\bibitem{5} J.K.N. Lindner, M. Häberlen, M. Schmidt, W. Attenberger, B. Stritzker, Nucl. Instr. and Meth. B 186 (2000) 206-211
\bibitem{6} W.J. Taylor, T.Y. Tan, U.Gösele, Appl. Phys. Lett. 62 (1993) 3336
\bibitem{7} J. Linnross, R.G. Elliman, W.L. Brown, J. Mater, Res. 3 (1988) 1208
\bibitem{8} SRIM2000 Version of the TRIM program described by J.F. Ziegler, J.P. Biersack, U. Littmark in: The Stopping and Range of Ions in Matter, vol. 1, Pergamon Press, New York, 1985
\bibitem{5} J.K.N. Lindner, M. Häberlen, M. Schmidt, W. Attenberger, B. Stritzker, Nucl. Instr. and Meth. B 186 (2000) 206-211
\bibitem{6} W.J. Taylor, T.Y. Tan, U.Gösele, Appl. Phys. Lett. 62 (1993) 3336
\bibitem{7} J. Linnross, R.G. Elliman, W.L. Brown, J. Mater, Res. 3 (1988) 1208
\bibitem{8} SRIM2000 Version of the TRIM program described by J.F. Ziegler, J.P. Biersack, U. Littmark in: The Stopping and Range of Ions in Matter, vol. 1, Pergamon Press, New York, 1985