uniform probability distribution, $p(x)dx=dx \textrm{, } p(y)dy=dy$. A random number $z$ corresponding to the $m$ coordinate is distributed according to the linear approximated nuclear stopping power, $p(z)dz=(s z+s_0)dz$, where $s$ and $s_0$ are simulation parameters describing the nuclear energy loss. After calculating the local probability of amorphization $p_{c \rightarrow a}(k,l,m)$ of the selected volume another random number determines depending on the current status whether the volume turns amorphous, recrystallizes or remains unchanged. This step is looped for the average hits per ion in the simulation window as extracted from TRIM \cite{9} collision data.