\begin{minipage}{12cm}
\includegraphics[width=9cm]{../../nlsop/img/k393abild1_e_l.eps}\\
{\scriptsize
-XTEM bright-field, \unit[180]{keV} C$^+ \rightarrow$ Si, \degc{150},
+XTEM bright-field, \unit[180]{keV} C$^+ \rightarrow$ Si,
+{\color{red}\underline{\degc{150}}},
Dose: \unit[4.3 $\times 10^{17}$]{cm$^{-2}$}
}
\end{minipage}
\end{slide}
-\fi
-
\begin{slide}
\begin{minipage}{3.7cm}
-\headdiplom
+\begin{pspicture}(0,0)(0,0)
+\rput(1.7,0.2){\psframebox[fillstyle=gradient,gradbegin=red,gradend=white,gradlines=1000,gradangle=10,gradmidpoint=1,linestyle=none]{
+\begin{minipage}{3.7cm}
+\hfill
+\vspace{0.7cm}
+\end{minipage}
+}}
+\end{pspicture}
{\large\bf
Results
}
\item continuous\\
amorphous layer
\item a/c interface
- \item lamella precipitates
+ \item lamellar precipitates
\end{itemize}
\ldots reproduced!\\[1.4cm]
\item C accumulation in the amorphous phase / Origin of stress
\end{itemize}
-\begin{picture}(0,0)(-265,-30)
+\begin{picture}(0,0)(-260,-50)
\framebox{
\begin{minipage}{3cm}
\begin{center}
}
\end{picture}
+\end{slide}
+
+\fi
+
+\begin{slide}
+
+\headphd
+{\large\bf
+ Formation of epitaxial single crystalline 3C-SiC
+}
+
+\footnotesize
+
+\vspace{0.2cm}
+
+\includegraphics[width=7cm]{ibs_3c-sic.eps}\\
+
+\begin{itemize}
+ \item \underline{Implantation step 1}\\[0.1cm]
+ Almost stoichiometric dose | \unit[180]{keV} | \degc{500}\\
+ $\Rightarrow$ Epitaxial {\color{blue}3C-SiC} layer \&
+ {\color{blue}precipitates}
+ \item \underline{Implantation step 2}\\[0.1cm]
+ Little remaining dose | \unit[180]{keV} | \degc{250}\\
+ $\Rightarrow$
+ Destruction/Amorphization of precipitates at layer interface
+ \item \underline{Annealing}\\[0.1cm]
+ \unit[10]{h} at \degc{1250}\\
+ $\Rightarrow$ Homogeneous 3C-SiC layer with sharp interfaces
+\end{itemize}
+
+\begin{pspicture}(0,0)(0,0)
+\rput(10.0,4.5){\rnode{init}{\psframebox[fillstyle=solid,fillcolor=white,linecolor=blue,linestyle=solid]{
+\begin{minipage}{5.3cm}
+ \begin{center}
+ {\color{blue}
+ 3C-SiC precipitation\\
+ not yet fully understood
+ }
+ \end{center}
+ \vspace*{0.1cm}
+ \renewcommand\labelitemi{$\Rightarrow$}
+ Details of the SiC precipitation
+ \begin{itemize}
+ \item significant technological progress\\
+ in SiC thin film formation
+ \item perspectives for processes relying\\
+ upon prevention of SiC precipitation
+ \end{itemize}
+\end{minipage}
+}}}
+\end{pspicture}
+
+
\end{slide}
Model displaying the formation of ordered lamellae
}
-\framebox{
- \begin{minipage}{6.3cm}
- \begin{center}
- {\color{blue}
- Precipitation mechanism not yet fully understood!
- }
- \renewcommand\labelitemi{$\Rightarrow$}
- \small
- \underline{Understanding the SiC precipitation}
- \begin{itemize}
- \item significant technological progress in SiC thin film formation
- \item perspectives for processes relying upon prevention of SiC precipitation
- \end{itemize}
- \end{center}
- \end{minipage}
-}
\end{slide}